×

POLISHING APPARATUS

  • US 20190308296A1
  • Filed: 04/01/2019
  • Published: 10/10/2019
  • Est. Priority Date: 04/05/2018
  • Status: Active Grant
First Claim
Patent Images

1. A polishing apparatus comprising:

  • a chuck table holding a workpiece thereon; and

    a polishing unit polishing the workpiece held on the chuck table, whereinthe polishing unit includesa spindle having an axial bore defined therein,a housing by which the spindle is rotatably supported,a polishing pad mounted on an end of the spindle and having an opening defined therein that is held in fluid communication with the axial bore,a slurry supply pipe inserted in the axial bore in the spindle and having a supply port supplying a slurry to the workpiece held on the chuck table and an inlet port remote from the supply port, introducing the slurry into the slurry supply pipe,slurry introducing means connected to the inlet port of the slurry supply pipe, introducing the slurry into the inlet port, andcleaning water introducing means connected to the inlet port of the slurry supply pipe, introducing cleaning water into the inlet port,the slurry supply pipe has an ejection port defined in a side wall of the slurry supply pipe above and near the supply port thereof, the ejection port being open toward an inner wall surface of the spindle that defines the axial bore,the slurry introducing means introduces the slurry into the slurry supply pipe at a flow rate set to such a value that the slurry introduced into the slurry supply pipe reaches the supply port without being ejected from the ejection port and is supplied from the supply port through the central opening in the polishing pad to the workpiece held on the chuck table, andthe cleaning water introducing means introduces the cleaning water into the slurry supply pipe at a flow rate set to such a value, which is larger than the flow rate of the slurry, that the cleaning water introduced into the slurry supply pipe is ejected from the ejection port toward the inner wall surface of the spindle and cleans the inner wall surface of the spindle.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×