METHOD OF SUPPLYING CHEMICAL LIQUID USING AN INK JET HEAD
First Claim
1. A method of supplying chemical liquid using an ink jet head including a central portion and peripheral portions each having a first portion and a second portion, which comprises:
- providing a first chemical liquid supply of a chemical liquid from the central portion onto a substrate, providing a second chemical liquid supply of the chemical liquid from the first portion onto a substrate, and providing a third chemical liquid supply of the chemical liquid from the second portion onto a substrate;
moving the ink jet head over the substrate by a length of the peripheral portion; and
providing the first chemical liquid supply of the chemical liquid from the central portion onto a substrate, providing the second chemical liquid supply of the chemical liquid from the first portion onto a substrate, and providing the third chemical liquid supply of the chemical liquid from the second portion onto a substrate.
1 Assignment
0 Petitions
Accused Products
Abstract
In a method of supplying chemical liquid using an ink jet head including a central portion and peripheral portions each having a first portion and a second portion, a first chemical liquid supply of a chemical liquid may be provided from the central portion onto a substrate, a second chemical liquid supply of the chemical liquid may be provided from the first portion onto a substrate, and a third chemical liquid supply of the chemical liquid may be provided from the second portion onto a substrate. The ink jet head may be moved over the substrate by a length of the peripheral portion. The first chemical liquid supply of the chemical liquid may be provided from the central portion onto a substrate, the second chemical liquid supply of the chemical liquid may be provided from the first portion onto a substrate, and the third chemical liquid supply of the chemical liquid may be provided from the second portion onto a substrate.
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Citations
10 Claims
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1. A method of supplying chemical liquid using an ink jet head including a central portion and peripheral portions each having a first portion and a second portion, which comprises:
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providing a first chemical liquid supply of a chemical liquid from the central portion onto a substrate, providing a second chemical liquid supply of the chemical liquid from the first portion onto a substrate, and providing a third chemical liquid supply of the chemical liquid from the second portion onto a substrate; moving the ink jet head over the substrate by a length of the peripheral portion; and providing the first chemical liquid supply of the chemical liquid from the central portion onto a substrate, providing the second chemical liquid supply of the chemical liquid from the first portion onto a substrate, and providing the third chemical liquid supply of the chemical liquid from the second portion onto a substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification