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METHOD OF SUPPLYING CHEMICAL LIQUID USING AN INK JET HEAD

  • US 20190308414A1
  • Filed: 04/08/2019
  • Published: 10/10/2019
  • Est. Priority Date: 04/09/2018
  • Status: Active Grant
First Claim
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1. A method of supplying chemical liquid using an ink jet head including a central portion and peripheral portions each having a first portion and a second portion, which comprises:

  • providing a first chemical liquid supply of a chemical liquid from the central portion onto a substrate, providing a second chemical liquid supply of the chemical liquid from the first portion onto a substrate, and providing a third chemical liquid supply of the chemical liquid from the second portion onto a substrate;

    moving the ink jet head over the substrate by a length of the peripheral portion; and

    providing the first chemical liquid supply of the chemical liquid from the central portion onto a substrate, providing the second chemical liquid supply of the chemical liquid from the first portion onto a substrate, and providing the third chemical liquid supply of the chemical liquid from the second portion onto a substrate.

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