DEVICE FOR TRANSMITTING A MOVEMENT AND A FORCE BETWEEN TWO ZONES THAT ARE INSULATED FROM ONE ANOTHER

• US 20190308873A1
• Filed: 12/06/2017
• Published: 10/10/2019
• Est. Priority Date: 12/07/2016
• Status: Active Grant

• Current Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Original Assignee: Commissariat a L'Energie Atomique (French Alternative Energies and Atomic Energy Commission)
• Inventors: JOET, Loic
• Granted Patent: US 10,807,858 B2
• Time in Patent Office: Days
• CPC Class Codes: B81B 2201/0257 Microphones or microspeakers
• CPC Class Codes: B81B 2201/0264 Pressure sensors
• CPC Class Codes: B81B 2201/037 Microtransmissions
• CPC Class Codes: B81B 2203/0127 Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function
• CPC Class Codes: B81B 2203/04 Electrodes
• CPC Class Codes: B81B 2203/051 Translation according to an axis parallel to the substrate
• CPC Class Codes: B81B 2203/058 Rotation out of a plane parallel to the substrate
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: H04R 19/02 Loudspeakers H04R19/01 takes precedence
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 2201/003 Mems transducers or their use
• CPC Class Codes: H04R 31/00 Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor manufacture of microstructural arrangements of deformable or non-deformable structures in general B81C1/00182

Abstract

A device transmits a movement and a force between a first zone and a second zone which are insulated from one another in a sealed manner. The device includes a planar support, a transmission element that is rotatably movable with respect to the support by a pivot joint having an axis of rotation that is parallel to a plane of the support, an opening in the support through which the transmission element passes and level with which the pivot joint is positioned. The transmission element includes at least one first transmission arm on one side of the plane of the support and one second transmission arm on the other side of the plane of the support, and sealed insulation positioned in the opening, such that it insulates the first zone from the second zone in a sealed manner and allows the rotational movement of the transmission element.

Claims

1-20. -20. (canceled)

21. A transmission device for a microelectromechanical system, said transmission device being able to transmit a movement and a force between a first zone and a second zone sealingly insulated from each other, said transmission device comprising:

a support extending in a plane;

a transmission element rotatably movable with respect to the support by a pivot hinge with an axis of rotation parallel to the support plane, said transmission element comprising at least one first transmission arm on one side of the support plane in one of the first and second zones and a second transmission arm on the other side of the support plane in the other of said first and second zones;

an aperture in the support through which the transmission element passes and at which the pivot hinge is disposed; and

a sealed insulation device disposed in the aperture, such that the sealed insulation device sealingly insulates the first zone from the second zone and they allow the rotational movement of the transmission element.

22. The transmission device according to claim 21, wherein the sealed insulation device comprises an elastically deformable membrane which is tensioned between a rim of the aperture and the transmission element.

23. The transmission device according to claim 22, wherein the sealed insulation device comprises mechanical reinforcements on at least one of the faces of the membrane.

24. The transmission device according to claim 21, wherein the pivot hinge comprises one blade or several aligned blades extending between the transmission element and an edge of the aperture and able to be torsionally deformed.

25. The transmission device according to claim 24, wherein the blade(s) has (have) a dimension along a direction orthogonal to the support plane such that the blade(s) offer(s) a rigidity in the off-plane direction limiting off-plane movements of the transmission element.

26. The transmission device according to claim 21, wherein the transmission element comprises at least one transmission shaft connecting the first and second transmission arms, said transmission shaft extending in a direction orthogonal to the support plane on either side of the sealed insulation device.

27. The transmission device according to claim 26, wherein the pivot hinge comprises one blade or several aligned blades extending between the transmission element and an edge of the aperture and able to be torsionally deformed, and wherein the blade(s) is (are) connected to the transmission shaft and the assembly formed by the transmission shaft and the first and second transmission arms is a rigid assembly.

28. The transmission device according to claim 26, wherein the transmission element comprises several transmission shafts configured to be translationally moved along a direction orthogonal to the support plane.

29. The transmission device according to claim 28, wherein each of the first and second transmission arms is hinged to each transmission shaft by a hinge allowing a rotation and a translation and in which the blade(s) is (are) mechanically connected to one of the first and second transmission arms.

30. The transmission device according to claim 29, wherein for each transmission shaft, the hinge allowing a rotation and a translation of said transmission shaft comprises one or more coupling blades.

31. The transmission device according to claim 21, wherein at least one of the first and second zones form a controlled atmosphere chamber.

32. The transmission device according to claim 21, comprising an element movable relative to the support such as a piston or a membrane able to apply a movement and a force to the transmission element in the first zone.

33. The transmission device according to claim 21, comprising, in the second zone, a sensor for measuring the movement of and/or the force applied to the transmission element in the first zone and/or an actuator.

34. The transmission device according to claim 33, comprising, in the second zone, at least one electrode secured to the transmission element and at least one counter-electrode forming the sensor for measuring the movement of and/or the force applied to the transmission element in the first zone and/or an actuator.

35. A system comprising:

at least one of the transmission device according to claim 32 forming a differential pressure sensor.

36. A system comprising:

at least one of the transmission device according to claim 33 forming a differential pressure sensor.

37. The system according to claim 35, further comprising an element movable relative to the support such as a piston or a membrane able to apply a movement and a force to the transmission element in the first zone, said system forming a microphone, wherein the piston or the membrane comprises a face subjected to an environment the pressure variations of which are desired to be detected and a face subjected to a reference pressure.

38. The system according to claim 36, further comprising an element movable relative to the support such as a piston or a membrane able to apply a movement and a force to the transmission element in the first zone, said system forming a microphone, wherein the piston or the membrane comprises a face subjected to an environment the pressure variations of which are desired to be detected and a face subjected to a reference pressure.

39. A system comprising:

the transmission device according to claim 33;

an element movable relative to the support, the element including a piston or a membrane able to apply a movement and a force to the transmission element in the first zone, said system forming a loudspeaker,

wherein the piston or membrane is to be moved to emit a sound.

40. A method for manufacturing the transmission device according to claim 21, comprising, from a stack comprising a substrate, a first sacrificial layer, a sandwich layer for forming the sealed insulation means, a second sacrificial layer:

a) structuring the layers so as to have access to the substrate,

b) forming a thick layer on the second sacrificial layer and in contact with the substrate,

c) forming one of the transmission arms,

d) at least partially removing the second sacrificial layer,

e) bonding a cap on the thick layer,

f) turning over the assembly,

g) forming the other transmission arm, and

h) at least partially removing the first sacrificial layer so as to release the sandwich layer.

41. The method according to claim 40, the transmission element further comprising at least one transmission shaft formed at least partly during step c) and at least partly during step g).

42. The method according to claim 40, wherein step c) is achieved by structuring the thick layer and step g) is achieved by structuring the substrate.