SURFACE TREATMENT DEVICE, SURFACE TREATMENT METHOD AND PADDLE

• US 20190309435A1
• Filed: 03/28/2019
• Published: 10/10/2019
• Est. Priority Date: 04/10/2018
• Status: Active Grant

• Current Assignee: C.Uyemura & Co., Ltd.
• Original Assignee: C.Uyemura & Co., Ltd.
• Inventors: Okuda, Tomoji, Matsuyama, Daisuke, Kiso, Masayuki, Hashimoto, Daisuke, Okada, Akira, Taniguchi, Keita
• Granted Patent: US 11,173,513 B2
• Time in Patent Office: Days
• CPC Class Codes: B01F 31/441 performing a rectilinear reciprocating movement
• CPC Class Codes: B01F 31/449 Stirrers constructions
• CPC Class Codes: B05C 11/11 Vats or other containers for liquids or other fluent materials
• CPC Class Codes: B05C 3/04 with special provision for agitating the work or the liquid or other fluent material
• CPC Class Codes: B05C 3/09 for treating separate articles
• CPC Class Codes: C23C 18/1628 Specific elements or parts of the apparatus
• CPC Class Codes: C25D 17/001 Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
• CPC Class Codes: C25D 17/02 Tanks; Installations therefor
• CPC Class Codes: C25D 21/10 Agitating of electrolytes; Moving of racks

Abstract

The purpose of the present invention is to provide a surface treatment device and a paddle with improved strength and uniform plating thickness by uniformly stirring surface treatment solution near an object to be plated. Also, the purpose of the present invention is to provide a surface treatment method capable of stirring for a long period of time, by uniformizing plating thickness, and by improving a strength of a paddle. A surface treatment device comprising at least one plateshaped paddle, in a surface treatment tank, for stirring surface treatment solution near an object to be plated by reciprocally moving the paddle with respect to the object to be plated, wherein the paddle is configured by integrally forming a plurality of square bars provided in depth direction of the surface treatment solution along the object to be plated at regular intervals, and a square bar of the plurality of square bars is provided with a curved surface with respect to the object to be plated in a cross section in thickness direction of the square bar.

Claims

1. A surface treatment device comprising at least one plate-shaped paddle, in a surface treatment tank, for stirring surface treatment solution near an object to be plated by reciprocally moving the paddle with respect to the object to be plated,

wherein the paddle is configured by integrally forming a plurality of square bars provided in depth direction of the surface treatment solution along the object to be plated at regular intervals, and

a square bar of the plurality of square bars is provided with a curved surface with respect to the object to be plated in a cross section in thickness direction of the square bar.

2. The surface treatment device according to claim 1, wherein the curved surface is provided alternately facing left and facing right with respect to the object to be plated.

3. The surface treatment device according to claim 1, wherein the intervals are formed to be 10 to 30 mm.

4. The surface treatment device according to claim 1, wherein the square bar is in square or rectangle shape with a side of 5 to 10 mm.

5. The surface treatment device according to claim 4, wherein the curved surface is 3 to 10 mm in radius.

6. The surface treatment device according to claim 1, wherein a distance between the paddle and the object to be plated is 10 to 30 mm.

7. The surface treatment device according to claim 1, further comprising a power means for reciprocally moving the paddle with a stroke of 50 to 200 mm, and with a moving speed of 35 to 600 mm/s.

8. The surface treatment device according to claim 1, wherein the paddle is provided at both sides of the object to be plated.

9. A surface treatment method using at least one plate-shaped paddle for stirring surface treatment solution near an object to be plated by reciprocally moving the paddle with respect to the object to be plated,

wherein the paddle is configured by integrally forming a plurality of square bars provided in depth direction of the surface treatment solution along the object to be plated at regular intervals, and

a square bar of the plurality of square bars is provided with a curved surface with respect to the object to be plated in a cross section in thickness direction of the square bar.

10. A plate-shaped paddle for stirring surface treatment solution near an object to be plated by reciprocally moving the paddle with respect to the object to be plated,

wherein the paddle is configured by integrally forming a plurality of square bars provided in one direction at regular intervals, and

a square bar of the plurality of square bars is provided with a curved surface in a cross section in thickness direction of the square bar.