A POSITION CORRECTION METHOD AND A SYSTEM FOR POSITION CORRECTION IN RELATION TO FOUR PROBE RESISTANCE MEASUREMENTS
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Abstract
The present invention relates to a method of establishing specific electrode positions by providing a multi-point probe and a test sample. The method comprises the measuring or determining of a distance between two of the electrodes of the multi-point probe and establishing a resistance model representative of the test sample. The method further comprises the performing of at least three different sheet resistance measurements and establishing for each of the different sheet resistance measurement a corresponding predicted sheet resistance based on the resistance model. Thereafter the method comprises the establishment of a set of differences constituting the difference between each of the predicted sheet resistance and its corresponding measured sheet resistance, and deriving the specific electrode positions of the multi-point probe on the surface of the test sample by using the distance and performing a data fit by minimizing an error function constituting the sum of the set of differences.
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Citations
35 Claims
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1-15. -15. (canceled)
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16. A method of establishing specific electrode positions, on a surface of a test sample, of a multi-point probe that includes more than four parallel probe arms extending from a probe body, each of the probe arms including an electrode, wherein the method comprises the steps of:
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(a) positioning the multi-point probe such that each of the electrodes is in contact with the surface of the test sample; (b) selecting two of the electrodes of the multi-point probe; (c) determining a distance between the selected two of the electrodes; (d) establishing a resistance model representative of the test sample, the resistance model defining specific electrode positions of the multi-point probe relative to the surface of the test sample included as unknown parameters, the resistance model representing the test sample as at least one of a finite sheet and a multi-layered sheet; (e) performing a plurality of different resistance measurements on the test sample with the multi-point probe, each of the resistance measurements including; (i) selecting four different electrodes of the multi-point probe; (ii) dividing the four different electrodes into a first pair of electrodes and a second pair of electrodes; (iii) applying a current propagating through the test sample between the first pair of electrodes; (iv) detecting a voltage induced between the second pair of electrodes; and (v) establishing a measured resistance based on a ratio of the voltage and the current; (f) establishing for each of the different resistance measurements a corresponding predicted resistance based on the resistance model; (g) establishing a set of differences constituting the difference between each of the predicted resistances and its corresponding measured resistance; and (h) deriving the specific electrode positions of the multi-point probe on the surface of the test sample by using the distance between the selected two of the electrodes, and performing a data fit by minimizing an error function constituting the sum of the set of differences. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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28. A computer-based system for establishing specific electrode positions, on a surface of a test sample, of a multi-point probe, the system comprising:
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a multi-point probe having a probe body and more than four parallel probe arms extending from the probe body, each of the probe arms including an electrode, the multi-point probe being positionable such that each of the electrodes is in contact with a surface of a test sample, wherein, when the multi-point probe is so positioned, a distance is defined between two outermost electrodes of the multi-point probe, the system further including a resistance model representative of the test sample, the resistance model having the specific electrode positions of the multi-point probe relative to the surface of the test sample included as unknown parameters, the resistance model representing the test sample as at least one of a finite sheet and a multi-layered sheet, the system further comprising; first means for performing a plurality of different resistance measurements, each of the resistance measurements including; (i) selecting four different electrodes of the multi-point probe; (ii) dividing the four different electrodes into a first pair of electrodes and a second pair of electrodes; (iii) applying a current propagating through the test sample between the first pair of electrodes; (iv) detecting a voltage induced between the second pair of electrodes; and (v) establishing a measured resistance based on a ratio of the voltage and the current; second means for establishing, for each of the different resistance measurements, a corresponding predicted resistance based on the resistance model; third means for establishing a set of differences constituting the difference between each of the predicted resistances and its corresponding measured resistance; and fourth means for deriving the specific electrode positions of the multi-point probe on the surface of the test sample by using the distance between the two outermost electrodes and performing a data fit by minimizing an error function constituting the sum of the set of differences. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35)
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Specification