SAMPLE MANIPULATION FOR NONDESTRUCTIVE SAMPLE IMAGING

• US 20190311877A1
• Filed: 04/10/2018
• Published: 10/10/2019
• Est. Priority Date: 04/10/2018
• Status: Active Grant

• Current Assignee: BAE Systems Information and Electronic Systems Integration Incorporated (BAE Systems Plc)
• Original Assignee: BAE Systems Information and Electronic Systems Integration Incorporated (BAE Systems Plc)
• Inventors: Willis, Chris L., Lavely, Eugene M., Marcinuk, Adam J., Moffitt, Paul R., Takahashi, Jonathan R.
• Granted Patent: US 10,535,495 B2
• Time in Patent Office: Days
• CPC Class Codes: H01J 2237/20214 Rotation
• CPC Class Codes: H01J 2237/2025 Sensing velocity of translation or rotation
• CPC Class Codes: H01J 2237/20285 computer-controlled
• CPC Class Codes: H01J 2237/20292 Means for position and/or orientation registration
• CPC Class Codes: H01J 2237/2445 Photon detectors for X-rays, light, e.g. photomultipliers
• CPC Class Codes: H01J 2237/24475 Scattered electron detectors
• CPC Class Codes: H01J 2237/2448 Secondary particle detectors
• CPC Class Codes: H01J 2237/2804 Scattered primary beam
• CPC Class Codes: H01J 2237/2806 Secondary charged particle
• CPC Class Codes: H01J 2237/2807 X-rays
• CPC Class Codes: H01J 2237/2817 Pattern inspection
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H01J 37/244 Detectors; Associated components or circuits therefor
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

A system and method for imaging a sample having a complex structure (such as an integrated circuit). The sample is placed on a motion system that moves the sample with respect to an electron beam generator that is used in imaging the sample. The motion system affords thirteen degrees-of-freedom for movement of the sample, by providing a rotation stage, a fine 6-axis piezoelectric-driven stage, and a coarse 6-axis hexapod stage. Various detectors gather information to image the sample. Interferometric and/or capacitive sensors are used to measure the position of the sample and motion system.

Claims

1. A system for imaging a sample, the system comprising:

a sample holder configured to secure the sample within a vacuum chamber;

an electron beam generator configured to produce an electron beam within the vacuum chamber;

an electron detector configured to measure electrons from the electron beam that have interacted with the sample;

a spectral energy detector configured to measure fluorescent X-rays resulting from the electron beam interacting with at least one of (a) the sample and (b) a target positioned between the sample and the electron beam generator;

a coarse motion stage capable of moving the sample holder along and around each of an x-axis, a y-axis, and a z-axis, thereby providing the sample holder with a first set of six degrees-of-freedom;

a fine motion stage that is coupled to the coarse motion stage, and that is also capable of moving the sample holder along and around the x-axis, the y-axis, and the z-axis, thereby providing the sample holder with a second set of six degrees-of-freedom, wherein the fine motion stage has a higher resolution of movement than the course motion stage;

a controller that is communicatively coupled with the electron beam generator, the electron detector, the spectral energy detector, the fine motion stage, and the coarse motion stage; and

a processor configured to receive data from the electron detector and the spectral energy detector, and further configured to generate control instructions that, when implemented by the controller, result in movement of at least one of the fine motion stage and the coarse motion stage.

2. The system of claim 1, further comprising a rotation stage that is within the vacuum chamber and that is coupled to the fine motion stage, wherein the rotation stage provides the sample holder with a thirteenth degree-of-freedom, in addition to the first and second sets of six degrees-of-freedom.

3. The system of claim 1, wherein the electron detector is a backscattered electron detector.

4. The system of claim 1, wherein the electron detector is a secondary electron detector.

5. The system of claim 1, further comprising:

a first spectral energy detector configured to measure fluorescent X-rays resulting from the electron beam penetrating the sample; and

a second spectral energy detector configured to measure X-rays resulting from the electron beam interacting with the target.

6. The system of claim 1, further comprising:

a rotation stage that is within the vacuum chamber and that is coupled to the fine motion stage, wherein the rotation stage provides the sample holder with a thirteenth degree-of-freedom, in addition to the first and second sets of six degrees-of-freedom; and

a plurality of interferometric sensors positioned in an interferometer tower, including a first interferometric sensor in communication with a first reference mirror on the rotation stage, and a second interferometric sensor in communication with a second reference mirror on the sample holder.

7. The system of claim 1, further comprising:

a rotation stage that is within the vacuum chamber and that is coupled to the fine motion stage, wherein the rotation stage provides the sample holder with a thirteenth degree-of-freedom, in addition to the first and second sets of six degrees-of-freedom; and

one or more capacitive sensors that are positioned on the rotation stage and configured to measure a position of the rotation stage.

8. A system for imaging a sample, the system comprising:

a sample holder configured to secure the sample within a vacuum chamber;

an electron beam generator configured to produce an electron beam within the vacuum chamber;

a coarse motion stage positioned within the vacuum chamber, the coarse motion stage providing movement along a first axis that provides a first degree-of-freedom, movement along a second axis perpendicular to the first axis that provides a second degree-of-freedom, movement along a third axis perpendicular to the first and second axes that provides a third degree-of-freedom, rotation around the first axis that provides a fourth degree-of-freedom, rotation around the second axis that provides a fifth degree-of-freedom, and rotation around the third axis that provides a sixth degree-of-freedom;

a fine motion stage positioned within the vacuum chamber laterally above the coarse motion stage, the fine motion stage providing movement along a fourth axis that provides a seventh degree-of-freedom, movement along a fifth axis perpendicular to the fourth axis that provides an eighth degree-of-freedom, movement along a sixth axis perpendicular to the fourth and fifth axes that provides a ninth degree-of-freedom, rotation around the fourth axis that provides a tenth degree-of-freedom, rotation around the fifth axis that provides an eleventh degree-of-freedom, and rotation around the sixth axis that provides a twelfth degree-of-freedom; and

a rotation stage positioned within the vacuum chamber laterally above the fine motion stage, the rotation stage providing rotation around a seventh axis that provides a thirteenth degree-of-freedom.

9. The system of claim 8, further comprising at least one of:

a backscattered electron detector configured to measure backscattered electrons resulting from the electron beam interacting with the sample; and

a secondary electron detector configured to measure secondary electrons resulting from the electron beam interacting with the sample.

10. The system of claim 8, further comprising:

a first spectral energy detector configured to measure fluorescent X-rays resulting from the electron beam penetrating the sample; and

a second spectral energy detector configured to measure X-rays resulting from the electron beam interacting with a target positioned between the electron beam generator and the sample.

11. The system of claim 8, further comprising a controller configured to control movement of the rotation stage, the fine motion stage, and the coarse motion stage.

12. The system of claim 8, further comprising at least one interferometric sensor positioned on an interferometer tower.

13. The system of claim 12, wherein the at least one interferometric sensor is in communication with a reference mirror coupled to the rotation stage.

14. The system of claim 12, wherein the at least one interferometric sensor is in communication with a reference mirror coupled to the sample holder.

15. The system of claim 8, further comprising a capacitive sensor that is positioned on the rotation stage and that is configured to measure a position of the rotation stage.

16. A system for imaging a sample, the system comprising:

a sample holder configured to secure the sample within a vacuum chamber;

an electron beam generator configured to produce an electron beam within the vacuum chamber;

a moving platform having a rotation stage, a fine motion stage, and a coarse motion stage;

one or more interferometric sensors that provide interferometric measurements;

a fixture mounted at a base of the rotation stage that supports a first set of reference mirrors that are used in providing the interferometric measurements; and

a second set of reference mirrors that are mounted to the sample holder and that are used in providing the interferometric measurements.

17. The system of claim 16, further comprising a controller configured to control rotation of the rotation stage, movement of the fine motion stage, and movement of the coarse motion stage.

18. The system of claim 17, further comprising a processor configured to use the interferometric measurements to determine a difference between an actual stage position and a nominal stage position, wherein the controller controls movement of the fine motion stage to reduce the difference.

19. The system of claim 16, wherein:

the one or more interferometric sensors are mounted onto a static tower that is mounted to a base of the vacuum chamber proximate the moving platform; and

the one or more interferometric sensors include a first interferometric sensor adjacent to the rotation stage and a second interferometric sensor adjacent to the sample holder.

20. The system of claim 16, further comprising one or more capacitive sensors that measure a displacement of the rotation stage with respect to a reference cylinder.

21. The system of claim 20, wherein the fixture includes mounts for the one or more capacitive sensors.

22. The system of claim 16, further comprising:

a controller that is communicatively coupled to the rotation stage, the fine motion stage, and the course motion stage; and

a processor configured to measure a drift error of the moving platform and generate control instructions that, when implemented by the controller, cause the moving platform to be recalibrated.

23. The system of claim 16, wherein the first set of reference mirrors provide x-direction, y-direction, and Θ

Y interferometric measurements for the rotation stage.

24. The system of claim 16, wherein the second set of reference mirrors provide y-direction, Θ

X, and Θ

Z interferometric measurements for the sample holder.