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SYSTEM AND METHOD FOR RESIDUAL VOLTAGE CONTROL OF ELECTROSTATIC CHUCKING ASSEMBLIES

  • US 20190311933A1
  • Filed: 04/04/2018
  • Published: 10/10/2019
  • Est. Priority Date: 04/04/2018
  • Status: Active Grant
First Claim
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1. A substrate carrier comprising:

  • a first electrostatic chuck panel comprising;

    a first electrode residing in a single plane and adapted to be driven with a chucking voltage having a first polarity; and

    a second electrode residing in a single plane and adapted to be driven with a chucking voltage having a second polarity different than the first polarity; and

    a second electrostatic chuck panel disposed adjacent to the first electrostatic chuck panel and comprising;

    a first electrode residing in a single plane and adapted to be driven with the chucking voltage having the second polarity, the first electrode of the second electrostatic chuck is disposed adjacent to the first electrode of the first electrostatic chuck panel; and

    a second electrode residing in a single plane and adapted to be driven with the chucking voltage having the first polarity, wherein the first polarity is different than the second polarity.

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