SYSTEM AND METHOD FOR RESIDUAL VOLTAGE CONTROL OF ELECTROSTATIC CHUCKING ASSEMBLIES

• US 20190311933A1
• Filed: 04/04/2018
• Published: 10/10/2019
• Est. Priority Date: 04/04/2018
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: WHITE, John M., RAO, Shreesha Y.
• Granted Patent: US 11,024,529 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass
• CPC Class Codes: H10K 71/861 Repairing

Abstract

Described herein is a substrate carrier comprising electrostatic chuck panels and using the same. The electrostatic chuck panels may include electrodes with interleaved segments. Further, the electrodes of each electrostatic chuck panel may be driven with chucking voltages having opposite polarities.

Claims

1. A substrate carrier comprising:

a first electrostatic chuck panel comprising;

a first electrode residing in a single plane and adapted to be driven with a chucking voltage having a first polarity; and

a second electrode residing in a single plane and adapted to be driven with a chucking voltage having a second polarity different than the first polarity; and

a second electrostatic chuck panel disposed adjacent to the first electrostatic chuck panel and comprising;

a first electrode residing in a single plane and adapted to be driven with the chucking voltage having the second polarity, the first electrode of the second electrostatic chuck is disposed adjacent to the first electrode of the first electrostatic chuck panel; and

a second electrode residing in a single plane and adapted to be driven with the chucking voltage having the first polarity, wherein the first polarity is different than the second polarity.

2. The substrate carrier of claim 1, further comprising:

a third electrostatic chuck panel disposed adjacent to the first electrostatic chuck panel and comprising;

a first electrode residing in a single plane and adapted to be driven with the chucking voltage having the second polarity, and disposed adjacent to the first electrode of the first electrostatic chuck panel; and

a second electrode residing in a single plane and adapted to be driven with the chucking voltage having the first polarity; and

a fourth electrostatic chuck panel disposed adjacent to the second electrostatic chuck panel and comprising;

a first electrode residing in a single plane and adapted to be driven with a chucking voltage having the first polarity, and disposed adjacent to the first electrode of the second electrostatic chuck panel; and

a second electrode residing in a single plane and adapted to be driven with a chucking voltage having the second polarity.

3. The substrate carrier of claim 1, wherein:

the first electrode of the first electrostatic chuck panel comprises a first plurality electrode segments connected at first corners;

the second electrode of the first electrostatic chuck panel comprises a second plurality of electrode segments connected at second corners;

a first segment of the first plurality of segments and a second segment of the second plurality of segments are adjacent and parallel to each other and are separated by a first distance;

a first corner of the first corners has a first side and is adjacent to a second corner of the second corners having a second side, the first corner is separated from the second corner by a second distance and has a first radius.

4. The substrate carrier of claim 3, wherein the first distance is about equal to the second distance.

5. The substrate carrier of claim 1, wherein the first electrode of the first electrostatic chuck comprises:

a first plurality of segments disposed on a first dielectric layer;

the second electrode of the first electrostatic chuck comprises a second plurality of segments disposed on a second dielectric layer over the first dielectric layer, and wherein a horizontal spacing between the first plurality of segments and the second plurality of segments is greater than or equal to zero.

6. The substrate carrier of claim 1, wherein a height of the first and second electrodes of the first electrostatic chuck panel is in a range of about 6 um to about 9 um, and a height of the first and second electrodes of the second electrostatic chuck panel is in a range of about 6 um to about 9 um.

7. The substrate carrier of claim 1, wherein a distance between the first electrode of the first electrostatic chuck panel and the first electrode of the second electrostatic chuck panel is less than six times a distance between the first electrode and the second electrode of the first electrostatic chuck panel.

8. An electrostatic chuck panel, comprising:

a first electrode having a first plurality of segments residing in a single plane and connecting at first corners; and

a second electrode interleaved with the first electrode, the second electrode having a second plurality of segments residing in a single plane and connecting at second corners, a first one of the second corners is disposed between a first one of the first corners and a second one of the first corners.

9. The electrostatic chuck panel of claim 8, further comprising:

a power source configured to drive the first electrode with a first chucking voltage having a first polarity, and the second electrode with a second chucking voltage having a second polarity, wherein the first polarity is opposite the second polarity.

10. The electrostatic chuck assembly of claim 8, wherein:

a first segment and a second segment of the first plurality of segments are connected at a first corner of the first corners;

a third segment and a fourth segment of the second plurality of segments are connected at a second corner of the second corners; and

the first segment is disposed parallel and adjacent to the third segment.

11. The electrostatic chuck panel of claim 10, wherein:

the first segment is separated from the third segments by a first distance;

a first side of the first corner is separated from a second side of the second corner by a second distance; and

the first corner having a first radius.

12. The electrostatic chuck panel of claim 11, wherein the first distance is about equal to the second distance.

13. The electrostatic chuck panel of claim 11, wherein the first distance is less than the second distance.

14. The electrostatic chuck panel of claim 11, wherein the first distance is greater than the second distance.

15. The electrostatic chuck panel of claim 10, wherein the second corner has a second radius.

16. The electrostatic chuck panel of claim 8, wherein a height of the first and second electrodes is in a range of about 6 um to about 9 um.

17. A method for chucking a substrate, comprising:

disposing a large area substrate against a substrate support surface of an electrostatic chuck panel, the electrostatic chuck panel including a plurality of electrodes disposed in different planes;

applying a first voltage to a first electrode of the electrostatic chuck panel;

applying a second voltage to a second electrode of the electrostatic chuck panel that is disposed farther from the substrate than the first electrode, wherein the second voltage has a different polarity than the first voltage; and

electrostatically chucking the large area substrate to the substrate support surface.

18. The method of claim 17, wherein the first electrode and the second electrode include interleaved segments.

19. The method of claim 17, wherein the second voltage has an absolute value about 1.5 to about 3 times greater than the first voltage, and wherein the electrode segments of the second electrode have about the same width as the electrode segments of the first electrode.

20. The method of claim 17, wherein the second voltage has an absolute value at least about equal to the first voltage, and wherein a width of electrode segments of the second electrode is about 1.5 to about 3 times larger than a width of electrode segments of the first electrode.