REPULSIVE-ATTRACTIVE-FORCE ELECTROSTATIC ACTUATOR
First Claim
1. A repulsive-attractive-force electrostatic actuator, comprising:
- a first actuator layer comprising;
a first substrate of a first dielectric material having a transverse thickness and two opposing surfaces,a first electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said first substrate, anda second electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said first substrate so as to be on an opposing side with respect to said first electrode pattern, andwherein said first and second electrode patterns are substantially aligned with each other in a direction of said transverse thickness on said two opposing surfaces of said first substrate;
a second actuator layer spaced apart from said first actuator layer in the direction of the transverse thickness, with at least one of a vacuum, air, a gas or a dielectric material therebetween, said second actuator layer comprising;
a second substrate of a second dielectric material having a transverse thickness and two opposing surfaces,a third electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said second substrate, anda fourth electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said second substrate so as to be on an opposing side with respect to said third electrode pattern, andwherein said third and fourth electrode patterns are substantially aligned with each other in a direction of said transverse thickness on said two opposing surfaces of said second substrate;
a first voltage source connected to said first and second electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said first electrode pattern is at a relative voltage of V1 to said second electrode pattern;
a second voltage source connected to said third and fourth electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said third electrode pattern is at a relative voltage of V2 to said fourth electrode pattern; and
an actuator frame connected to said first and second actuator layers such that at least a portion of at least one of said first and second actuator layers is movable due to an applied voltage to effect motion to an object at least one of attached to or in mechanical connection to said repulsive-attractive-force electrostatic actuator when in operation,wherein said first and second voltage sources have a common ground, andwherein said applied relative voltages V1 and V2 are selectable to provide one of a selected repulsive force or a selected attractive force between said first and second actuator layers.
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Accused Products
Abstract
A repulsive-attractive-force electrostatic actuator according to some embodiments of the invention includes a first actuator layer including a first substrate, a first electrode pattern, and a second electrode pattern. The actuator further includes a second actuator layer including a second substrate, a third electrode pattern, and a fourth electrode pattern. The actuator further includes a first voltage source connected to the first and second electrode patterns such that the first electrode pattern is at a relative voltage of V1 to the second electrode pattern, and a second voltage source connected to the third and fourth electrode patterns such that the third electrode pattern is at a relative voltage of V2 to the fourth electrode pattern. The applied relative voltages V1 and V2 are selectable to provide one of a selected repulsive force or a selected attractive force between the first and second actuator layers.
3 Citations
22 Claims
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1. A repulsive-attractive-force electrostatic actuator, comprising:
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a first actuator layer comprising; a first substrate of a first dielectric material having a transverse thickness and two opposing surfaces, a first electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said first substrate, and a second electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said first substrate so as to be on an opposing side with respect to said first electrode pattern, and wherein said first and second electrode patterns are substantially aligned with each other in a direction of said transverse thickness on said two opposing surfaces of said first substrate; a second actuator layer spaced apart from said first actuator layer in the direction of the transverse thickness, with at least one of a vacuum, air, a gas or a dielectric material therebetween, said second actuator layer comprising; a second substrate of a second dielectric material having a transverse thickness and two opposing surfaces, a third electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said second substrate, and a fourth electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said second substrate so as to be on an opposing side with respect to said third electrode pattern, and wherein said third and fourth electrode patterns are substantially aligned with each other in a direction of said transverse thickness on said two opposing surfaces of said second substrate; a first voltage source connected to said first and second electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said first electrode pattern is at a relative voltage of V1 to said second electrode pattern; a second voltage source connected to said third and fourth electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said third electrode pattern is at a relative voltage of V2 to said fourth electrode pattern; and an actuator frame connected to said first and second actuator layers such that at least a portion of at least one of said first and second actuator layers is movable due to an applied voltage to effect motion to an object at least one of attached to or in mechanical connection to said repulsive-attractive-force electrostatic actuator when in operation, wherein said first and second voltage sources have a common ground, and wherein said applied relative voltages V1 and V2 are selectable to provide one of a selected repulsive force or a selected attractive force between said first and second actuator layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A multi-substrate repulsive-attractive-force electrostatic actuator, comprising:
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a first actuator layer comprising; a first substrate of a first dielectric material having a transverse thickness and two opposing surfaces, a first electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said first substrate, and a second electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said first substrate so as to be on an opposing side with respect to said first electrode pattern, wherein said first and second electrode patterns are substantially aligned with each other in a direction of said transverse thickness on said two opposing surfaces of said first substrate, a second substrate of a second dielectric material having a transverse thickness and two opposing surfaces, at least one of attached to or formed on the other one of said two opposing surfaces of said second electrode pattern so as to be on an opposing side with respect to said first substrate, and a third electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said second substrate so as to be on an opposing side with respect to said second electrode pattern, a first voltage source connected to said first and second electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said first electrode pattern is at a relative voltage of V1 to said second electrode pattern, and a second voltage source connected to said second and third electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said second electrode pattern is at a relative voltage of V2 to said third electrode pattern; a second actuator layer spaced apart from said first actuator layer with at least one of a vacuum, air, a gas or a dielectric material therebetween, said second actuator layer comprising; a third substrate of a third dielectric material having a transverse thickness and two opposing surfaces, a fourth electrode pattern at least one of attached to or formed on one of said two opposing surfaces of said third substrate, a fifth electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said third substrate so as to be on an opposing side with respect to said fourth electrode pattern, wherein said fourth and fifth electrode patterns are substantially aligned with each other in a direction of said transverse thickness on said two opposing surfaces of said third substrate, a fourth substrate of a fourth dielectric material having a transverse thickness and two opposing surfaces, at least one of attached to or formed on the other one of said two opposing surfaces of said fifth electrode pattern so as to be on an opposing side with respect to said third substrate, and a sixth electrode pattern at least one of attached to or formed on the other one of said two opposing surfaces of said fourth substrate so as to be on an opposing side with respect to said fifth electrode pattern; a third voltage source connected to said fourth and fifth electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said fourth electrode pattern is at a relative voltage of V3 to said fifth electrode pattern; a fourth voltage source connected to said fifth and sixth electrode patterns such that, during operation, each is entirely at a common voltage across the corresponding electrode pattern, said fifth electrode pattern is at a relative voltage of V4 to said sixth electrode pattern; wherein said applied relative voltages V1, V2, V3, and V4 are selectable to provide one of a selected repulsive force or a selected attractive force between said first and second actuator layers. - View Dependent Claims (22)
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Specification