METHODS AND APPARATUS FOR SHUTTER DISK ASSEMBLY DETECTION

• US 20190316251A1
• Filed: 04/11/2018
• Published: 10/17/2019
• Est. Priority Date: 04/11/2018
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: TSAI, CHENG-HSIUNG, JUPUDI, ANANTHKRISHNA, ASAHINA, EIJI, BABU, SARATH
• Granted Patent: US 10,851,453 B2
• Time in Patent Office: Days
• CPC Class Codes: C23C 14/021 Cleaning or etching treatments
• CPC Class Codes: C23C 14/52 Means for observation of the coating process
• CPC Class Codes: C23C 14/54 Controlling or regulating the coating process
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: H01J 37/3447 Collimators, shutters, apertures

Abstract

Methods and apparatus for detecting a shutter disk assembly in a process chamber using a number of sensors. A first, second, and third sensor in a shutter housing for a shutter disk assembly provide indications of a status of the shutter disk assembly. The indications are used in part to determine the operational status of the shutter disk assembly along with process information from a process controller. The operational status is then used to alter a process of the process chamber when necessary.

Claims

1. A method of detecting a shutter disk assembly in a process chamber, comprising:

receiving first sensor detection information from a first sensor located in a shutter housing of the process chamber, the first sensor positioned to detect a shutter arm;

receiving second sensor detection information from a second sensor located in the shutter housing of the process chamber, the second sensor positioned to detect a shutter disk;

receiving third sensor detection information from a third sensor located in the shutter housing of the process chamber, the third sensor positioned to detect the shutter disk;

receiving process information from a process controller;

determining an operational status of the shutter disk assembly based, at least in part, on at least one of the first sensor detection information, the second sensor detection information, the third sensor detection information, and the process information; and

altering at least one process of the process chamber, if necessary, based on the operational status of the shutter disk assembly.

2. The method of claim 1, further comprising:

altering at least one process of the process chamber by performing a calibration of the shutter disk assembly.

3. The method of claim 1, further comprising:

altering at least one process of the process chamber by re-positioning the shutter arm.

4. The method of claim 1, further comprising:

altering at least one process of the process chamber by halting the process and setting an alarm.

5. The method of claim 1, wherein the operational status of the shutter disk assembly includes, at least, an angle from a shaft sensor of a shaft of the shutter arm.

6. The method of claim 1, further comprising:

determining if the shutter disk assembly exceeds a duration of time during an idle period; and

altering at least one process of the process chamber by halting the process and setting an alarm.

7. The method of claim 1, further comprising:

determining the operational status to not be in error when the first sensor detection information indicates blockage, the second sensor detection information indicates no blockage, the third sensor detection information indicates blockage, and the process information indicates shutter disk assembly stored.

8. The method of claim 1, further comprising:

determining the operational status to be in error when the first sensor detection information indicates blockage, the second sensor detection information indicates blockage, the third sensor detection information indicates no blockage, and the process information indicates shutter disk assembly stored.

9. The method of claim 1, further comprising:

determining the operational status to be in error when the first sensor detection information indicates no blockage, the second sensor detection information indicates blockage, the third sensor detection information indicates no blockage, and the process information indicates shutter disk assembly stored.

10. The method of claim 1, further comprising:

determining the operational status to not be in error when the first sensor detection information indicates blockage, the second sensor detection information indicates blockage, the third sensor detection information indicates no blockage, and the process information indicates shutter disk assembly stored.

11. The method of claim 1, further comprising:

determining the operational status to be in error when the first sensor detection information indicates blockage, the second sensor detection information indicates blockage, the third sensor detection information indicates no blockage or blockage, and the process information indicates shutter arm stored.

12. The method of claim 1, further comprising:

determining the operational status to not be in error when the first sensor detection information indicates blockage, the second sensor detection information indicates no blockage, the third sensor detection information indicates no blockage, and the process information indicates shutter arm stored.

13. The method of claim 1, further comprising:

determining the operational status to be in error when the first sensor detection information indicates no blockage, the second sensor detection information indicates no blockage, the third sensor detection information indicates blockage, and the process information indicates shutter disk assembly idle timed out.

14. A method of detecting a shutter disk assembly in a process chamber, comprising:

storing the shutter disk assembly in a shutter housing appended to the process chamber;

receiving first sensor detection information from a first sensor located in a shutter housing of the process chamber, the first sensor positioned to detect a shutter arm;

setting a first sensor detection level based on the first sensor detection information, the first sensor detection level indicating that a shutter disk arm is correctly stored;

receiving second sensor detection information from a second sensor located in the shutter housing of the process chamber, the second sensor positioned to detect a shutter disk;

setting a second sensor detection level based on the second sensor detection information, the second sensor detection level indicating that a shutter disk is correctly stored;

receiving a third sensor detection information from a third sensor located in the shutter housing of the process chamber, the third sensor positioned to detect the shutter disk;

setting a third sensor detection level based on the third sensor detection information, the third sensor detection level indicating that the shutter disk is correctly stored;

storing the first sensor detection level, the second sensor detection level, and the third sensor detection level; and

retrieving the first sensor detection level, the second sensor detection level, or the third sensor detection level during a process to determine an operational status of the shutter disk assembly.

15. The method of claim 14, further comprising:

comparing the first sensor detection level, the second sensor detection level, or the third sensor detection level to current sensor detection information of the first sensor, the second sensor, or the third sensor to determine a status of the shutter disk assembly.

16. The method of claim 14, further comprising:

receiving process information from a process controller; and

determining an operational status of the shutter disk assembly based on current sensor detection information and, at least in part, on at least one of the first sensor detection level, the second sensor detection level, the third sensor detection level, and the process information.

17. The method of claim 14, further comprising:

altering the first sensor detection level, the second sensor detection level, or the third sensor detection level to account for heat expansion or contraction of the shutter disk assembly during a process.

18. The method of claim 14, further comprising:

altering the first sensor detection level, the second sensor detection level, or the third sensor detection level to account for deposition of material on the shutter disk assembly during a process.

19. An apparatus for detecting a shutter disk assembly for a process chamber, comprising;

a shutter housing appended to the process chamber;

a first sensor attached to the shutter housing such that the first sensor is capable of detecting a shutter arm when the shutter arm is in the shutter housing;

a second sensor attached to the shutter housing such that the second sensor is capable of detecting a shutter disk when the shutter disk is in the shutter housing;

a third sensor attached to the shutter housing such that the third sensor is capable of detecting the shutter disk when the shutter disk is in the shutter housing; and

a process controller that interacts with the first sensor, second sensor, and the third sensor to detect fault conditions of the shutter disk assembly during a process by using a method of detecting the shutter disk assembly in a process chamber, comprising;

receiving first sensor detection information from a first sensor located in a shutter housing of the process chamber, the first sensor positioned to detect a shutter arm;

receiving second sensor detection information from a second sensor located in the shutter housing of the process chamber, the second sensor positioned to detect a shutter disk;

receiving third sensor detection information from a third sensor located in the shutter housing of the process chamber, the third sensor positioned to detect the shutter disk;

receiving process information from a process controller; and

determining an operational status of the shutter disk assembly based, at least in part, on at least one of the first sensor detection information, the second sensor detection information, the third sensor detection information, and the process information.

20. The apparatus of claim 19, wherein the process chamber is a pre-clean chamber or a physical vapor deposition (PVD) chamber.