METHOD FOR CONDUCTING OPTICAL MEASUREMENT USINGFULL MUELLER MATRIX ELLIPSOMETER
First Claim
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1. A method for conducting optical measurement with a full Mueller matrix ellipsometer, comprising the following steps:
- constructing an experimental optical path of the full Mueller matrix ellipsometer, the experimental optical path of the full Mueller matrix ellipsometer including a light source, a polarizer, a first phase compensator, an analyzer, a second phase compensator, a spectrometer, and a sample stage;
performing a total regression calibration on operating parameters of the full Mueller matrix ellipsometer;
placing a sample to be tested on the sample stage, and obtaining experimental Fourier coefficients of the sample to be tested with the full Mueller matrix ellipsometer;
obtaining information of the sample to be tested based on the experimental Fourier coefficients of the sample to be tested;
wherein a method for calibrating the full Mueller matrix ellipsometer comprises the following steps;
setting rotational speeds of the first phase compensator and the second phase compensator;
setting a frequency of the spectrometer for measuring light intensity data, so that the spectrometer measures the light intensity data every T/N time, wherein a total of N sets of light intensity data are acquired, where N≥
25, and T is a period of measurement;
acquiring the light intensity data measured by the spectrometer;
obtaining respective experimental Fourier coefficients α
′
2n, β
′
2n from N relation formulas between the light intensity data and experimental Fourier coefficients formed by the N sets of light intensity data, based on the light intensity data acquired by a data acquisition module of the spectrometer;
obtaining respective theoretical Fourier coefficients α
2n, β
2n based on the respective experimental Fourier coefficients, an initial polarization angle Cs1 of the first phase compensator and an initial polarization angle Cs2 of the second phase compensator which have been calibrated;
obtaining, by a phase retardation calculation module for the first phase compensator, a phase retardation δ
1 of the first phase compensator based on the respective theoretical Fourier coefficients, a polarization angle Ps of the polarizer and a polarization angle As of the analyzer which have been calibrated, on the basis that a reference sample is isotropic and uniform;
obtaining, by a phase retardation calculation module for the second phase compensator, a phase retardation δ
2 of the second phase compensator, based on the respective theoretical Fourier coefficients, the polarization angle Ps of the polarizer and the polarization angle As of the analyzer which have been calibrated, on the basis that the reference sample is isotropic and uniform;
obtaining accurate values of all operating parameters (d, θ
, Ps, As, Cs1, Cs2, δ
1, δ
2) of the full Mueller matrix ellipsometer through least square fitting according to the relation formulas between the theoretical Fourier coefficients and the operating parameters, with (d, θ
, Ps, As, Cs1, Cs2, δ
1, δ
2) being as variables, and with the initial polarization angle Cs1 of the first phase compensator, the initial polarization angle Cs2 of the second phase compensator, the polarization angle Ps of the polarizer, the polarization angle As of the analyzer, the phase retardation δ
1 of the first phase compensator and the phase retardation δ
2 of the second phase compensator, which have been calibrated, being as initial values, where d is a thickness of the reference sample, and θ
is an angle at which light is incident on the reference sample.
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Abstract
A method for conducting optical measurement using a full Mueller matrix ellipsometer, which belongs to the technical field of optical measurements. The optical measurement method comprises: constructing an experimental optical path of a full Mueller matrix ellipsometer; conducting complete regression calibration on the full Mueller matrix ellipsometer; placing a sample to be measured on a sample platform, and obtaining an experimental Fourier coefficient of the sample to be measured; and according to the experimental Fourier coefficient of the sample to be measured, obtaining information about the sample to be measured. Since a calibration method for the full Mueller matrix ellipsometer is not only simple in operation process, but also makes full use of data of the full Mueller matrix ellipsometer measured at the same time, the introduced error is relatively small and the parameter obtained by calibration is more accurate, so that the measurement result is more accurate when the sample to be measured is measured. Thus, the process of the optical measurement method is simplified.
1 Citation
7 Claims
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1. A method for conducting optical measurement with a full Mueller matrix ellipsometer, comprising the following steps:
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constructing an experimental optical path of the full Mueller matrix ellipsometer, the experimental optical path of the full Mueller matrix ellipsometer including a light source, a polarizer, a first phase compensator, an analyzer, a second phase compensator, a spectrometer, and a sample stage; performing a total regression calibration on operating parameters of the full Mueller matrix ellipsometer; placing a sample to be tested on the sample stage, and obtaining experimental Fourier coefficients of the sample to be tested with the full Mueller matrix ellipsometer; obtaining information of the sample to be tested based on the experimental Fourier coefficients of the sample to be tested; wherein a method for calibrating the full Mueller matrix ellipsometer comprises the following steps; setting rotational speeds of the first phase compensator and the second phase compensator; setting a frequency of the spectrometer for measuring light intensity data, so that the spectrometer measures the light intensity data every T/N time, wherein a total of N sets of light intensity data are acquired, where N≥
25, and T is a period of measurement;acquiring the light intensity data measured by the spectrometer; obtaining respective experimental Fourier coefficients α
′
2n, β
′
2n from N relation formulas between the light intensity data and experimental Fourier coefficients formed by the N sets of light intensity data, based on the light intensity data acquired by a data acquisition module of the spectrometer;obtaining respective theoretical Fourier coefficients α
2n, β
2n based on the respective experimental Fourier coefficients, an initial polarization angle Cs1 of the first phase compensator and an initial polarization angle Cs2 of the second phase compensator which have been calibrated;obtaining, by a phase retardation calculation module for the first phase compensator, a phase retardation δ
1 of the first phase compensator based on the respective theoretical Fourier coefficients, a polarization angle Ps of the polarizer and a polarization angle As of the analyzer which have been calibrated, on the basis that a reference sample is isotropic and uniform;obtaining, by a phase retardation calculation module for the second phase compensator, a phase retardation δ
2 of the second phase compensator, based on the respective theoretical Fourier coefficients, the polarization angle Ps of the polarizer and the polarization angle As of the analyzer which have been calibrated, on the basis that the reference sample is isotropic and uniform;obtaining accurate values of all operating parameters (d, θ
, Ps, As, Cs1, Cs2, δ
1, δ
2) of the full Mueller matrix ellipsometer through least square fitting according to the relation formulas between the theoretical Fourier coefficients and the operating parameters, with (d, θ
, Ps, As, Cs1, Cs2, δ
1, δ
2) being as variables, and with the initial polarization angle Cs1 of the first phase compensator, the initial polarization angle Cs2 of the second phase compensator, the polarization angle Ps of the polarizer, the polarization angle As of the analyzer, the phase retardation δ
1 of the first phase compensator and the phase retardation δ
2 of the second phase compensator, which have been calibrated, being as initial values, where d is a thickness of the reference sample, and θ
is an angle at which light is incident on the reference sample. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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Current AssigneeBeijing Aryhau Technology Company Limited
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Original AssigneeBei Optics Technology Company Limited
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InventorsLIU, Tao, CUI, Gaozeng, LI, Guoguang, XIONG, Wei, WEN, Langfeng
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current
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CPC Class CodesG01N 2021/213 Spectrometric ellipsometryG01N 21/211 Ellipsometry optical thickn...G01N 21/274 Calibration, base line adju...G01N 2201/127 Calibration; base line adju...
