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SCANNING PROBE MICROSCOPE AND CANTILEVER MOVING METHOD

  • US 20190317124A1
  • Filed: 02/25/2019
  • Published: 10/17/2019
  • Est. Priority Date: 04/16/2018
  • Status: Active Grant
First Claim
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1. A scanning probe microscope, comprising:

  • a cantilever that moves along a surface of a solid sample;

    a light irradiator that irradiates the cantilever with light;

    a photodetector that is provided movably and receives reflected light from the cantilever;

    an approaching processor that performs approaching operation by bringing the cantilever close to a solid sample placed in liquid;

    a photodetector movement processor that moves the photodetector to a position where reflected light from the cantilever is incident with the cantilever being in liquid when a liquid surface is detected based on a detection signal from the photodetector during the approaching operation; and

    an optical axis adjustment processor that adjusts an optical axis of reflected light incident on the photodetector when the reflected light from the cantilever is incident on the photodetector during the approaching operation continued after the movement of the photodetector by the photodetector movement processor,whereinwhen a surface of a solid sample is detected based on a detection signal from the photodetector during the approaching operation continued after the adjustment of an optical axis by the optical axis adjustment processor, the approaching processor stops the approaching operation.

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