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ADDITIVE FOR RESIST UNDERLAYER FILM-FORMING COMPOSITION AND RESIST UNDERLAYER FILM-FORMING COMPOSITION CONTAINING THE SAME

  • US 20190317405A1
  • Filed: 11/08/2016
  • Published: 10/17/2019
  • Est. Priority Date: 11/17/2015
  • Status: Active Grant
First Claim
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1. An additive for a resist underlayer film-forming composition, comprising a copolymer having structural units of the following Formulae (1) to (3):

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