×

HOT SPOT DEFECT DETECTING METHOD AND HOT SPOT DEFECT DETECTING SYSTEM

  • US 20190318471A1
  • Filed: 08/29/2018
  • Published: 10/17/2019
  • Est. Priority Date: 04/13/2018
  • Status: Active Grant
First Claim
Patent Images

1. A method for detecting hot spot defects, adapted to an electronic apparatus, the method comprising:

  • extracting a plurality of hot spots from a design of a semiconductor product to define a hot spot map comprising a plurality of hot spot groups, wherein a plurality of local patterns in a same context of the design yielding a same image content are defined as a same hot spot group;

    acquiring a plurality of defect images obtained by an inspection tool performing hot scans on a wafer manufactured with the design during runtime and aligning the hot spot map to each of the defect images to locate the hot spot groups in each defect image; and

    detecting the hot spot defects in each defect image by dynamically mapping the hot spot groups located in each defect image to a plurality of threshold regions and respectively performing automatic thresholding on pixel values of the hot spots of each hot spot group in the corresponding threshold region.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×