X-RAY TUBE

• US 20190318903A1
• Filed: 04/10/2019
• Published: 10/17/2019
• Est. Priority Date: 04/12/2018
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: ISHII, Atsushi, INAZURU, Tutomu
• Granted Patent: US 10,825,641 B2
• Time in Patent Office: Days
• CPC Class Codes: H01J 2235/165 Shielding arrangements
• CPC Class Codes: H01J 2235/168 against charged particles
• CPC Class Codes: H01J 35/112 Non-rotating anodes H01J35/12 takes precedence
• CPC Class Codes: H01J 35/16 Vessels; Containers; Shields associated therewith

Abstract

An X-ray tube includes a metal portion in which an X-ray emission window is provided, an insulation valve which is joined to the metal portion and forms a vacuum region in cooperation with the metal portion, and a target and an electron gun which are accommodated in the vacuum region. The insulation valve has a low resistivity glass portion joined to the metal portion, and a high resistivity glass portion for fixing an anode including the target. A volume resistivity of a material forming the low resistivity glass portion is lower than a volume resistivity of a material forming the high resistivity glass portion. According to this configuration, electrification of the insulation valve is curbed, so that deterioration in withstand voltage ability of the insulation valve is curbed, and electric discharge caused by electrification is curbed.

Claims

1. An X-ray tube comprising:

a metal portion in which an X-ray emission unit is provided;

a valve portion which is joined to the metal portion and forms a vacuum region in cooperation with the metal portion; and

an electron gun and a target which are accommodated in the vacuum region,

wherein the valve portion has a first partition wall portion joined to the metal portion, and a second partition wall portion for fixing either of the electron gun or the target, and

wherein a volume resistivity of a material forming the first partition wall portion is lower than a volume resistivity of a material forming the second partition wall portion.

2. The X-ray tube according to claim 1,

wherein the valve portion has a partition wall joint portion in which the first partition wall portion is joined to the second partition wall portion.

3. The X-ray tube according to claim 2,

wherein the valve portion has a first cylinder portion which includes the first partition wall portion, a second cylinder portion which is disposed inside the first cylinder portion and includes the second partition wall portion, and a coupling portion which causes the first cylinder portion to be coupled to the second cylinder portion.

4. The X-ray tube according to claim 3,

wherein the first cylinder portion includes the partition wall joint portion.

5. The X-ray tube according to claim 3,

wherein the coupling portion includes the partition wall joint portion.

6. The X-ray tube according to claim 3,

wherein the second cylinder portion includes the partition wall joint portion.

7. The X-ray tube according to claim 2,

wherein the volume resistivity of the first partition wall portion increases from an end portion joined to the metal portion toward the partition wall joint portion.

8. The X-ray tube according to claim 2,

wherein the first partition wall portion includes a plurality of first partition wall piece portions differing from each other in volume resistivity, and

wherein the plurality of first partition wall piece portions are disposed such that a volume resistivity increases from an end portion joined to the metal portion toward the partition wall joint portion.

9. The X-ray tube according to claim 2,

wherein the volume resistivity of the second partition wall portion increases from the partition wall joint portion toward an end portion joined to either of the electron gun or the target.

10. The X-ray tube according to claim 2,

wherein the second partition wall portion includes a plurality of second partition wall piece portions differing from each other in volume resistivity, and

wherein the plurality of second partition wall piece portions are disposed such that a volume resistivity increases from the partition wall joint portion toward an end portion joined to either of the electron gun or the target.

11. The X-ray tube according to claim 1,

wherein the metal portion has a protrusion portion covering a joint part between the metal portion and the first partition wall portion.

12. The X-ray tube according to claim 1,

wherein the valve portion is an integrated body formed such that the volume resistivity continuously increases from the first partition wall portion toward the second partition wall portion.

13. The X-ray tube according to claim 1,

wherein the volume resistivity of a material forming the first partition wall portion is within a range of 10⁻

5 times to 10<sup>−

2</sup> times the volume resistivity of a material forming the second partition wall portion.

14. The X-ray tube according to claim 1,

wherein the material forming the first partition wall portion and the material forming the second partition wall portion are glasses.