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Monoorganoaminodisilane Precursors and Methods for Depositing Films Comprising Same

  • US 20190318925A1
  • Filed: 04/03/2019
  • Published: 10/17/2019
  • Est. Priority Date: 04/11/2018
  • Status: Abandoned Application
First Claim
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1. A composition comprising an monoorganoaminodisilane represented by the structure of Formula I:

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