Emissive Display Substrate for Surface Mount Micro-LED Fluidic Assembly
First Claim
1. An emissive display substrate comprising:
- a support substrate with a planar top surface and a light emitting diode (LED) cross-point control matrix comprising an array of column and row conductive lines;
a first thin-film layer overlying the support substrate top surface, comprising a plurality of wells; and
,wherein each well has a convex bottom surface, a first substrate electrode connected to a corresponding column line, and a second substrate electrode connected to a corresponding row line.
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Abstract
Planar surface mount (SM) micro light emitting diodes (μLEDs) are presented. The fabrication method provides a MOCVD LED structure with a stack including a first doped semiconductor in a first plane, a MQW layer overlying the first doped semiconductor in a second plane, and a second doped semiconductor overlying the MQW layer in a third plane. An electrical insulator is conformally deposited over the etched stack in a fourth plane, and etched to expose the second doped semiconductor, creating a first via. Etching exposes the first doped semiconductor, creating a second via. A first electrode is connected to the second doped semiconductor through the first via, and has a substrate interface surface in a fifth plane with an average planarity tolerance of less than 10 nanometers. A second electrode is connected to the first doped semiconductor through the second via, and has a substrate interface surface in the fifth plane.
21 Citations
22 Claims
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1. An emissive display substrate comprising:
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a support substrate with a planar top surface and a light emitting diode (LED) cross-point control matrix comprising an array of column and row conductive lines; a first thin-film layer overlying the support substrate top surface, comprising a plurality of wells; and
,wherein each well has a convex bottom surface, a first substrate electrode connected to a corresponding column line, and a second substrate electrode connected to a corresponding row line. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method for fabricating an emissive display substrate, the method comprising:
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providing a support substrate with a planar top surface and a light emitting diode (LED) cross-point control matrix comprising an array of column and row conductive lines; forming an array of convex well bottom structures overlying the support substrate top surface; forming a first thin-film layer overlying the support substrate top surface and convex well bottom structures; and
,forming wells in the first thin-film layer, exposing the convex well bottom structures. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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Specification