MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
First Claim
1. A method of manufacturing a semiconductor device, the method comprising:
- forming a stack structure including a first region and a second region by alternately stacking interlayer insulating layers and sacrificial insulating layers on a lower structure;
forming pillars penetrating the first region of the stack structure;
forming a slit penetrating the second region of the stack structure;
forming first openings between the interlayer insulating layers by removing the sacrificial insulating layers remaining between a slit-side pillar adjacent to the slit among the pillars and the slit, using a first etching material introduced through the slit; and
forming second openings between the interlayer insulating layers by removing the sacrificial insulating layers remaining between the pillars, using a second etching material different from the first etching material, which is introduced through the first openings.
1 Assignment
0 Petitions
Accused Products
Abstract
A manufacturing method of a semiconductor device includes: forming pillars in a first region of a stack structure in which interlayer insulating layers and sacrificial insulating layers are alternately stacked; forming a slit in a second region of the stack structure; and removing the sacrificial insulating layers in the first region. In the removing of the sacrificial insulating layers in the first region, a portion of each of the sacrificial insulating layers, which is adjacent to the slit, and a portion of each of the sacrificial insulating layers, which is disposed between the pillars, may be removed using different etching materials.
5 Citations
19 Claims
-
1. A method of manufacturing a semiconductor device, the method comprising:
-
forming a stack structure including a first region and a second region by alternately stacking interlayer insulating layers and sacrificial insulating layers on a lower structure; forming pillars penetrating the first region of the stack structure; forming a slit penetrating the second region of the stack structure; forming first openings between the interlayer insulating layers by removing the sacrificial insulating layers remaining between a slit-side pillar adjacent to the slit among the pillars and the slit, using a first etching material introduced through the slit; and forming second openings between the interlayer insulating layers by removing the sacrificial insulating layers remaining between the pillars, using a second etching material different from the first etching material, which is introduced through the first openings. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
-
-
11. A method of manufacturing a semiconductor device, the method comprising:
-
forming a stack structure by alternately stacking interlayer insulating layers and sacrificial insulating layers on a lower structure, the stack structure including first regions spaced apart from one another and a second region disposed between the first regions; forming holes penetrating each of the first regions of the stack structure; forming pillars filling in the holes, the pillars being divided into first and second pillar groups by the second region, each of the first and second pillar groups including a center pillar and a slit-side pillar; forming a slit penetrating the second region to a depth to expose the lower structure; forming a protective layer on the lower structure which is exposed through the slit; removing only a portion of each of the sacrificial insulating layers which remains between the slit and the slit-side pillar through a first selective etching process by introducing a first etching material through the slit to form first openings between adjacent interlayer insulating layers; performing a second etching using a second etching material that is different from the first etching material for removing remaining portions of the sacrificial insulating layers adjacent to the slit which were not removed with the first etching, and the sacrificial insulating layers between the pillars. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
-
Specification