HIGH SENSITIVITY OPTOELECTRONIC DEVICE FOR DETECTING CHEMICAL SPECIES AND RELATED MANUFACTURING METHOD
First Claim
1. A device for detecting a chemical species, comprising:
- a body of semiconductor material having a front surface;
a first Geiger mode avalanche photodiode including;
a cathode region having a first type of conductivity in the body, which forms the front surface; and
an anode region having a second type of conductivity in the body, which extends in the cathode region starting from the front surface;
a dielectric region which extends on the front surface; and
a sensitive region which is arranged on the dielectric region, electrically coupled to the anode region, and has a resistance that depends upon a concentration of said chemical species.
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Accused Products
Abstract
A device for detecting a chemical species including a Geiger mode avalanche photodiode, which comprises a body of semiconductor material delimited by a front surface. The semiconductor body includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends within the cathode region starting from the front surface. The detection device further includes: a dielectric region, which extends on the front surface; and a sensitive region, which is arranged on top of the dielectric region and electrically coupled to the anode region and has a resistance that depends upon the concentration of the chemical species.
2 Citations
20 Claims
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1. A device for detecting a chemical species, comprising:
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a body of semiconductor material having a front surface; a first Geiger mode avalanche photodiode including; a cathode region having a first type of conductivity in the body, which forms the front surface; and an anode region having a second type of conductivity in the body, which extends in the cathode region starting from the front surface; a dielectric region which extends on the front surface; and a sensitive region which is arranged on the dielectric region, electrically coupled to the anode region, and has a resistance that depends upon a concentration of said chemical species. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A device, comprising:
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a die (100) of semiconductor material having a front surface; an array of detection devices, each detection device including; a first Geiger mode avalanche photodiode including; a cathode region having a first type of conductivity in the body, which forms the front surface; and an anode region having a second type of conductivity in the body, which extends in the cathode region starting from the front surface; a dielectric region which extends on the front surface; and a sensitive region which is arranged on the dielectric region, electrically coupled to the anode region, and has a resistance that depends upon a concentration of said chemical species. - View Dependent Claims (10, 11, 13)
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12. A detection system comprising:
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a light source; a driving stage configured to control the light source with a timing signal including a plurality of electrical pulses so as to generate a plurality of optical pulses; a device configured to receive said optical pulses and generate a current signal including a plurality of corresponding current pulses, the device including; a die of semiconductor material having a front surface; an array of detection devices, each detection device including; a first Geiger mode avalanche photodiode including; a cathode region having a first type of conductivity in the body, which forms the front surface; and an anode region having a second type of conductivity in the body, which extends in the cathode region starting from the front surface; a dielectric region which extends on the front surface; and a sensitive region which is arranged on the dielectric region, electrically coupled to the anode region, and has a resistance that depends upon a concentration of said chemical species.
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14. A method for manufacturing a device for detecting a chemical species, the method comprising:
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forming a Geiger mode avalanche photodiode in a body of semiconductor material delimited by a front surface, wherein forming the Geiger mode avalanche photodiode includes; forming a cathode region, having a first type of conductivity, in the body and extending from the front surface; and forming an anode region having a second type of conductivity, which extends in the cathode region starting from the front surface; forming a dielectric region on the front surface; and forming, on the dielectric region, a sensitive region which is electrically coupled to the anode region and has a resistance that depends upon a concentration of said chemical species. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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Specification