SELF-ASSEMBLY OF NANOSTRUCTURES

• US 20190319191A1
• Filed: 04/13/2018
• Published: 10/17/2019
• Est. Priority Date: 04/13/2018
• Status: Active Grant

• Current Assignee: International Business Machines Corporation
• Original Assignee: International Business Machines Corporation
• Inventors: Han, Shu-Jen
• Granted Patent: US 10,672,986 B2
• Time in Patent Office: Days
• CPC Class Codes: B82Y 30/00 Nanotechnology for materials or surface science, e.g. nanocomposites
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C01B 32/162 characterised by catalysts
• CPC Class Codes: C01B 32/168 After-treatment
• CPC Class Codes: H10K 71/12 using liquid deposition, e.g. spin coating
• CPC Class Codes: H10K 71/191 characterised by provisions for the orientation or alignment of the layer to be deposited
• CPC Class Codes: H10K 85/221 Carbon nanotubes
• CPC Class Codes: Y10S 977/746 Modified with biological, organic, or hydrocarbon material
• CPC Class Codes: Y10S 977/847 Surface modifications, e.g. functionalization, coating
• CPC Class Codes: Y10S 977/891 Vapor phase deposition

Abstract

Sub-lithographic structures configured for selective placement of carbon nanotubes and methods of fabricating the same generally includes alternating conformal first and second layers provided on a topographical pattern formed in a dielectric layer. The conformal layers can be deposited by atomic layer deposition or chemical vapor deposition at thicknesses less than 5 nanometers. A planarized surface of the alternating conformal first and second layers provides an alternating pattern of exposed surfaces corresponding to the first and second layer, wherein a width of at least a portion of the exposed surfaces is substantially equal to the thickness of the corresponding first and second layers. The first layer is configured to provide an affinity for carbon nanotubes and the second layer does not have an affinity such that the carbon nanotubes can be selectively placed onto the exposed surfaces of the alternating pattern corresponding to the first layer.

Claims

1. A method of forming a structure having selectively placed carbon nanotubes, the method comprising:

conformally depositing a first layer at a thickness of less than about 5 nanometers onto a substrate including a topographical pattern;

conformally depositing a second layer at a thickness of less than about 5 nanometers onto the first layer, wherein the first layer comprises a metal oxide or metal nitride, and the second layer comprises a non-metal oxide or metal;

repeating conformally depositing the first and second layers;

planarizing a surface to expose an alternating surface pattern of the first and second layers;

functionalizing the exposed first layer surface with an electron-deficient compound; and

selectively placing a monolayer of electron-rich arene coated carbon nanotubes on the exposed first layer surface with the electron-deficient compound.

2. The method of claim 1, wherein the topographical pattern is formed in a dielectric layer.

3. The method of claim 1, wherein functionalizing the first layer with the electron-deficient compound comprises coating the substrate with a solution containing the electron-deficient compound.

4. The method of claim 1, wherein the electron-deficient compound comprises a pendant hydroxamic acid group or a pendant phosphonic acid group or a pendant catechol group, wherein the pendant hydroxamic acid group or the pendant phosphonic acid group or the pendant catechol group is reactive with the first layer to form a bound self-assembled monolayer of the electron-deficient compound.

5. The method of claim 1, wherein conformally depositing the first and second layers comprises an atomic layer deposition process or a chemical vapor deposition process.

6. The method of claim 1, wherein the electron-deficient compound comprising the pendant hydroxamic acid group or the pendant phosphonic acid group or the pendant catechol group is of the formula:

7. The method of claim 1, wherein the electron withdrawing group comprises a fluorine group, a nitro group, a cyano group or mixtures thereof.

8. The method of claim 1, wherein the electron-deficient compound is pentafluorophenoxyhydroxamic acid, pentafluorophenoxyphosphonic acid or mixtures thereof.

9. A method of forming a structure having selectively placed carbon nanotubes, the method comprising:

conformally depositing a first layer at a thickness of less than about 5 nanometers onto a substrate including a topographical pattern;

conformally depositing a second layer at a thickness of less than about 5 nanometers onto the first layer, wherein the first layer has an isoelectric point greater than the second layer;

repeating conformally depositing the first and second layers;

planarizing a surface to expose an alternating surface pattern of the first and second layers;

functionalizing the exposed first layer surface with an electron-deficient compound having a terminal acid group, wherein the isoelectric point of the first layer is greater than a pKa of the terminal acid group, and wherein the isoelectric point of the second layer is less than the pKa of the terminal acid group; and

selectively placing a monolayer of electron-rich arene coated carbon nanotubes on the exposed first layer surface with the electron-deficient compound.

10. The method of claim 9, wherein the first layer comprises a metal oxide or metal nitride, and the second layer comprises a non-metal oxide or metal.

11. The method of claim 9, wherein the terminal acid group of the electron-deficient compound comprises a hydroxamic acid group or a phosphonic acid group or a catechol group.

12. The method of claim 9, wherein the first layer comprises hafnium oxide and the second layer comprises silicon dioxide.

13. The method of claim 9, wherein the first layer isoelectric point and the second layer isoelectric point is at a differential of at least three.

14. The method of claim 9, wherein the electron-rich carbon nanotubes comprises an arene coating.

15. The method of claim 14, wherein the arene is selected from the group consisting of optionally substituted benzene, biphenylene, triphenylene, pyrene, naphthalene, anthracene and phenanthrene or mixtures thereof

16. A structure having selectively placed carbon nanotubes, the structure comprising:

a topographical pattern provided in a dielectric layer including at least one opening;

a planarized surface of alternating conformal first and second layers in the at least one having a thickness of less than about 5 nanometers on the dielectric layer, wherein the planarized surface comprises an alternating pattern of exposed surfaces corresponding to the first and second layer, wherein a width of at least a portion of the exposed surfaces is substantially equal to the thickness of the corresponding first and second layers, wherein the first layer comprises metal oxide or a metal nitride and the second layer comprises a non-metal oxide or a metal; and

carbon nanotubes selectively placed on the exposed surfaces corresponding to the first layer.

17. The structure of claim 16, wherein the first layer has an isoelectric point greater than an isoelectric point of the second layer and is at a differential of at least 3.

18. The structure of claim 16, wherein the thickness of each one of the first and second layers is less than about 3 nm.

19. The structure of claim 16, wherein the first layer comprises hafnium oxide or silicon nitride and the second layer comprises silicon dioxide.

20. The structure of claim 16, wherein the dielectric layer comprises silicon dioxide.