Sample Height Measurement Using Digital Grating
First Claim
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1. A method for measuring a height of a sample, comprising:
- receiving, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample;
determining, by a processor, a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image; and
determining the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height.
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Abstract
A method, an apparatus, and a non-transitory computer-readable medium for measuring a height of a sample includes: receiving, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample; determining, by a processor, a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image; and determining the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height.
14 Citations
20 Claims
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1. A method for measuring a height of a sample, comprising:
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receiving, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample; determining, by a processor, a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image; and determining the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An apparatus for measuring a height of a sample, comprising:
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an optical sensor having pixels; a processor; and a memory coupled to the processor, the memory configured to store instructions which when executed by the processor become operational with the processor to; receive, by the optical sensor, an optical grating image of an illuminated optical grating reflected by a surface of the sample; determine a digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image; and determine the height based on a relationship between an integrated intensity of a portion of the digital grating image and the height. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A non-transitory computer-readable medium, comprising instructions for measuring a height of a sample which when executed by a processor become operational with the processor to:
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receive, by an optical sensor having pixels, an optical grating image of an illuminated optical grating reflected by a surface of the sample; determine a first digital grating image by keeping values of first pixels of the optical grating image and resetting values of second pixels of the optical grating image, and a second digital grating image by resetting the values of the first pixels and keeping the values of the second pixels; and determine the height based on a relationship between the height and integrated intensities at portions of the first and second digital grating images. - View Dependent Claims (19, 20)
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Specification