STRETCHABLE ELECTRODE AND METHOD OF FORMING THE SAME

• US 20190320933A1
• Filed: 11/24/2017
• Published: 10/24/2019
• Est. Priority Date: 11/24/2016
• Status: Active Application

• Current Assignee: Nanyang Technological University
• Original Assignee: Nanyang Technological University
• Inventors: LIU, Zhiyuan, CHEN, Xiaodong
• Application Number:
  US16/462,476
• Publication Number:
  US 20190320933A1
• Time in Patent Office: Days
• CPC Class Codes: A61B 2562/125 characterised by the manufacture of electrodes
• CPC Class Codes: A61B 5/24 Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
• CPC Class Codes: A61B 5/296 for electromyography [EMG]
• CPC Class Codes: C08J 5/124 using adhesives based on a macromolecular component
• CPC Class Codes: C23C 14/20 on organic substrates
• CPC Class Codes: H01B 1/22 the conductive material comprising metals or alloys
• CPC Class Codes: H01B 5/14 comprising conductive layers or films on insulating-supports

Abstract

The invention relates to method of forming a stretchable electrode comprising depositing a metal on the non-fully cured sample via thermal evaporation to form the stretchable electrode. The non-fully cured sample may be uncured or is partially cured for a duration of less than 30 minutes and may be fully cured during deposition of the metal. The invention also relates to a stretchable electrode comprising a base layer; a wrinkled layer; and a plurality of pillars extending from the base layer to the wrinkled layer; and a metal film on the wrinkled layer; wherein the base layer, the wrinkled layer, and the plurality of pillars comprise a polymer.

Claims

1-19. -19. (canceled)

20. A method of forming a stretchable electrode, the method comprising:

providing a non-fully cured sample on a substrate; and

depositing a metal on the non-fully cured sample via thermal evaporation to form the stretchable electrode;

wherein the non-fully cured sample is uncured or is partially cured for a duration of less than 30 minutes;

wherein the stretchable electrode comprises;

a base layer;

a wrinkled layer;

a plurality of pillars extending from the base layer to the wrinkled layer; and

a metal film on the wrinkled layer, the metal film comprising the metal; and

wherein the base layer, the wrinkled layer, and the plurality of pillars comprise a polymer.

21. The method according to claim 20, wherein the uncured sample comprises a monomer and a cross-linker.

22. The method according to claim 20, wherein the partially cured sample comprises a plurality of polymeric chains joined to another via one or more cross-links.

23. The method according to claim 20, wherein the partially cured sample is formed by heating.

24. The method according to claim 23, wherein the heating is carried out at a temperature of less than 70°

C.

25. The method according to claim 20, wherein the non-fully cured sample is partially cured for a duration of less than 26 minutes.

26. The method according to claim 20, wherein the non-fully cured sample is partially cured for a duration of less than 15 minutes.

27. The method according to claim 20, the method further comprising:

providing a metal source comprising the metal.

28. The method according to claim 20, wherein the deposition of the metal on the non-fully cured sample is carried out in a vacuum.

29. The method according to claim 28, wherein the vacuum is at 1.0×

10<sup>−

6</sup> Torr.

30. The method according to claim 20, wherein the polymer is polydimethylsiloxane.

31. The method according to claim 20, wherein the metal is any one selected from a group consisting of gold, palladium, aluminium and copper.

32. The method according to claim 20, wherein the non-fully cured sample is fully cured during deposition of the metal.

33. A stretchable electrode comprising:

a base layer;

a wrinkled layer;

a plurality of pillars extending from the base layer to the wrinkled layer; and

a metal film on the wrinkled layer, the metal film comprising a metal;

wherein the base layer, the wrinkled layer, and the plurality of pillars comprise a polymer.

34. The stretchable electrode according to claim 33, wherein an adhesion strength of the metal film to the wrinkled layer is higher than 1 MPa.

35. The stretchable electrode according to claim 33, wherein the stretchable electrode has a stretchability exceeding 130%.

36. The stretchable electrode according to claim 33, wherein the polymer is polydimethylsiloxane.