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DEPOSITION MASK

  • US 20190323117A1
  • Filed: 10/24/2017
  • Published: 10/24/2019
  • Est. Priority Date: 11/18/2016
  • Status: Active Grant
First Claim
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1. A deposition mask used in depositing a depositing material onto a deposition target substrate, comprising a first surface facing to the deposition target substrate, and a second surface opposite to the first surface,wherein:

  • the deposition mask includes;

    an effective area in which a plurality of through holes are formed; and

    a longitudinal direction in which one or more of the effective areas are arranged along the longitudinal direction;

    wherein;

    at least in a central area of the longitudinal direction, the deposition mask is warped to be convex on the first surface in a cross section orthogonal to the longitudinal direction.

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