TEXTURING AND PLATING NICKEL ON ALUMINUM PROCESS CHAMBER COMPONENTS
First Claim
1. A method of coating a showerhead, the method comprising:
- removing aluminum oxide from the showerhead, wherein removing the aluminum oxide exposes aluminum portions of the showerhead and wherein the showerhead comprises through-holes extending from a top of the showerhead to a bottom of the showerhead;
electrochemically anchoring the aluminum portions of the showerhead by exposing the showerhead to an electrochemically anchoring chemical; and
forming a nickel layer on the aluminum portions.
1 Assignment
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Accused Products
Abstract
Systems and methods may be used to produce coated components. Exemplary chamber components may include an aluminum plate defining a plurality of apertures. The plate may include a nickel coating on a textured aluminum plate to provide for adhesion. Implementing the present technology, the nickel coating may be firmly affixed with or without first applying an intermediate adhesion layer. Deleterious components from the intermediate adhesion layer (if present) may not contaminate substrates as readily as a consequence of the texturing of the aluminum plate. The contamination from the intermediate adhesion layer is undesirable and may electrically compromise semiconductor devices during processing.
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Citations
15 Claims
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1. A method of coating a showerhead, the method comprising:
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removing aluminum oxide from the showerhead, wherein removing the aluminum oxide exposes aluminum portions of the showerhead and wherein the showerhead comprises through-holes extending from a top of the showerhead to a bottom of the showerhead; electrochemically anchoring the aluminum portions of the showerhead by exposing the showerhead to an electrochemically anchoring chemical; and forming a nickel layer on the aluminum portions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of coating a component of a semiconductor processing chamber, the method comprising:
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texturing an exposed surface of the component, wherein the component defines a plurality of apertures including a taper extending at least partially through a first section of each aperture of the plurality of apertures, and wherein the taper is characterized by an angle of taper through the first section of each aperture of the plurality of apertures; and applying a protective coating onto the component, wherein the protective coating comprises nickel and phosphorus. - View Dependent Claims (10, 11, 12, 13)
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14. A method of coating a showerhead, the method comprising:
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removing aluminum oxide from the showerhead, wherein removing the aluminum oxide exposes aluminum portions of the showerhead and wherein the showerhead comprises apertures extending from a top of the showerhead to a bottom of the showerhead; electrochemically anchoring the aluminum portions of the showerhead by exposing the showerhead to an electrochemically anchoring chemical in a liquid bath; applying a voltage between the showerhead and an anode, wherein the showerhead and the anode are disposed within the liquid bath; texturing the aluminum portions of the showerhead; electroless nickel plating a nickel layer onto the aluminum portions of the showerhead. - View Dependent Claims (15)
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Specification