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FEEDBACK CONTROL OF DIMENSIONS IN NANOPORE AND NANOFLUIDIC DEVICES

  • US 20190323138A1
  • Filed: 06/17/2019
  • Published: 10/24/2019
  • Est. Priority Date: 11/02/2010
  • Status: Active Grant
First Claim
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1. A method of fabricating a nanofluidic device, comprising:

  • forming a nanofluidic passage having larger than targeted dimensions in a substrate, wherein the nanofluidic passage is a channel formed with an opening in a surface of the substrate;

    forming a conductive layer on the substrate, thereby reducing the dimensions of the nanofluidic passage and closing the opening;

    filling the nanofluidic passage with an electrolyte;

    electrochemically oxidizing the conductive layer until the fluidic passage has the targeted dimensions;

    monitoring the size of the nanofluidic passage by measuring ionic current through the nanofluidic channel; and

    discontinuing electrochemically oxidizing the conductive layer when the ionic current reaches a level corresponding to the targeted dimensions.

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