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MICRO ELECTRICAL MECHANICAL SYSTEM (MEMS) VALVE

  • US 20190323627A1
  • Filed: 07/03/2019
  • Published: 10/24/2019
  • Est. Priority Date: 01/12/2018
  • Status: Active Grant
First Claim
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1. A micro electrical mechanical system (MEMS) valve, comprising:

  • a first body defining a first channel and a second channel intersecting the first channel;

    a second body defining a third channel and being disposed to rotate within the first channel between;

    first rotational positions with the second and third channels rotationally aligned to permit flow through the second and third channels, andsecond rotational positions with the second and third channels rotationally misaligned to inhibit flow through the second channel;

    a medium charged into the first channel at opposite sides of the second body; and

    a thermal element proximate to the first channel and operable to adjust relative temperatures and pressures of the medium at the opposite sides of the second body to drive a rotation of the second body to the first or the second rotational positions.

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