VIBRATION SENSOR WITH LOW-FREQUENCY ROLL-OFF RESPONSE CURVE

• US 20190323881A1
• Filed: 07/02/2019
• Published: 10/24/2019
• Est. Priority Date: 08/26/2016
• Status: Active Grant

• Current Assignee: Sonion Nederland BV
• Original Assignee: Sonion Nederland BV
• Inventors: Mogelin, Raymond, Post, Peter Christiaan
• Granted Patent: US 10,794,756 B2
• Time in Patent Office: Days
• CPC Class Codes: G01H 3/00 Measuring characteristics of vibrations by using a detector in a fluid G01H7/00, G01H9/00, G01H11/00 take precedence
• CPC Class Codes: G01H 3/06 by electric means
• CPC Class Codes: H04R 1/2807 Enclosures comprising vibrating or resonating arrangements for the reduction of undesired resonances or vibrations H04R1/2869
• CPC Class Codes: H04R 17/02 Microphones
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence
• CPC Class Codes: H04R 2201/003 Mems transducers or their use of the electrostatic type H04R19/005

Abstract

A vibration sensor comprising a pressure detecting arrangement adapted to detect generated pressure variations, and provide an output signal in response to the detected pressure variations, and a pressure generating arrangement adapted to generate pressure variations in response to movements thereof wherein the pressure generating arrangement is secured to an exterior surface portion of the pressure detecting arrangement. In a preferred embodiment the pressure detecting arrangement comprises a stand-alone and self-contained MEMS microphone unit comprising a MEMS microphone cartridge and a signal processing unit.

Claims

1-15. -15. (canceled)

16. A vibration sensor comprisinga pressure detecting arrangement adapted to detect generated pressure variations, and provide an output signal in response to the detected pressure variations, anda pressure generating arrangement adapted to generate pressure variations in response to movements thereof, the pressure generating arrangement comprising a suspension member,

wherein an intermediate volume exists between the pressure detecting arrangement and the suspension member of the pressure generating arrangement.

17. A vibration sensor according to claim 16, wherein a front volume of the pressure detecting arrangement forms part of the intermediate volume.

18. A vibration sensor according to claim 16, wherein the pressure generating arrangement further comprises a moveable mass secured to the suspension member.

19. A vibration sensor according to claim 16, wherein the intermediate volume exists between an outer surface of the pressure detecting arrangement and a surface of the suspension member, and wherein the outer surface of the pressure detecting arrangement includes a through-going opening acoustically connected to the intermediate volume.

20. A vibration sensor according to claim 16, wherein the pressure detecting arrangement comprises a microphone unit.

21. A vibration sensor according to claim 20, wherein the microphone unit comprises a microphone cartridge and a signal processing unit.

22. A vibration sensor according to claim 20, wherein the microphone unit comprises a stand-alone and self-contained MEMS microphone unit.

23. A vibration sensor according to claim 22, wherein the MEMS microphone unit comprises a MEMS microphone cartridge and the signal processing unit.

24. A vibration sensor according to claim 23, wherein the stand-alone and self-contained MEMS microphone unit comprises a first PCB to which first PCB the MEMS microphone cartridge and the signal processing unit are electrically connected.

25. A vibration sensor according to claim 24, wherein the stand-alone and self-contained MEMS microphone unit comprises a second PCB comprising a plurality of contact zones arranged thereon.

26. A vibration sensor according to claim 25, wherein the second PCB is oppositely arranged relative to the first PCB.

27. A vibration sensor according to claim 24, wherein the intermediate volume exists between an outer surface of the first PCB of the MEMS microphone unit and a surface of the suspension member, and wherein the first PCB comprises a through-going opening being acoustically connected to the intermediate volume.

28. A vibration sensor according to claim 27, wherein the intermediate volume is smaller than 5 mm³.

29. A vibration sensor according to claim 27, wherein the intermediate volume is smaller than 1 mm³.

30. A vibration sensor according to claim 27, wherein the intermediate volume is smaller than 0.5 mm³.

31. A vibration sensor according to claim 27, wherein the intermediate volume is smaller than 0.1 mm³.

32. A vibration sensor according to claim 16, wherein the area of the suspension member is larger than 0.5 mm².

33. A vibration sensor according to claim 16, wherein the area of the suspension member is larger than 2 mm².

34. A vibration sensor according to claim 16, wherein the area of the suspension member is larger than 4 mm².

35. A vibration sensor according to claim 16, wherein the area of the suspension member is larger than 8 mm².

36. A vibration sensor according to claim 16, wherein the area of the suspension member is larger than 10 mm².

37. A vibration sensor according to claim 18, wherein the mass of the moveable mass is larger than 0.004 mg.

38. A vibration sensor according to claim 18, wherein the mass of the moveable mass is larger than 0.04 mg.

39. A vibration sensor according to claim 18, wherein the mass of the moveable mass is larger than 0.4 mg.

40. A vibration sensor according to claim 18, wherein the mass of the moveable mass is around 4 mg.