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X-ray detection optics for small-angle X-ray scatterometry

  • US 20190323974A1
  • Filed: 04/17/2019
  • Published: 10/24/2019
  • Est. Priority Date: 04/23/2018
  • Status: Active Grant
First Claim
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1. X-ray apparatus, comprising:

  • a mount, which is configured to hold a sample;

    an X-ray source, which is configured to direct a beam of X-rays toward a first side of the sample;

    a detector, which is positioned on a second side of the sample, opposite the first side, so as to receive at least a portion of the X-rays that have been transmitted through the sample and to output signals indicative of an intensity of the received X-rays;

    an actuator, which is configured to scan the detector over a range of positions on the second side of the sample so as to measure the transmitted X-rays as a function of a scattering angle; and

    a controller, which is coupled to receive the signals output by the detector and to control the actuator, responsively to the signals, so as to increase an acquisition time of the detector at first positions where the intensity of the received X-rays is weak relative to the acquisition time at second positions where the intensity of the received X-rays is strong.

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