SCANNING PROBE MICROSCOPE
First Claim
1. A scanning probe microscope comprising:
- a cantilever relatively displaced along a surface of a sample;
a light irradiator that emits light toward the cantilever;
a photodetector that receives light reflected from the cantilever to output a detection signal corresponding to bending of the cantilever;
a scanning processor that performs scanning by relatively displacing the cantilever in an X-direction and a Y-direction relative to the surface of the sample, the X-direction and the Y-direction intersecting each other;
a main measurement processor that performs main measurement to acquire a surface image of a sample based on the detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning the cantilever at predetermined second interval in the Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along the X-direction; and
a preliminary measurement processor that performs preliminary measurement to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.
1 Assignment
0 Petitions
Accused Products
Abstract
Provided is a scanning probe microscope being able to shorten an observation time of a minute observation object. Main measurement is performed to acquire a surface image of a sample based on a detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning a cantilever at predetermined second intervals in a Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along an X-direction. Preliminary measurement is performed to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement.
-
Citations
6 Claims
-
1. A scanning probe microscope comprising:
-
a cantilever relatively displaced along a surface of a sample; a light irradiator that emits light toward the cantilever; a photodetector that receives light reflected from the cantilever to output a detection signal corresponding to bending of the cantilever; a scanning processor that performs scanning by relatively displacing the cantilever in an X-direction and a Y-direction relative to the surface of the sample, the X-direction and the Y-direction intersecting each other; a main measurement processor that performs main measurement to acquire a surface image of a sample based on the detection signal in a measurement range of a plurality of lines by repeating, for each line, processing of scanning the cantilever at predetermined second interval in the Y-direction after acquiring the detection signal at predetermined first intervals while scanning the cantilever on a line having a predetermined length along the X-direction; and a preliminary measurement processor that performs preliminary measurement to acquire a surface image of the sample by acquiring the detection signal at intervals wider than the first intervals or scanning the cantilever in the Y-direction at intervals wider than the second intervals before the main measurement, the surface image of the sample being coarser than the surface image in the main measurement. - View Dependent Claims (2, 3, 4, 5, 6)
-
Specification