Optoelectronic Components and Method for Producing an Optoelectronic Component

• US 20190324296A1
• Filed: 11/24/2017
• Published: 10/24/2019
• Est. Priority Date: 11/25/2016
• Status: Active Grant

• Current Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V.
• Original Assignee: Fraunhofer Gesellschaft Zur Foerderung Der Angewandten Forsching E.V.
• Inventors: Kleinert, Moritz
• Granted Patent: US 10,996,493 B2
• Time in Patent Office: Days
• CPC Class Codes: G02B 6/12 of the integrated circuit kind electric integrated circuits H01L27/00
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/1223 high refractive index type, i.e. high-contrast waveguides
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: G02B 6/14 Mode converters
• CPC Class Codes: G02B 6/305 and having an integrated mode-size expanding section, e.g. tapered waveguide
• CPC Class Codes: G02F 1/011 in optical waveguides, not otherwise provided for in this subclass
• CPC Class Codes: G02F 1/0157 using electro-absorption effects, e.g. Franz-Keldysh [FK] effect or quantum confined stark effect [QCSE]

Abstract

An optoelectronic component includes an optical waveguide including at least one passive and at least one active section. The active section has at least one layer formed from a two-dimensional material. The layer composed of the two-dimensional material is arranged at least partly in a waveguide core of the active section or in a manner at least partly adjoining the waveguide core of the active section. The difference in refractive index relative to the same wavelength between a core material forming the waveguide core of the active section and a cladding material forming a waveguide cladding of the active section is greater than the difference in refractive index between a core material forming a waveguide core of the passive section and a cladding material forming a waveguide cladding of the passive section.

Claims

1. An optoelectronic component, comprising:

an optical waveguide comprising at least one passive and at least one active section, wherein

the active section has at least one layer formed from a two-dimensional material, wherein the layer composed of the two-dimensional material is arranged at least partly in a waveguide core of the active section or in a manner at least partly adjoining the waveguide core of the active section, and

the difference in refractive index relative to the same wavelength between a core material forming the waveguide core of the active section flirt and a cladding material forming a waveguide cladding of the active section is greater than the difference in refractive index between a core material forming a waveguide core of the passive section and a cladding material forming a waveguide cladding of the passive section.

2. The optoelectronic component as claimed in claim 1, wherein the core material of the active section is structured for laterally guiding a light wave coupled into the waveguide.

3. The optoelectronic component as claimed in claim 1, wherein at least the active section forms a monomode waveguide.

4. The optoelectronic component as claimed in claim 1, wherein the layer composed of two-dimensional material projects laterally from the waveguide core at least in one direction and the projecting layer is electrically contacted at a distance from the guided optical wave.

5. The optoelectronic component as claimed in claim 1, wherein the core material of the active section differs from the core material of the passive section, and/or the cladding material of the active section differs from the cladding material of the passive section.

6. The optoelectronic component as claimed in claim 1, wherein at least one of:

the active section of the optical waveguide is embodied in a strongly guiding fashion and the passive section of the optical waveguide is embodied in a weakly guiding fashion, and

the active section of the waveguide is embodied such that the light wave guided there has a diameter of less than 3 μ

m or less than 2 μ

m, and/or the passive section of the waveguide is embodied such that the light wave guided there has a diameter of at least 3 μ

m or at least 5 μ

m.

7. The optoelectronic component as claimed in claim 1, wherein the difference in refractive index between the core material and cladding material of the active section is at least 0.2, at least 0.3, or at least 0.4, and/or the difference in refractive index between the core material and cladding material of the passive section is at most 0.1 or at most 0.05.

9. The optoelectronic component as claimed in claim 1, wherein the core material of the active section extends into the passive section, wherein the extent of the core material perpendicular to the longitudinal direction of the optical waveguide decreases with distance from the active section.

10. The optoelectronic component as claimed in claim 9, wherein the extent of the core material decreases continuously with distance from the active section over a span of at least 30 μ

m or at least 50 μ

m.

11. The optoelectronic component as claimed in claim 1, wherein the cladding material of the active section shapes at least one part of the core material of the passive section.

12. The optoelectronic component as claimed in claim 1, wherein at least one of:

the two-dimensional material consists of one atomic layer or of a maximum of ten atomic layers, and

the two-dimensional material is formed from graphene, triazine-based graphitic carbon nitride, germanene, molybdenum disulfide, molybdenum diselenide, silicone, and/or black phosphorus or comprises at least one of these materials.

14. The optoelectronic component as claimed in claim 1, wherein the active section has at least two layers each composed of a two-dimensional material, which are electrically insulated from one another by a dielectric.

8. (canceled)

13. (canceled)

22. The optoelectronic component as claimed in claim 13, wherein the layer composed of the two-dimensional material at least partly adjoins a top side or underside of the waveguide core of the active section.

15. An optoelectronic component, comprising:

an optical waveguide comprising at least one active section having at least one layer formed from a two-dimensional material, wherein

the layer composed of the two-dimensional material is arranged at least partly in a waveguide core of the active section or in a manner at least partly adjoining the waveguide core of the active section, and wherein

the active section comprises a cladding material at least partly surrounding the core material, and wherein

the refractive index of a core material forming the waveguide core of the active section relative to visible light lies in the range of 1.9 to 2.5 and the refractive index of the cladding material lies in the range of 1.4 to 1.55.

16. The optoelectronic component as claimed in claim 15, wherein the core material of the active section is a dielectric formed from a nitride, an oxide, and/or a silicate.

17. The optoelectronic component as claimed in claim 16, wherein the dielectric is silicon nitride, titanium dioxide, hafnium dioxide, hafnium silicate, zirconium silicate, zirconium dioxide, and/or aluminum dioxide.

18. The optoelectronic component as claimed in claim 15, wherein the core material of the active section has a thickness of at least 50 nm, at least 100 nm, or at least 200 nm.

19. The optoelectronic component as claimed in claim 15, wherein the cladding material of the active section comprises silicon dioxide and/or a polymer and/or the cladding material of a passive section of the waveguide comprises silicon dioxide and/or a polymer.

20. The optoelectronic component as claimed in claim 15, wherein the core material of a passive section of the waveguide comprises a polymer and/or doped silicon dioxide, and/or the cladding material of the passive section comprises a polymer and/or silicon dioxide.

21. (canceled)

23. A method for producing an optoelectronic component, comprising:

producing an optical waveguide comprising at least one passive and at least one active section, wherein

producing the optical waveguide comprises arranging at least one layer formed from a two-dimensional material at least partly in a waveguide core of the active section or in a manner at least partly adjoining the waveguide core of the active section, and wherein

the optical waveguide is produced such that the difference in refractive index relative to the same wavelength between a core material forming the waveguide core of the active section and a cladding material forming a waveguide cladding of the active section is greater than the difference in refractive index between a core material forming a waveguide core of the passive section and a cladding material forming a waveguide cladding of the passive section.