METAL EMBEDDED LOW-RESISTANCE BEOL ANTIFUSE
First Claim
Patent Images
1. A method for manufacturing a back-end-of-the-line (BEOL) anti-fuse of a BEOL structure, comprising:
- forming a trench in a metallization layer disposed in a first insulator layer of the BEOL structure, the trench having vertical sidewalls and angled sidewalls extending from underlying the vertical sidewalls, the angled sidewalls angled to meet at an apex;
forming a second insulator layer on the vertical sidewalls and the angled sidewalls; and
forming a metallic via on the second insulator layer in the trench to form the anti-fuse.
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Accused Products
Abstract
A back-end-of-the-line (BEOL) anti-fuse of a BEOL structure is disclosed. The anti-fuse structure includes a metallization layer formed in a first insulator layer of the BEOL structure. The metallization layer has a trench formed therein. The trench has substantially vertical sidewalls and angled sidewalls formed underlying the vertical sidewalls, the angled sidewalls angled to meet at an apex. The anti-fuse structure further includes a second insulator formed on the vertical sidewalls and the angled sidewalls. The anti-fuse structure further includes a metallic via formed on the second insulator in the trench.
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Citations
23 Claims
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1. A method for manufacturing a back-end-of-the-line (BEOL) anti-fuse of a BEOL structure, comprising:
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forming a trench in a metallization layer disposed in a first insulator layer of the BEOL structure, the trench having vertical sidewalls and angled sidewalls extending from underlying the vertical sidewalls, the angled sidewalls angled to meet at an apex; forming a second insulator layer on the vertical sidewalls and the angled sidewalls; and forming a metallic via on the second insulator layer in the trench to form the anti-fuse. - View Dependent Claims (2, 3, 4, 6, 7, 8, 10, 11, 12, 13, 14)
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5. (canceled)
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9. (canceled)
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15. A back-end-of-the-line (BEOL) anti-fuse of a BEOL structure, comprising:
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a metallization layer formed in a first insulator layer of the BEOL structure, the metallization layer having a trench formed therein, the trench having substantially vertical sidewalls and angled sidewalls formed underlying the vertical sidewalls, the angled sidewalls angled to meet at an apex; a second insulator formed on the vertical sidewalls and the angled sidewalls; and a metallic via formed on the second insulator in the trench to produce the anti-fuse. - View Dependent Claims (16, 18, 19, 20, 21, 22, 23)
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17. (canceled)
Specification