LIGHT-EMITTING DEVICE AND MANUFACTURING METHOD THEREOF

• US 20190326469A1
• Filed: 07/02/2019
• Published: 10/24/2019
• Est. Priority Date: 08/17/2018
• Status: Active Grant

• Current Assignee: Bridgelux Optoelectronics Company Limited
• Original Assignee: Kaistar Lighting (Xiamen) Co.,Ltd.
• Inventors: YANG, HUNG-CHIH, LIN, XIAO-KUN, HUANG, JIAN-RAN, FAN, BEN-JIE, CHEN, HO-CHIEN, LU, CHAN-YANG, TENG, SHUEN-TA, HSIEH, CHENG-CHANG
• Granted Patent: US 11,038,079 B2
• Time in Patent Office: Days
• CPC Class Codes: H01L 21/0243 Surface structure
• CPC Class Codes: H01L 21/02639 Preparation of substrate for selective deposition
• CPC Class Codes: H01L 21/02647 Lateral overgrowth
• CPC Class Codes: H01L 33/0062 for devices with an active region comprising only III-V compounds
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/20 with a particular shape, e.g. curved or truncated substrate

Abstract

A light-emitting device and a manufacturing method thereof are provided. The light-emitting device includes a substrate, an epitaxial blocking layer, and a light-emitting epitaxial structure. The substrate has a surface, in which the surface includes a plurality of protruding parts and a plurality of recess parts relative to the protruding parts. The epitaxial blocking layer disposed on the substrate covers the recess parts and exposes the protruding parts. The light-emitting epitaxial structure disposed on the substrate is connected to the protruding parts and is disposed above the recess parts. The light-emitting epitaxial structure is formed by using the protruding parts as a growth surface thereof so as to have a better crystalline quality.

Claims

1. A manufacturing method of a light-emitting device comprising:

providing a substrate having a surface, the surface including a plurality of protruding parts and a plurality of recess parts relative to the protruding parts;

forming an epitaxial blocking layer on the substrate, wherein the epitaxial blocking layer covers the recess parts and exposes the protruding parts; and

forming a light-emitting epitaxial structure on the substrate with the protruding parts serving as a growth surface thereof.

2. The manufacturing method according to claim 1, wherein each of the recess parts defines a space, the epitaxial blocking layer fills into the space and has a non-growth surface, and the non-growth surface is flush with the growth surface.

3. The manufacturing method according to claim 2, wherein after the step of forming the light-emitting epitaxial structure, at least one pore is formed between the light-emitting epitaxial structure and the non-growth surface.

4. The manufacturing method according to claim 1, wherein the mask surface has an non-growth surface, the non-growth surface is a curved surface, and after the step of forming the light-emitting epitaxial structure, a plurality of voids are defined between a portion of a bottom surface of the light-emitting epitaxial structure and the non-growth surface.

5. The manufacturing method according to claim 1, wherein a refractive index of the epitaxial blocking layer is lower than that of the substrate.

6. The manufacturing method according to claim 1, wherein the step of forming the epitaxial blocking layer further comprises:

forming a dielectric material layer on the substrate, wherein the dielectric material layer completely covers the surface; and

removing a portion of the dielectric material layer that covers the protruding parts, and retaining the other portions of the dielectric material layer covering the recess parts to serve as the epitaxial blocking layer.

7. The manufacturing method according to claim 1, wherein any two adjacent protruding parts are spaced apart from each other by a horizontal distance in a cross section of the substrate, and a ratio of the horizontal distance to a width of each of the protruding parts ranges from 1 to 20.

8. A light-emitting device comprising:

a substrate having a surface, wherein the surface includes a plurality of protruding parts and a plurality of recess parts relative to the protruding parts;

an epitaxial blocking layer disposed on the substrate, wherein the epitaxial blocking layer covers the recess parts and exposes the protruding parts; and

a light-emitting epitaxial structure disposed on the substrate, wherein the light-emitting epitaxial structure is connected to the protruding parts and is disposed above the recess parts.

9. The light-emitting device according to claim 8, wherein the protruding parts serve as a growth surface of the light-emitting epitaxial structure, the recess parts respectively define a plurality of spaces, the epitaxial blocking layer fills each of the spaces and has a non-growth surface, and the growth surface is flush with the non-growth surface.

10. The light-emitting device according to claim 9, wherein at least one pore exists between a bottom surface of the light-emitting epitaxial structure and the non-growth surface.

11. The light-emitting device according to claim 8, the light-emitting device according to claim 8, wherein the epitaxial blocking layer has a non-growth surface, the non-growth surface is a curved surface, and a plurality of voids are defined between a portion of a bottom surface of the light-emitting epitaxial structure and the non-growth surface.

12. The light-emitting device according to claim 8, wherein a refractive index of the epitaxial blocking layer is smaller than that of the substrate.

13. The light-emitting device according to claim 8, wherein any two adjacent protruding parts are spaced apart from each other by a horizontal distance in a cross section of the substrate, and a ratio of the horizontal distance to a width of each of the protruding parts ranges from 1 to 20.