METHOD OF PRODUCING A FLEXIBLE THERMOELECTRIC DEVICE TO HARVEST ENERGY FOR WEARABLE APPLICATIONS

• US 20190326500A1
• Filed: 07/03/2019
• Published: 10/24/2019
• Est. Priority Date: 05/14/2015
• Status: Active Grant

• Current Assignee: Nimbus Materials Inc
• Original Assignee: Nimbus Materials Inc
• Inventors: Kasichainula, Sridhar
• Granted Patent: US 11,283,000 B2
• Time in Patent Office: Days
• CPC Class Codes: H10N 10/01 Manufacture or treatment
• CPC Class Codes: H10N 10/817 the junction being non-separable, e.g. being cemented, sintered or soldered
• CPC Class Codes: H10N 10/82 Connection of interconnections

Abstract

A method and/or apparatus of energy harvesting for wearable technology through a thin flexible thermoelectric device is disclosed. A lower conduction layer is formed on top of a lower dielectric layer. An active layer, comprising at least one thin film thermoelectric conduit and a thermal insulator, is formed above the lower conduction layer. An internal dielectric layer is formed above the active layer, and contact holes are drilled above each thermoelectric conduit. An upper conduction layer and upper dielectric layer are formed, connecting the thermoelectric conduits in series. The resulting flexible thermoelectric device generates a voltage when exposed to a temperature gradient.

Claims

1. A method of producing a flexible thermoelectric device comprising:

drilling a plurality of P-designated contact holes through a flexible coverlay each corresponding to a P-type conduit of a plurality of P-type conduits directly on top of a lower conduction layer of the flexible thermoelectric device, and a plurality of N-designated contact holes through the flexible coverlay each corresponding to an N-type conduit of a plurality of N-type conduits directly on top of the lower conduction layer, the flexible coverlay comprising a layer of adhesive under an internal dielectric layer;

aligning the plurality of P-type conduits and the plurality of N-type conduits under the flexible coverlay such that the each P-designated contact hole of the flexible coverlay is directly above one of the P-type conduits and the each N-designated contact hole of the flexible coverlay is directly above one of the N-type conduits,

wherein each P-type conduit is electrically connected to one of the N-type conduits through the lower conduction layer directly above a lower dielectric layer of the flexible thermoelectric device;

laminating the flexible coverlay on top of the lower conduction layer by pressing the flexible coverlay against the lower conduction layer such that;

the layer of adhesive deforms and fills a space around the each of the P-type conduits and each of the N-type conduits, and

the flexible coverlay is attached to the lower conduction layer through the layer of adhesive;

aligning the flexible coverlay under an upper patterned screen, wherein the upper patterned screen comprises a plurality of first areas corresponding to the plurality of P-designated contact holes and the plurality of N-designated contact holes, and a plurality of second areas corresponding to a plurality of upper electrically conductive leads; and

screen printing an upper conduction layer of the flexible thermoelectric device on top of and through the flexible coverlay by pressing a conductive paste through the upper patterned screen such that;

the conductive paste penetrates the each P-designated contact hole to form an electrically conductive contact coupled to the top of a corresponding one P-type conduit,

the conductive paste penetrates the each N-designated contact hole to form another electrically conductive contact coupled to the top of a corresponding one N-type conduit, and

the conductive paste at each second area forms an upper electrically conductive lead connecting a pair of electrically conductive contacts,

wherein the plurality of P-type conduits and the plurality of N-type conduits are electrically connected in series.

2. The method of claim 1, further comprising at least one of:

sealing and protecting the flexible thermoelectric device with an upper dielectric layer;

aligning a lower patterned mask comprising a plurality of third areas corresponding to a plurality of electrically conductive pads and a plurality of lower electrically conductive leads on top of a flexible metal clad, the flexible metal clad comprising a layer of metal directly on top of the lower dielectric layer; and

forming, in accordance with the plurality of third areas of the aligned lower patterned mask, the lower conduction layer of the flexible thermoelectric device in which;

the plurality of electrically conductive pads comprises a plurality of N-designated conductive pads and a plurality of P-designated conductive pads disposed directly across a surface of the lower dielectric layer,

each of the plurality of lower electrically conductive leads connects a pair of a neighboring N-designated conductive pad and a P-designated conductive pad,

the each of the plurality of lower electrically conductive leads extends between the N-designated conductive pad and the P-designated conductive pad of the corresponding pair across the surface of the lower dielectric layer, parallel to a length of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair, and

the each of the plurality of lower electrically conductive leads is narrower in width compared to a width of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair, the width of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair being a dimension perpendicular to the length thereof.

3. The method of claim 2, further comprising:

aligning a P-designated mask on top of the lower conduction layer of the flexible metal clad, the P-designated mask having a first pattern corresponding to the plurality of P-designated conductive pads of the lower conduction layer such that the plurality of P-designated conductive pads is exposed through the P-designated mask;

forming the plurality of P-type conduits with at least one layer of P-type thermoelectric material using the P-designated mask and at least one kind of P-type thermoelectric material, wherein the each of the plurality of P-type conduits is located directly on top of one of the plurality of P-designated conductive pads of the flexible metal clad exposed through the P-designated mask;

aligning an N-designated mask on the top of the lower conduction layer of the flexible metal clad, the N-designated mask having a second pattern corresponding to the plurality of N-designated conductive pads of the lower conduction layer such that the plurality of N-designated conductive pads is exposed through the N-designated mask; and

forming the plurality of N-type conduits with at least one layer of N-type thermoelectric material using the N-designated mask and at least one kind of N-type thermoelectric material, wherein the each of the plurality of N-type conduits is located directly on top of one of the plurality of N-designated conductive pads of the flexible metal clad exposed through the N-designated mask.

4. The method of claim 3, further comprising:

aligning a PN-designated mask above the lower conduction layer of the flexible metal clad, the PN-designated mask having a third pattern corresponding to at least one of the plurality of P-designated conductive pads and the plurality of N-designated conductive pads such that the at least one of the plurality of P-designated conductive pads and the plurality of N-designated conductive pads is configured to be exposed through the PN-designated mask; and

forming at least one barrier layer using the PN-designated mask such that the at least one barrier layer is between one of;

two layers of thermoelectric material,

an electrically conductive pad and a first layer of thermoelectric material, and

an electrically conductive contact and a second layer of thermoelectric material, the at least one barrier layer being electrically conductive and having a higher melting temperature than substances separated thereby.

5. The method of claim 3, comprising at least one of:

the formation of at least one of;

the lower conduction layer, the plurality of N-type conduits, the plurality of P-type conduits, the upper conduction layer and the upper dielectric layer involving at least one of;

vacuum deposition, sputter deposition, Chemical Vapor Deposition (CVD), physical vapor deposition, atomic layer deposition (ALD), electroplating, screen printing, another deposition method and an etching method; and

at least one of;

the lower dielectric layer, the internal dielectric layer, and the upper dielectric layer being at least one of;

a flexible polymer, a polymer composite, polyimide, polyacrylate, polyvinyl acetate and mylar.

6. The method of claim 3, comprising:

the internal dielectric layer being a poor thermal conductor having a thermal conductivity value less than 1 watt per meter kelvin (W/(mK)); and

both the upper dielectric layer and the lower dielectric layer being electrical insulators and good thermal conductors having a thermal conductivity value greater than 5 watts per meter kelvin (W/(mK)).

7. The method of claim 3, further comprising at least one of:

thermally insulating the each of the plurality of P-type conduits and the each of the plurality of N-type conduits so that a heat energy flows vertically through the conduit without leaking to other conduits on the sides;

utilizing a soft mask for at least one of;

the lower patterned mask, the P-designated mask, and the N-designated mask;

applying a layer of photoresist to at least one of the flexible metal clad, the lower conduction layer, the plurality of P-type conduits, the plurality of N-type conduits, the flexible coverlay, and the upper conduction layer of the flexible thermoelectric device;

aligning the flexible metal clad of the flexible thermoelectric device with a photo mask, the photo mask having a fourth pattern corresponding to the at least one of;

the lower patterned mask, the P-designated mask, and the N-designated mask such that a light from a light source behind the photo mask is configured to be partially blocked by the photo mask according to the fourth pattern on the photo mask;

exposing the at least one of;

the flexible metal clad, the lower conduction layer, the plurality of P-type conduits, the plurality of N-type conduits, the flexible coverlay, and the upper conduction layer of the flexible thermoelectric device and the layer of photoresist to the light from the light source through the photo mask;

forming a layer of at least one of P-type thermoelectric material, N-type thermoelectric material, metal and dielectric on the flexible thermoelectric device according to the fourth pattern on the photo mask;

etching the formed layer of the at least one of P-type thermoelectric material, the N-type thermoelectric material, the metal and the dielectric on the flexible thermoelectric device according to the fourth pattern on the photo mask; and

removing any remaining photoresist.

8. The method of claim 3, comprising at least one of:

a hard mask being used for at least one of the lower patterned mask, the P-designated mask, and the N-designated mask; and

a stencil being used for the at least one of the lower patterned mask, the P-designated mask, and the N-designated mask.

9. The method of claim 3, further comprising at least one of:

applying an electroless nickel immersion gold (ENIG) process to surface plate a layer of nickel and a layer of gold over the layer of metal of the flexible metal clad; and

accomplishing all of the aligning of the N-designated mask, the forming of the N-type conduits, the aligning of the P-designated mask, and the forming of the P-type conduits within a same vacuum system while continuing to maintain a vacuum.

10. A method of producing a flexible thermoelectric device comprising:

drilling a plurality of P-designated contact holes through a flexible coverlay each corresponding to a P-type conduit of a plurality of P-type conduits directly on top of a lower conduction layer of the flexible thermoelectric device, and a plurality of N-designated contact holes through the flexible coverlay each corresponding to an N-type conduit of a plurality of N-type conduits directly on top of the lower conduction layer, the flexible coverlay comprising a layer of adhesive under an internal dielectric layer;

aligning the plurality of P-type conduits and the plurality of N-type conduits under the flexible coverlay such that the each P-designated contact hole of the flexible coverlay is directly above one of the P-type conduits and the each N-designated contact hole of the flexible coverlay is directly above one of the N-type conduits,

wherein each P-type conduit is electrically connected to one of the N-type conduits through the lower conduction layer directly above a lower dielectric layer of the flexible thermoelectric device;

laminating the flexible coverlay on top of the lower conduction layer by pressing the flexible coverlay against the lower conduction layer such that;

the layer of adhesive deforms and fills a space around the each of the P-type conduits and each of the N-type conduits, and

the flexible coverlay is attached to the lower conduction layer through the layer of adhesive;

aligning the flexible coverlay under an upper patterned screen, wherein the upper patterned screen comprises a plurality of first areas corresponding to the plurality of P-designated contact holes and the plurality of N-designated contact holes, and a plurality of second areas corresponding to a plurality of upper electrically conductive leads;

screen printing an upper conduction layer of the flexible thermoelectric device on top of and through the flexible coverlay by pressing a conductive paste through the upper patterned screen such that;

the conductive paste penetrates the each P-designated contact hole to form an electrically conductive contact coupled to the top of a corresponding one P-type conduit,

the conductive paste penetrates the each N-designated contact hole to form another electrically conductive contact coupled to the top of a corresponding one N-type conduit, and

the conductive paste at each second area forms an upper electrically conductive lead connecting a pair of electrically conductive contacts; and

thermally insulating the each of the plurality of P-type conduits and the each of the plurality of N-type conduits so that a heat energy flows vertically through the conduit without leaking to other conduits on the sides,

wherein the plurality of P-type conduits and the plurality of N-type conduits are electrically connected in series.

11. The method of claim 10, further comprising at least one of:

sealing and protecting the flexible thermoelectric device with an upper dielectric layer;

aligning a lower patterned mask comprising a plurality of third areas corresponding to a plurality of electrically conductive pads and a plurality of lower electrically conductive leads on top of a flexible metal clad, the flexible metal clad comprising a layer of metal directly on top of the lower dielectric layer; and

forming, in accordance with the plurality of third areas of the aligned lower patterned mask, the lower conduction layer of the flexible thermoelectric device in which;

the plurality of electrically conductive pads comprises a plurality of N-designated conductive pads and a plurality of P-designated conductive pads disposed directly across a surface of the lower dielectric layer,

each of the plurality of lower electrically conductive leads connects a pair of a neighboring N-designated conductive pad and a P-designated conductive pad,

the each of the plurality of lower electrically conductive leads extends between the N-designated conductive pad and the P-designated conductive pad of the corresponding pair across the surface of the lower dielectric layer, parallel to a length of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair, and

the each of the plurality of lower electrically conductive leads is narrower in width compared to a width of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair, the width of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair being a dimension perpendicular to the length thereof.

12. The method of claim 11, further comprising:

aligning a P-designated mask on top of the lower conduction layer of the flexible metal clad, the P-designated mask having a first pattern corresponding to the plurality of P-designated conductive pads of the lower conduction layer such that the plurality of P-designated conductive pads is exposed through the P-designated mask;

forming the plurality of P-type conduits with at least one layer of P-type thermoelectric material using the P-designated mask and at least one kind of P-type thermoelectric material, wherein the each of the plurality of P-type conduits is located directly on top of one of the plurality of P-designated conductive pads of the flexible metal clad exposed through the P-designated mask;

aligning an N-designated mask on the top of the lower conduction layer of the flexible metal clad, the N-designated mask having a second pattern corresponding to the plurality of N-designated conductive pads of the lower conduction layer such that the plurality of N-designated conductive pads is exposed through the N-designated mask; and

forming the plurality of N-type conduits with at least one layer of N-type thermoelectric material using the N-designated mask and at least one kind of N-type thermoelectric material, wherein the each of the plurality of N-type conduits is located directly on top of one of the plurality of N-designated conductive pads of the flexible metal clad exposed through the N-designated mask.

13. The method of claim 12, further comprising:

aligning a PN-designated mask above the lower conduction layer of the flexible metal clad, the PN-designated mask having a third pattern corresponding to at least one of the plurality of P-designated conductive pads and the plurality of N-designated conductive pads such that the at least one of the plurality of P-designated conductive pads and the plurality of N-designated conductive pads is configured to be exposed through the PN-designated mask; and

forming at least one barrier layer using the PN-designated mask such that the at least one barrier layer is between one of;

two layers of thermoelectric material,

an electrically conductive pad and a first layer of thermoelectric material, and

an electrically conductive contact and a second layer of thermoelectric material, the at least one barrier layer being electrically conductive and having a higher melting temperature than substances separated thereby.

14. The method of claim 12, comprising at least one of:

the formation of at least one of;

the lower conduction layer, the plurality of N-type conduits, the plurality of P-type conduits, the upper conduction layer and the upper dielectric layer involving at least one of;

vacuum deposition, sputter deposition, CVD, physical vapor deposition, ALD, electroplating, screen printing, another deposition method and an etching method; and

at least one of;

the lower dielectric layer, the internal dielectric layer, and the upper dielectric layer being at least one of;

a flexible polymer, a polymer composite, polyimide, polyacrylate, polyvinyl acetate and mylar.

15. The method of claim 12, comprising:

the internal dielectric layer being a poor thermal conductor having a thermal conductivity value less than 1 watt per meter kelvin (W/(mK)); and

both the upper dielectric layer and the lower dielectric layer being electrical insulators and good thermal conductors having a thermal conductivity value greater than 5 watts per meter kelvin (W/(mK)).

16. The method of claim 12, further comprising at least one of:

utilizing a soft mask for at least one of;

the lower patterned mask, the P-designated mask, and the N-designated mask;

applying a layer of photoresist to at least one of the flexible metal clad, the lower conduction layer, the plurality of P-type conduits, the plurality of N-type conduits, the flexible coverlay, and the upper conduction layer of the flexible thermoelectric device;

aligning the flexible metal clad of the flexible thermoelectric device with a photo mask, the photo mask having a fourth pattern corresponding to the at least one of;

the lower patterned mask, the P-designated mask, and the N-designated mask such that a light from a light source behind the photo mask is configured to be partially blocked by the photo mask according to the fourth pattern on the photo mask;

exposing the at least one of;

the flexible metal clad, the lower conduction layer, the plurality of P-type conduits, the plurality of N-type conduits, the flexible coverlay, and the upper conduction layer of the flexible thermoelectric device and the layer of photoresist to the light from the light source through the photo mask;

forming a layer of at least one of P-type thermoelectric material, N-type thermoelectric material, metal and dielectric on the flexible thermoelectric device according to the fourth pattern on the photo mask;

etching the formed layer of the at least one of P-type thermoelectric material, the N-type thermoelectric material, the metal and the dielectric on the flexible thermoelectric device according to the fourth pattern on the photo mask; and

removing any remaining photoresist.

17. The method of claim 12, comprising at least one of:

a hard mask being used for at least one of the lower patterned mask, the P-designated mask, and the N-designated mask; and

a stencil being used for the at least one of the lower patterned mask, the P-designated mask, and the N-designated mask.

18. The method of claim 12, further comprising at least one of:

applying an ENIG process to surface plate a layer of nickel and a layer of gold over the layer of metal of the flexible metal clad; and

accomplishing all of the aligning of the N-designated mask, the forming of the N-type conduits, the aligning of the P-designated mask, and the forming of the P-type conduits within a same vacuum system while continuing to maintain a vacuum.

19. A method of producing a flexible thermoelectric device comprising:

drilling a plurality of P-designated contact holes through a flexible coverlay each corresponding to a P-type conduit of a plurality of P-type conduits directly on top of a lower conduction layer of the flexible thermoelectric device, and a plurality of N-designated contact holes through the flexible coverlay each corresponding to an N-type conduit of a plurality of N-type conduits directly on top of the lower conduction layer, the flexible coverlay comprising a layer of adhesive under an internal dielectric layer;

aligning the plurality of P-type conduits and the plurality of N-type conduits under the flexible coverlay such that the each P-designated contact hole of the flexible coverlay is directly above one of the P-type conduits and the each N-designated contact hole of the flexible coverlay is directly above one of the N-type conduits,

wherein each P-type conduit is electrically connected to one of the N-type conduits through the lower conduction layer directly above a lower dielectric layer of the flexible thermoelectric device;

laminating the flexible coverlay on top of the lower conduction layer by pressing the flexible coverlay against the lower conduction layer such that;

the layer of adhesive deforms and fills a space around the each of the P-type conduits and each of the N-type conduits, and

the flexible coverlay is attached to the lower conduction layer through the layer of adhesive;

aligning the flexible coverlay under an upper patterned screen, wherein the upper patterned screen comprises a plurality of first areas corresponding to the plurality of P-designated contact holes and the plurality of N-designated contact holes, and a plurality of second areas corresponding to a plurality of upper electrically conductive leads;

screen printing an upper conduction layer of the flexible thermoelectric device on top of and through the flexible coverlay by pressing a conductive paste through the upper patterned screen such that;

the conductive paste penetrates the each P-designated contact hole to form an electrically conductive contact coupled to the top of a corresponding one P-type conduit,

the conductive paste penetrates the each N-designated contact hole to form another electrically conductive contact coupled to the top of a corresponding one N-type conduit, and

the conductive paste at each second area forms an upper electrically conductive lead connecting a pair of electrically conductive contacts;

thermally insulating the each of the plurality of P-type conduits and the each of the plurality of N-type conduits so that a heat energy flows vertically through the conduit without leaking to other conduits on the sides; and

sealing and protecting the flexible thermoelectric device with an upper dielectric layer,

wherein the plurality of P-type conduits and the plurality of N-type conduits are electrically connected in series.

20. The method of claim 19, further comprising at least one of:

aligning a lower patterned mask comprising a plurality of third areas corresponding to a plurality of electrically conductive pads and a plurality of lower electrically conductive leads on top of a flexible metal clad, the flexible metal clad comprising a layer of metal directly on top of the lower dielectric layer; and

forming, in accordance with the plurality of first areas of the aligned lower patterned mask, the lower conduction layer of the flexible thermoelectric device in which;

the plurality of electrically conductive pads comprises a plurality of N-designated conductive pads and a plurality of P-designated conductive pads disposed directly across a surface of the lower dielectric layer,

each of the plurality of lower electrically conductive leads connects a pair of a neighboring N-designated conductive pad and a P-designated conductive pad,

the each of the plurality of lower electrically conductive leads extends between the N-designated conductive pad and the P-designated conductive pad of the corresponding pair across the surface of the lower dielectric layer, parallel to a length of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair, and

the each of the plurality of lower electrically conductive leads is narrower in width compared to a width of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair, the width of both the N-designated conductive pad and the P-designated conductive pad of the corresponding pair being a dimension perpendicular to the length thereof.