PIEZOELECTRIC ACOUSTIC MEMS TRANSDUCER AND FABRICATION METHOD THEREOF
First Claim
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1. A piezoelectric MEMS transducer, comprising:
- a body of semiconductor material having a central axis and a peripheral area, the body including;
a plurality of beams extending transversely to the central axis and each having a first end and a second end, the first ends of the beams being coupled to the peripheral area of the body and the second ends facing the central axis;
a membrane extending transversely to the central axis and underneath the plurality of beams; and
a pillar extending parallel to the central axis and rigid with respect to the second ends of the beams and the membrane; and
a plurality of piezoelectric sensing elements arranged on the plurality of beams.
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Abstract
A piezoelectric MEMS transducer formed in a body of semiconductor material, which has a central axis and a peripheral area and comprises a plurality of beams, transverse to the central axis and having a first end, coupled to the peripheral area of the body, and a second end, facing the central axis; a membrane, transverse to the central axis and arranged underneath the plurality of beams; and a pillar, parallel to the central axis and rigid with the second end of the beams and to the membrane. The MEMS transducer further comprises a plurality of piezoelectric sensing elements arranged on the plurality of beams.
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Citations
25 Claims
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1. A piezoelectric MEMS transducer, comprising:
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a body of semiconductor material having a central axis and a peripheral area, the body including; a plurality of beams extending transversely to the central axis and each having a first end and a second end, the first ends of the beams being coupled to the peripheral area of the body and the second ends facing the central axis; a membrane extending transversely to the central axis and underneath the plurality of beams; and a pillar extending parallel to the central axis and rigid with respect to the second ends of the beams and the membrane; and a plurality of piezoelectric sensing elements arranged on the plurality of beams. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. An electronic device comprising:
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a piezoelectric MEMS transducer that includes; a body of semiconductor material having a central axis (S) and a peripheral area, the body including; a plurality of beams extending transversely to the central axis and each having a first end and a second end, the first ends of the beams being coupled to the peripheral area of the body and the second ends facing the central axis; a membrane extending transversely to the central axis and underneath the plurality of beams; and a pillar extending parallel to the central axis and rigid with respect to the second ends of the beams and the membrane; and a plurality of piezoelectric sensing elements arranged on the plurality of beams; a signal-processing block coupled to the transducer; a microprocessor, coupled to the signal-processing block; a memory coupled to the microprocessor; and an input/output unit, coupled to the microprocessor. - View Dependent Claims (16, 17)
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18. A method for fabricating a MEMS transducer, comprising:
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forming, in a body of semiconductor material, a membrane having a first and a second membrane surface; forming a pillar of semiconductor material, projecting transversely to the first membrane surface; forming a plurality of beams, extending in a direction transverse to the pillar and on the membrane, the beams each having a first end and a second end, the first ends of the beams being coupled to a peripheral area of the body and the second ends being fixed with respect to the pillar; and forming a plurality of piezoelectric sensing elements on the plurality of beams. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification