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PIEZOELECTRIC ACOUSTIC MEMS TRANSDUCER AND FABRICATION METHOD THEREOF

  • US 20190327562A1
  • Filed: 04/19/2019
  • Published: 10/24/2019
  • Est. Priority Date: 04/20/2018
  • Status: Active Grant
First Claim
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1. A piezoelectric MEMS transducer, comprising:

  • a body of semiconductor material having a central axis and a peripheral area, the body including;

    a plurality of beams extending transversely to the central axis and each having a first end and a second end, the first ends of the beams being coupled to the peripheral area of the body and the second ends facing the central axis;

    a membrane extending transversely to the central axis and underneath the plurality of beams; and

    a pillar extending parallel to the central axis and rigid with respect to the second ends of the beams and the membrane; and

    a plurality of piezoelectric sensing elements arranged on the plurality of beams.

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