STRETCHABLE ULTRASONIC TRANSDUCER DEVICES
First Claim
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1. A conformable piezoelectric transducer array, comprising:
- a silicone elastomer substrate and a silicone elastomer superstrate;
a plurality of piezoelectric transducer elements disposed between the substrates and superstrate;
a first electrical interconnect layer electrically interconnecting a first surface of the transducer elements adjacent to the substrate; and
a second electrical interconnect layer electrically interconnecting a second surface of the transducer elements adjacent to the superstrate.
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Abstract
A conformable piezoelectric transducer array for performing ultrasound or the like includes a silicone elastomer substrate and a silicone elastomer superstrate. A plurality of piezoelectric transducer elements are disposed between the substrate and superstrate. A first electrical interconnect layer electrically interconnects a first surface of the transducer elements adjacent to the substrate and a second electrical interconnect layer electrically interconnecting a second surface of the transducer elements adjacent to the superstrate.
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Citations
29 Claims
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1. A conformable piezoelectric transducer array, comprising:
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a silicone elastomer substrate and a silicone elastomer superstrate; a plurality of piezoelectric transducer elements disposed between the substrates and superstrate; a first electrical interconnect layer electrically interconnecting a first surface of the transducer elements adjacent to the substrate; and a second electrical interconnect layer electrically interconnecting a second surface of the transducer elements adjacent to the superstrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of forming a conformable piezoelectric transducer array, comprising:
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bonding each of a plurality of piezoelectric transducer elements to a conductive vibration damping backing element; patterning a plurality of electrical interconnect sheets to define a plurality of patterned sheets each having a patterned island and bridge structure that includes a plurality of islands electrically interconnected by bridges; transfer printing first and second ones of the patterned sheets to a silicone elastomer substrate and a silicone elastomer superstrate, respectively. bonding a surface of each of the piezoelectric transducer elements to the transferred pattern on the substrate; bonding a surface of each of the conductive damping backing elements to the transferred patterned on the superstrate; filling gaps between the substrate and the superstrate with silicone elastomer material. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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22. A method of monitoring a subject using ultrasound, comprising:
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attaching a conformable piezoelectric transducer array having a plurality of piezoelectric transducer elements on a surface of a subject by van der Waals alone such that the conformable piezoelectric transducer array conforms to a shape of the surface; transmitting ultrasound waves into the subject using the array; receiving ultrasound waves from the subject using the array; and displaying an indication of the received ultrasound waves. - View Dependent Claims (23, 24, 25, 26, 27, 28, 29)
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Specification