MICROFLUIDIC CELL AND METHOD FOR THE PRODUCTION THEREOF

• US 20190329252A1
• Filed: 04/26/2019
• Published: 10/31/2019
• Est. Priority Date: 04/27/2018
• Status: Abandoned Application

• Current Assignee: Schott AG (Carl-Zeiss-Stiftung)
• Original Assignee: Schott AG (Carl-Zeiss-Stiftung)
• Inventors: Esemann, Hauke, Mangold, Stephanie, Roters, Andreas, Ortner, Andreas, Heiss-Chouquet, Markus, Wagner, Fabian, Hiller, Vanessa, Brueckbauer, Laura
• Application Number:
  US16/396,291
• Publication Number:
  US 20190329252A1
• Time in Patent Office: Days
• CPC Class Codes: B01L 2200/0689 Sealing
• CPC Class Codes: B01L 2200/12 Specific details about manufacturing devices
• CPC Class Codes: B01L 2300/0887 Laminated structure
• CPC Class Codes: B01L 2300/12 Specific details about materials
• CPC Class Codes: B01L 3/502707 characterised by the manufacture of the container or its components by shaping or joining plastic parts B29C59/00, B29C65/00; by laminating B32B37/00; manufacture of microstructural devices in general B81C
• CPC Class Codes: B01L 3/502715 characterised by interfacing components, e.g. fluidic, electrical, optical or mechanical interfaces
• CPC Class Codes: B81C 1/00047 Cavities
• CPC Class Codes: B81C 1/00119 Arrangement of basic structures like cavities or channels, e.g. suitable for microfluidic systems
• CPC Class Codes: B81C 2203/0172 Seals

Abstract

A method for the production of microfluidic cells using a disc-shaped glass element is provided. The disc-shaped glass element has a thickness of at most 700 micrometers is structured in such a way that it has at least one opening. The opening connects the two opposite-lying, parallel side faces of the glass element. The side faces are attached to a glass part so that the opening is sealed by the two glass parts to form a microfluidic cell having a cavity enclosed therein. The cavity is suitable for the conveyance of fluids. The attachment of the glass element to at least one of the two glass parts is produced by an adhesive that is applied onto the side face of the glass element. During application of the adhesive, the at least one opening in the glass element is left free of adhesive.

Claims

1. A method for the production of a microfluidic cell, comprising:

structuring a glass element that has a thickness of at most 700 micrometers to have an opening that connects two opposite-lying parallel side faces of the glass element; and

attaching a first glass part to a first face of the two side faces and a second glass part to a second face of the two side faces to seal the opening so that a cavity that is enclosed between the two glass parts, wherein the cavity is configured to convey fluids,

wherein the step of attaching at least one of the first and second glass parts comprises using an adhesive in such a manner that the opening is left free of the adhesive.

2. The method of claim 1, wherein the step of using the adhesive comprises applying the adhesive to at least one of the two faces of the glass element so that the opening is left free of adhesive.

3. The method of claim 1, wherein the step of structuring glass element to have the opening comprises structuring an elongated opening so that the cavity is a fluid-carrying channel.

4. The method of claim 3, wherein the step of using the adhesive comprises printing onto at least one of the two side faces, leaving out a region extending over the elongated opening, wherein the region is larger than the opening so that an edge of the adhesive is set back from an edge of the opening.

5. The method of claim 1, wherein the step of using the adhesive comprises applying the adhesive so that an edge of the opening remains free of adhesive.

6. The method of claim 1, wherein the step of structuring glass element to have the opening comprises:

directing a laser beam of an ultrashort-pulse laser onto one of the two side faces and concentrating the laser beam using a focusing optics to form an elongated focus in the glass element so that a filament-shaped damage insertion is produced in the glass element, wherein the filament-shaped damage insertion has a longitudinal direction that extends perpendicularly between the two side faces; and

exposing, after forming the filament-shaped damage insertion, the glass element to an etching medium to remove glass from the glass element at a removal rate of less than 8 μ

m per hour to widens the filament-shaped damage insertion to form the opening.

7. The method of claim 6, wherein the etching medium inserts rounded dome-shaped depressions in walls of the opening.

8. The method of claim 6, further comprising repeating the step of directing the laser beam to produce a plurality of filament-shaped damage insertions adjacent to one another, wherein the step of exposing the glass element to the etching medium comprises etching the plurality of filament-shaped damage insertions until adjacent insertions are joined together to form the opening.

9. The method of claim 8, wherein ridges remain between the plurality of filament-shaped damage insertions after the exposing step, the ridges extending parallel to the longitudinal direction.

10. The method of claim 1, further comprising:

directing a laser beam of an ultrashort-pulse laser onto one of the two side faces and concentrating the laser beam using a focusing optics to form an elongated focus in the glass element so that a filament-shaped damage insertion is produced in the glass element, wherein the filament-shaped damage insertion has a longitudinal direction that extends perpendicularly from one of the two side faces and terminates in the glass element;

repeating the step of directing the laser beam to produce a plurality of filament-shaped damage insertions adjacent to one another; and

exposing, after forming the plurality of filament-shaped damage insertions, the glass element to an etching medium to remove glass from the glass element at a removal rate of less than 8 μ

m per hour until adjacent insertions are joined together to form a recess that is sealed on one side by the glass element.

11. The method of claim 10, wherein ridges remain between the plurality of filament-shaped damage insertions after the exposing step, the ridges extending parallel to the longitudinal direction.

12. The method of claim 1, wherein at least one of the first and second glass parts comprises a second opening, wherein the first and second glass parts are attached to the glass element in such a way that the second opening is in fluid communication with the opening.

13. The method of claim 1, wherein the step of structuring the glass element to have the opening comprises structuring to have at least two adjacently extending openings, the at least two openings being separated from each other by a crosspiece, wherein the cross piece has a minimum width of at most 400 μ

m, and wherein the crosspiece is bonded with the adhesive to the at least one of the first and second glass parts.

14. The method of claim 1, wherein the adhesive is a photocurable adhesive, the step of attaching further comprising irradiating the adhesive through one of the first and second glass parts to harden the adhesive.

15. A microfluidic cell, comprising:

a disc-shaped glass element with a thickness of at most 700 micrometers and an opening that connects two opposite-lying, parallel side faces of the glass element;

a first glass part attached to a first face of the two side faces;

a second glass part attached to a second face of the two side faces;

a cavity defined by the opening being sealed by the first and second glass parts, the cavity being suitable for fluid conveyance; and

dome shaped depressions in at least part of a wall the opening.

16. The microfluidic cell of claim 15, further comprising:

an adhesive attaching at least one of the first and second glass parts to the glass element; and

a region that is left free of the adhesive around the opening so that a part of the cavity is formed by the first and second glass parts.

17. The microfluidic cell of claim 15, wherein the dome shaped depressions have a depth, on average, of less than 5 μ

m and/or have a transverse measurement, on average, of 5 μ

m to 20 μ

m.

18. The microfluidic cell of claim 15, wherein the opening has an edge that comprises a plurality of parallel, adjacently extending, laterally open channels with a ridge that extends parallel to the longitudinal direction between adjacent open channels.

19. The microfluidic cell of claim 15, further comprising a second opening and a crosspiece, the crosspiece being between the opening and the second opening, the crosspiece having a minimum width of less than 1 mm and having a parameter G of at least 10 mm⁻

1/3 and of at most 400 mm<sup>−

1/3</sup>, wherein the parameter G is specified by;

20. The microfluidic cell of claim 15, further comprising a recess in one of the glass element, the first glass part, and the second glass part, wherein the recess is open on one side and is in fluid communication with the cavity.

21. A microfluidic cell, comprising a stack of at least two disc-shaped glass elements that are attached to each other and two glass parts that are attached to the stack and between which the stack is arranged, wherein the glass elements each have an opening that is sealed by attachment of the bordering glass element or the glass parts to form a cavity configured to convey fluids, wherein the openings in the glass elements communicate with one another, and wherein the glass elements and the glass parts are attached to one another by adhesive layers that leave the openings free of adhesive.

22. The microfluidic cell of claim 21, further comprising dome shaped depressions in at least part of a wall the opening and/or an edge of the opening that comprises a plurality of parallel, adjacently extending, laterally open channels with a ridge that extends parallel to the longitudinal direction between adjacent open channels.

23. An intermediate product for producing a microfluidic cell, comprising:

a disc-shaped glass element with a thickness of at most 700 micrometers and an opening that connects two opposite-lying, parallel side faces of the glass element; and

adhesive on each of the two side faces, the opening being free of the adhesive.

24. The intermediate product of claim 23, further comprising dome shaped depressions in at least part of a wall the opening and/or an edge of the opening that comprises a plurality of parallel, adjacently extending, laterally open channels with a ridge that extends parallel to the longitudinal direction between adjacent open channels.