ACTUATING AND SENSING MODULE
First Claim
1. An actuating and sensing module, comprising:
- a first substrate with at least one control circuit disposed thereon;
a second substrate having a gas inlet and a gas outlet, wherein the second substrate and the first substrate are stacked on each other as a gas flow channel is formed therebetween, wherein the gas inlet, the gas flow channel and the gas outlet are in communication with each other to form a gas flow path;
at least one actuating device disposed in the gas outlet of the second substrate and electrically connected to the at least one control circuit; and
at least one sensor disposed in the gas flow path and misaligned with the gas inlet, wherein the sensor is spaced apart from the actuating device and is electrically connected to the at least one control circuit;
wherein the actuating device is enabled to drive gas to flow from the exterior of the actuating and sensing module into the gas flow channel through the gas inlet, and the gas flows through the sensor and is discharged out through the gas outlet, so that the gas circulated in the gas flow path is monitored by the sensor.
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Accused Products
Abstract
An actuating and sensing module includes a first substrate, a second substrate, an actuating device and a sensor. The first and second substrates are stacked on each other as a gas flow channel is formed therebetween. The gas inlet, the gas flow channel and the gas outlet are in communication with each other to define a gas flow path. The actuating device is disposed in the gas outlet of the second substrate and electrically connected to a control circuit to obtain driving power. The sensor is disposed in the gas flow path and misaligned with the gas inlet. The sensor is spaced apart from the actuating device and is electrically connected to the control circuit. Being driven by the actuating device, the gas is transported from the outside into the gas flow path and monitored by the sensor.
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Citations
18 Claims
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1. An actuating and sensing module, comprising:
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a first substrate with at least one control circuit disposed thereon; a second substrate having a gas inlet and a gas outlet, wherein the second substrate and the first substrate are stacked on each other as a gas flow channel is formed therebetween, wherein the gas inlet, the gas flow channel and the gas outlet are in communication with each other to form a gas flow path; at least one actuating device disposed in the gas outlet of the second substrate and electrically connected to the at least one control circuit; and at least one sensor disposed in the gas flow path and misaligned with the gas inlet, wherein the sensor is spaced apart from the actuating device and is electrically connected to the at least one control circuit; wherein the actuating device is enabled to drive gas to flow from the exterior of the actuating and sensing module into the gas flow channel through the gas inlet, and the gas flows through the sensor and is discharged out through the gas outlet, so that the gas circulated in the gas flow path is monitored by the sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An actuating and sensing module, comprising:
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at least one first substrate with at least one control circuit disposed thereon; at least one second substrate having at least one gas inlet and at least one gas outlet, wherein the second substrate and the first substrate are stacked on each other as at least one gas flow channel is formed therebetween, wherein the gas inlet, the gas flow channel and the gas outlet are in communication with each other to form at least one gas flow path; at least one actuating device disposed in the gas outlet of the second substrate and electrically connected to the at least one control circuit; and at least one sensor disposed in the gas flow path and misaligned with the gas inlet, wherein the sensor is spaced apart from the at least one actuating device and is electrically connected to the at least one control circuit; wherein the actuating device is enabled to drive at least one gas to flow from the exterior of the actuating and sensing module into the gas flow channel through the gas inlet, and the gas flows through the sensor and is discharged out through the gas outlet, so that the gas circulated in the gas flow path is monitored by the sensor.
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Specification