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ACTUATING AND SENSING MODULE

  • US 20190331558A1
  • Filed: 02/14/2019
  • Published: 10/31/2019
  • Est. Priority Date: 04/27/2018
  • Status: Active Grant
First Claim
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1. An actuating and sensing module, comprising:

  • a first substrate with at least one control circuit disposed thereon;

    a second substrate having a gas inlet and a gas outlet, wherein the second substrate and the first substrate are stacked on each other as a gas flow channel is formed therebetween, wherein the gas inlet, the gas flow channel and the gas outlet are in communication with each other to form a gas flow path;

    at least one actuating device disposed in the gas outlet of the second substrate and electrically connected to the at least one control circuit; and

    at least one sensor disposed in the gas flow path and misaligned with the gas inlet, wherein the sensor is spaced apart from the actuating device and is electrically connected to the at least one control circuit;

    wherein the actuating device is enabled to drive gas to flow from the exterior of the actuating and sensing module into the gas flow channel through the gas inlet, and the gas flows through the sensor and is discharged out through the gas outlet, so that the gas circulated in the gas flow path is monitored by the sensor.

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