MEASUREMENT APPARATUS, INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND STORAGE MEDIUM

• US 20190331600A1
• Filed: 07/09/2019
• Published: 10/31/2019
• Est. Priority Date: 01/13/2017
• Status: Abandoned Application

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Kuroki, Yukie
• Application Number:
  US16/506,197
• Publication Number:
  US 20190331600A1
• Time in Patent Office: Days
• CPC Class Codes: G01N 2021/557 Detecting specular reflective parts on sample
• CPC Class Codes: G01N 21/55 Specular reflectivity
• CPC Class Codes: G01N 21/57 Measuring gloss
• CPC Class Codes: G01N 2201/061 Sources

Abstract

The present invention provides a measurement apparatus comprising: an irradiation unit configured to obliquely irradiate a surface with light; a detection unit configured to detect an intensity distribution of reflected light from the surface; a processing unit configured to determine a BRDF of the surface based on the intensity distribution, and generate a first image representing the BRDF as a two-dimensional distribution and a second image representing a one-dimensional distribution obtained by projecting the two-dimensional distribution of the BRDF; and a display unit configured to display the first image and the second image, wherein the processing unit is configured to generate the first image representing the BRDF as the two-dimensional distribution in which an ordinate axis and an abscissa axis are two directions respectively orthogonal to an optical axis of specular light.

Claims

1. A measurement apparatus comprising:

an irradiation unit configured to obliquely irradiate a surface with light;

a detection unit configured to detect an intensity distribution of reflected light from the surface;

a processing unit configured to determine a BRDF of the surface based on the intensity distribution, and generate a first image representing the determined BRDF as a two-dimensional distribution and a second image representing a one-dimensional distribution obtained by projecting the two-dimensional distribution of the determined BRDF in a predetermined direction; and

a display unit configured to display the first image and the second image generated by the processing unit,

wherein the processing unit is configured to generate the first image representing the BRDF as the two-dimensional distribution in which an ordinate axis and an abscissa axis are two directions respectively orthogonal to an optical axis of specular light.

2. The measurement apparatus according to claim 1, wherein the processing unit is configured to generate the first image and the second image within a range where reflection angles of the reflected light is greater than 0°

and less than 90°

.

3. The measurement apparatus according to claim 1, wherein the processing unit is configured to generate the first image representing the BRDF as the two-dimensional distribution in which one of the ordinate axis and the abscissa axis is an irradiation angle and the other of the ordinate axis and the abscissa axis is an direction angle.

4. The measurement apparatus according to claim 1, wherein the processing unit is configured to generate the first image representing the BRDF as a two-dimensional gradation distribution.

5. The measurement apparatus according to claim 1, wherein the processing unit is configured to generate the second image by integrating the two-dimensional distribution of the BRDF in the predetermined direction or extracting representative values of the two-dimensional distribution of the BRDF in the predetermined direction.

6. The measurement apparatus according to claim 1, wherein the processing unit is configured to generate the second image by obtaining a distribution on a line crossing the two-dimensional distribution of the BRDF.

7. The measurement apparatus according to claim 1, wherein the processing unit is configured to generate the first image representing the BRDF as a two-dimensional gradation distribution with a change in color.

8. The measurement apparatus according to claim 1, wherein the processing unit is configured to generate the first image representing the BRDF as two-dimensional gradation distribution with a change in pattern.

9. The measurement apparatus according to claim 1, wherein the processing unit is configured to determine at least one of a mirror gloss, a haze, a DOI, an image clarity, a reflectance, and an undulation of the surface based on the intensity distribution, and cause the display unit to display the at least one.

10. The measurement apparatus according to claim 1, further comprising a housing provided with the irradiation unit and the detection unit,

wherein the display unit is provided outside the housing.

11. The measurement apparatus according to claim 1, wherein the processing unit is configured to generate the first image such that a part of the BRDF corresponding to an intensity of a specular light is arranged in a central portion of the first image.

12. An information processing apparatus that processes information of an intensity distribution of reflected light from a surface, the reflected light being obtained by obliquely irradiating the surface with light, comprising:

a first processing unit configured to determine a BRDF of the surface based on the information;

a second processing unit configured to generate a first image representing the determined BRDF as a two-dimensional distribution and a second image representing a one-dimensional distribution obtained by projecting the two-dimensional distribution of the determined BRDF in a predetermined direction; and

an output unit configured to output the first image and the second image to a display unit,

wherein the second processing unit is configured to generate the first image representing the BRDF as the two-dimensional distribution in which an ordinate axis and an abscissa axis are two directions respectively orthogonal to an optical axis of specular light.

13. An information processing method of processing information of an intensity distribution of reflected light from a surface, the reflected light being obtained by obliquely irradiating the surface with light, characterized by comprising:

a first step of determining a BRDF of the surface based on the information;

a second step of generating a first image representing the determined BRDF as a two-dimensional distribution and a second image representing a one-dimensional distribution obtained by projecting the two-dimensional distribution of the determined BRDF in a predetermined direction; and

a third step of outputting the first image and the second image to a display unit,

wherein the second step generates the first image representing the BRDF as the two-dimensional distribution in which an ordinate axis and an abscissa axis are two directions respectively orthogonal to an optical axis of specular light.

14. A non-transitory computer-readable storage medium storing a program for causing a computer to execute each step in an information processing method defined in claim 13.

15. A measurement apparatus comprising:

an irradiation unit configured to obliquely irradiate a surface with light;

a detection unit configured to detect an intensity distribution of reflected light from the surface;

a processing unit configured to determine a two-dimensional distribution of a BRDF of the surface based on the intensity distribution, and generate an image representing a one-dimensional distribution obtained by projecting the two-dimensional distribution of the BRDF in a predetermined direction; and

a display unit configured to display the image generated by the processing unit.

16. The measurement apparatus according to claim 15, wherein the processing unit is configured to generate the image by integrating the two-dimensional distribution of the BRDF in the predetermined direction or extracting representative values of the two-dimensional distribution of the BRDF in the predetermined direction.

17. The measurement apparatus according to claim 15, wherein the processing unit is configured to generate the image by obtaining a distribution on a line crossing the two-dimensional distribution of the BRDF.

18. An information processing apparatus that processes information of an intensity distribution of reflected light from a surface, the reflected light being obtained by obliquely irradiating the surface with light, characterized by comprising:

a first processing unit configured to determine a two-dimensional distribution of a BRDF of the surface based on the information;

a second processing unit configured to generate an image representing a one-dimensional distribution obtained by projecting the two-dimensional distribution of the BRDF in a predetermined direction; and

an output unit configured to output the image to a display unit.

19. An information processing method of processing information of an intensity distribution of reflected light from a surface, the reflected light being obtained by obliquely irradiating the surface with light, characterized by comprising:

a first step of determining a two-dimensional distribution of a BRDF of the surface based on the information;

a second step of generating an image representing a one-dimensional distribution obtained by projecting the two-dimensional distribution of the determined BRDF in a predetermined direction; and

a third step of outputting the image to a display unit.

20. A non-transitory computer-readable storage medium storing a program for causing a computer to execute a step in an information processing method defined in claim 19.