NANOTUBE ARRAY GAS SENSOR

• US 20190331625A1
• Filed: 04/29/2019
• Published: 10/31/2019
• Est. Priority Date: 04/30/2018
• Status: Active Grant

• Current Assignee: Hong Kong University of Science and Technology
• Original Assignee: Hong Kong University of Science and Technology
• Inventors: Fan, Zhiyong, Chen, Jiaqi
• Granted Patent: US 11,467,109 B2
• Time in Patent Office: Days
• CPC Class Codes: G01N 27/127 comprising nanoparticles
• CPC Class Codes: G01N 33/0031 comprising two or more sensors, e.g. a sensor array electrochemical electrode arrays G01N27/27
• CPC Class Codes: H05K 1/11 Printed elements for providing electric connections to or between printed circuits
• CPC Class Codes: H05K 1/181 associated with surface mounted components
• CPC Class Codes: H05K 2201/10151 Sensor

Abstract

Aspects describe a nanotube array gas sensor, and methods to manufacture and use the same. In one example, the nanotube array gas sensor comprises an insulator template including an array of parallel aligned, open-ended nanotubes; a sensing material deposited on at least interior surfaces of the nanotubes; and catalyst nanoparticles distributed on the sensing material. An electronic controller activates electrodes made of different conductor materials in order to obtain multiple measurements of electrical resistance across the insulator template. The electrical resistance measurements can be compared to electrical resistance profiles in order to determine types and concentrations of gases in the nanotube array gas sensor.

Claims

1. A nanotube array gas sensor, comprising:

an insulator template comprising an array of parallel aligned, open-ended nanotubes;

a sensing material deposited on at least interior surfaces of the parallel aligned, open-ended nanotubes of the array of the insulator template;

catalyst nanoparticles distributed on the sensing material;

at least one first top electrode positioned on at least a first portion of a top of the insulator template, wherein the at least one first top electrode comprises a first conductor material;

at least one second top electrode positioned on at least a second portion of the top of the insulator template, wherein the at least one second top electrode comprises a second conductor material;

at least one bottom electrode positioned on at least a portion of a bottom of the insulator template; and

an electronic controller coupled with the at least one first top electrode, the at least one second top electrode, and the at least one bottom electrode, and adapted to measure electrical resistances of the insulator template, the electrical resistances of the insulator template comprising a first electrical resistance between the at least one first top electrode and the at least one bottom electrode, and a second electrical resistance between the at least one second top electrode and the at least one bottom electrode, wherein the first electrical resistance and the second electrical resistance indicate a type and a concentration of a gas in the nanotube array gas sensor.

2. The nanotube array gas sensor of claim 1, wherein the insulator template comprises Anodic Aluminum Oxide (AAO).

3. The nanotube array gas sensor of claim 1, wherein the array of parallel aligned, open-ended nanotubes has a pitch of about 500 nanometers (nm), a pore size of about 300-350 nm, and a thickness of about 30-50 micrometers.

4. The nanotube array gas sensor of claim 1, wherein the sensing material comprises Tin Oxide (SnO2).

5. The nanotube array gas sensor of claim 1, wherein the catalyst nanoparticles comprise Platinum (Pt) nanoparticles.

6. The nanotube array gas sensor of claim 1, wherein the first conductor material and the second conductor material comprise at least one of Gold (Au), Platinum (Pt), Nickel (Ni) or Indium Tin Oxide (ITO).

7. The nanotube array gas sensor of claim 1, wherein the first conductor material comprises Gold (Au) and the second conductor material comprises Platinum (Pt), and further comprising:

at least one third top electrode positioned on at least a third portion of the top of the insulator template, wherein the at least one third top electrode comprises Nickel (Ni), and at least one fourth top electrode positioned on at least a fourth portion of the top of the insulator template, wherein the at least one fourth top electrode comprises Indium Tin Oxide (ITO).

8. The nanotube array gas sensor of claim 1, wherein the at least one bottom electrode comprises a common ground electrode.

9. The nanotube array gas sensor of claim 1, further comprising a printed circuit board (PCB), wherein the at least one first top electrode, the at least one second top electrode, and the at least one bottom electrode are electrically coupled with electrical attachment points on the PCB, and wherein the PCB comprises at least one airflow orifice.

10. The nanotube array gas sensor of claim 1, further comprising a computer readable medium having stored therein electrical resistance profiles corresponding to one or more gas types, gas concentrations, or gas mixtures, wherein the electronic controller is adapted to compare measured electrical resistances to the electrical resistance profiles in order to determine a gas type, gas concentration, or gas mixture pertaining to the gas in the nanotube array gas sensor.

11. A method of manufacturing a nanotube array gas sensor, comprising:

fabricating an insulator template comprising an array of parallel aligned, open-ended nanotubes;

depositing a sensing material on at least interior surfaces of the parallel aligned, open-ended nanotubes of the insulator template;

distributing catalyst nanoparticles on at least some of the sensing material;

positioning at least one first top electrode on at least a first portion of a top of the insulator template, wherein the at least one first top electrode comprises a first conductor material;

positioning at least one second top electrode on at least a second portion of the top of the insulator template, wherein the at least one second top electrode comprises a second conductor material;

positioning at least one bottom electrode on at least a portion of a bottom of the insulator template; and

coupling an electronic controller with the electrodes, wherein the electronic controller is adapted to measure electrical resistances of the insulator template, the electrical resistances of the insulator template comprising a first electrical resistance between the at least one first top electrode and the at least one bottom electrode, and a second electrical resistance between the at least one second top electrode and the at least one bottom electrode, the first and second electrical resistances indicating type and concentration of gas in the nanotube array gas sensor.

12. The method of manufacturing a nanotube array gas sensor of claim 11, wherein the insulator template comprises Anodic Aluminum Oxide (AAO), the sensing material comprises Tin Oxide (SnO2), and the catalyst nanoparticles comprise Platinum (Pt) nanoparticles.

13. The method of manufacturing a nanotube array gas sensor of claim 11, wherein the array of parallel aligned, open-ended nanotubes has a pitch of about 500 nanometers (nm), a pore size of about 300-350 nm, and a thickness of about 30-50 micrometers.

14. The method of manufacturing a nanotube array gas sensor of claim 11, wherein the first conductor material comprises Gold (Au) and the second conductor material comprises Platinum (Pt), and further comprising:

positioning at least one third top electrode on at least a third portion of the top of the insulator template, wherein the at least one third top electrode comprises Nickel (Ni); and

positioning at least one fourth top electrode on at least a fourth portion of the top of the insulator template, wherein the at least one fourth top electrode comprises Indium Tin Oxide (ITO).

15. The method of manufacturing a nanotube array gas sensor of claim 11, further comprising affixing the insulator template on a printed circuit board (PCB), and electrically coupling the electrodes with electrical attachment points on the PCB, wherein the PCB comprises one or more airflow orifices.

16. The method of manufacturing a nanotube array gas sensor of claim 11, further comprising storing electrical resistance profiles corresponding to one or more gas types, gas concentrations, or gas mixtures on a computer readable medium for use by the electronic controller, wherein the electronic controller is adapted to compare measured electrical resistances to the electrical resistance profiles in order to determine a gas type, gas concentration, or gas mixture of the gas in the nanotube array gas sensor.

17. A method, comprising:

obtaining, by an electronic controller of a nanotube array gas sensor, a first measurement of a first electrical resistance, wherein the first electrical resistance is between at least one first top electrode comprising a first conductor material positioned on at least a first portion of a top of an insulator template of the nanotube array gas sensor, and at least one bottom electrode positioned on at least a portion of a bottom of the insulator template; and

obtaining, by the electronic controller, a second measurement of a second electrical resistance, wherein the second electrical resistance is between at least one second top electrode comprising a second conductor material positioned on at least a second portion of the top of the insulator template, and the at least one bottom electrode; and

comparing at least the first and second measurements of the first and second electrical resistances to one or more stored electrical resistance profiles corresponding to at least one of one or more gas types, one or more gas concentrations, or one or more gas mixtures in order to determine at least one of a gas type, a gas concentration, or a gas mixture of a gas in the nanotube array gas sensor.

18. The method of claim 17, wherein the insulator template comprises:

an array of parallel aligned, open-ended nanotubes;

a sensing material deposited on at least interior surfaces of the parallel aligned, open-ended nanotubes of the array; and

catalyst nanoparticles distributed on the sensing material.

19. The method of claim 17, wherein the first conductor material comprises Gold (Au) and the second conductor material comprises Platinum (Pt), and further comprising:

obtaining, by the electronic controller, a third measurement of a third electrical resistance, wherein the third electrical resistance is between at least one third top electrode comprising Nickel (Ni) and positioned on at least a third portion of the top of the insulator template, and the at least one bottom electrode; and

obtaining, by the electronic controller, a fourth measurement of a fourth electrical resistance, wherein the fourth electrical resistance is between at least one fourth top electrode comprising Indium Tin Oxide (ITO) and positioned on at least a fourth portion of the top of the insulator template, and the at least one bottom electrode.

20. The method of claim 17, wherein the comparing at least the first and second measurements to the one or more stored electrical resistance profiles comprises extracting features from at least the first and second measurements, and comparing the features from at least the first and second measurements to features from the one or more stored electrical resistance profiles.