SCANNING PROBE MICROSCOPE AND LIGHT INTENSITY ADJUSTING METHOD

• US 20190331711A1
• Filed: 03/01/2019
• Published: 10/31/2019
• Est. Priority Date: 04/25/2018
• Status: Active Grant

• Current Assignee: Shimadzu Corporation
• Original Assignee: Shimadzu Corporation
• Inventors: WATANABE, Kazuma, FUJINO, Keita, IIDA, Eiji, HIRADE, Masato, YAMASAKI, Kenji, NAKAJIMA, Hideo, IKEDA, Yuichiro, ARAI, Hiroshi
• Granted Patent: US 10,598,691 B2
• Time in Patent Office: Days
• CPC Class Codes: G01Q 10/065 Feedback mechanisms, i.e. wherein the signal for driving the probe is modified by a signal coming from the probe itself
• CPC Class Codes: G01Q 20/02 by optical means
• CPC Class Codes: G01Q 30/04 Display or data processing devices
• CPC Class Codes: G01Q 30/18 Means for protecting or isolating the interior of a sample chamber from external environmental conditions or influences, e.g. vibrations or electromagnetic fields

Abstract

A scanning probe microscope includes a light source, a detector, a housing, an opening and closing door, an opening and closing sensor, a control unit, and the like. The opening and closing door is provided in the housing. The control unit 16 also functions as the light intensity change processing unit 164. In the scanning probe microscope, when the opening and closing sensor detects opening and closing of the opening and closing door, the light intensity change processing unit automatically changes the intensity of light irradiated from the light source based on a detection result of the opening and closing sensor. Therefore, it is possible to omit light intensity adjustment work performed manually by the user. As a result, the workability of the user when using the scanning probe microscope 1 can be improved.

Claims

1. A scanning probe microscope that acquires a surface image of a sample by causing a cantilever to scan along a surface of the sample, the scanning probe microscope comprising:

a light source configured to irradiate the cantilever with light;

a detector configured to receive reflected light from the cantilever;

a housing configured to house the light source and the detector therein;

an opening and closing door configured to open and close the housing;

an opening and closing sensor configured to detect opening and closing of the opening and closing door; and

a light intensity change processing unit configured to change an intensity of light irradiated from the light source based on a detection result of the opening and closing sensor.

2. The scanning probe microscope according to claim 1, wherein

when the opening and closing sensor detects that the opening and closing door is opened, the light intensity change processing unit sets an intensity of light irradiated from the light source to be lower than that when measurement of a sample is performed in a state where the opening and closing door is closed.

3. A light intensity adjusting method for a scanning probe microscope that causes a cantilever to scan along a surface of a sample, reflects light irradiated from a light source with the cantilever, and receives the reflected light with a detector to acquire a surface image of the sample, the light intensity adjusting method comprising:

a light intensity changing step for changing an intensity of light irradiated from the light source when an opening and closing door for opening and closing a housing that houses the light source and the detector therein is opened and closed.

4. The light intensity adjusting method according to claim 3, wherein

when the opening and closing door is opened, the light intensity changing step sets an intensity of light irradiated from the light source to be lower than that when measurement of a sample is performed with the opening and closing door closed.