GRATING WITH PLURALITY OF LAYERS
First Claim
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1. A grating, comprising:
- a first grating layer composed of a silicon material, and comprising a set of silicon structures separated by a first set of gaps; and
a second grating layer over the first grating layer and composed of a III-V material, the second solid state-material having a monocrystalline structure, and comprising a set of III-V structures separated by a second set of gaps.
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Abstract
A hybrid grating comprises a first grating layer composed of a first solid-state material, and a second grating layer over the first grating layer and composed of a second solid-state material, the second solid state-material being different than the first solid-state material and having a monocrystalline structure.
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11 Claims
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1. A grating, comprising:
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a first grating layer composed of a silicon material, and comprising a set of silicon structures separated by a first set of gaps; and a second grating layer over the first grating layer and composed of a III-V material, the second solid state-material having a monocrystalline structure, and comprising a set of III-V structures separated by a second set of gaps. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10)
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2. (canceled)
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3. (canceled)
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11-20. -20. (canceled)
Specification