METHOD FOR ADDING ASSIST FEATURES
First Claim
1. A method for adding Assist Features, comprising:
- Step 01, providing target patterns for OPC, selecting a rule in which only one Assist Feature can be added based on a Base AF rule, and establishing an Extra Assist Feature rule;
wherein the target patterns already has Assist Feature;
Step 02, making a global size-up of the target patterns, so that all sides of the target patterns extend outwards by a distance A;
wherein the distance A is a non-negative number, and the unit of the distance A is a unit of length;
Step 03, subtracting the distance value between the corresponding sides of the target patterns formatted under the Extra Assist Feature rule by a distance 2A based on the Extra Assist Feature rule; and
carrying out the corresponding adjustment on other parameters which are affected by the overall sizing of the target patterns formatted under the Extra Assist Feature rule based on a distance A;
Step 04, operating the Extra Assist Feature rule to generate a first Assist Feature;
Step 05, executing the Base AF rule on the target patterns, generating a second Assist Feature by using the first Assist Feature as a newly added reference feature, and superimposing the first Assist Feature, the second Assist Feature and the existing Assist Feature to form a final Assist Feature.
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Abstract
A method for adding Assist Feature comprises providing target patterns for OPC, selecting a rule in which only one Assist Feature can be added based on a Base AF rule, and establishing an Extra Assist Feature rule; making a global size-up of the target patterns, so that all sides of the target patterns extend outwards by a distance A; subtracting the distance value between the corresponding sides of the target patterns formatted under the Extra Assist Feature rule by a distance 2A based on the Extra Assist Feature rule; and carrying out the corresponding adjustment on other parameters which are affected by the overall sizing of the target patterns formatted under the Extra Assist Feature rule based on a distance A; operating the Extra Assist Feature rule to generate a first Assist Feature; executing the Base AF rule on the target patterns, generating a second Assist Feature by using the first Assist Feature as a newly-added reference feature, and superimposing the first Assist Feature, the second Assist Feature and the existing Assist Feature to form a final Assist Feature.
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Citations
8 Claims
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1. A method for adding Assist Features, comprising:
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Step 01, providing target patterns for OPC, selecting a rule in which only one Assist Feature can be added based on a Base AF rule, and establishing an Extra Assist Feature rule;
wherein the target patterns already has Assist Feature;Step 02, making a global size-up of the target patterns, so that all sides of the target patterns extend outwards by a distance A;
wherein the distance A is a non-negative number, and the unit of the distance A is a unit of length;Step 03, subtracting the distance value between the corresponding sides of the target patterns formatted under the Extra Assist Feature rule by a distance 2A based on the Extra Assist Feature rule; and
carrying out the corresponding adjustment on other parameters which are affected by the overall sizing of the target patterns formatted under the Extra Assist Feature rule based on a distance A;Step 04, operating the Extra Assist Feature rule to generate a first Assist Feature; Step 05, executing the Base AF rule on the target patterns, generating a second Assist Feature by using the first Assist Feature as a newly added reference feature, and superimposing the first Assist Feature, the second Assist Feature and the existing Assist Feature to form a final Assist Feature.
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2. The method for adding Assist Features of claim 1, wherein, in the Step 02, the distance A is less than ½
- of the minimum space allowed by the target patterns.
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3. The method for adding Assist Features of claim 1, wherein the Assist Features in the Rule-based Assist Feature and the Assist Features in the Extra Assist Feature rule are side bar Assist Features.
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4. The method for adding Assist Features of claim 1, wherein, in the Step 01 and before the Extra Assist Feature rule is established, the method further includes:
- establishing an initial Rule-based Assist Feature on the target patterns based on the Base AF rule;
in step 05, the method further comprises;
executing the Rule-based Assist Feature on the target patterns, generating a second Assist Feature by using the first Assist Feature, the initial Rule-based Assist Feature, the original input Assist Feature and the original input reference pattern as reference pattern;
the final Assist Feature is composed of the first Assist Feature, the second Assist Feature, the initial Rule-based Assist Feature and the original input Assist Feature.
- establishing an initial Rule-based Assist Feature on the target patterns based on the Base AF rule;
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5. The method for adding Assist Features of claim 4, wherein the initial Rule-based Assist Feature comprises side bar Assist Features and corner bar Assist Features.
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6. The method for adding Assist Features of claim 1, wherein the target patterns include contact/hole target patterns.
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7. The method for adding Assist Features of claim 1, wherein the Assist Feature is sub-resolution pattern.
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8. The method for adding Assist Features of claim 1, wherein, further comprises a Step between the Step 04 and the Step 05, the Step is, replacing the target patterns after global sizing-up with the target patterns in Step 01.
Specification