OPTIMAL WEIGHTED AVERAGING PRE-PROCESSING SCHEMES FOR LASER ABSORPTION SPECTROSCOPY
First Claim
1. A spectroscopic instrument comprising:
- at least one detector to collect a series of raw intensity measurement data points; and
a processor to;
calculate, based on a determination of whether detector noise or fluctuation noise dominates in the series of raw intensity measurement data points, a set of weighting coefficients for the raw intensity measurement data points, wherein greater weight is given to larger intensity raw measurement data points over smaller raw intensity measurement data points when detector noise dominates, and wherein greater weight is given to smaller intensity raw measurement data points over larger intensity raw measurement data points when fluctuation noise dominates; and
perform a weighted averaging upon the raw intensity measurement data points using the calculated set of weighting coefficients to output, from the spectroscopic instrument, a set of pre-processed measurement data that is characterized by reduced noise contributions.
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Abstract
A method of processing raw measurement data from a tunable diode laser absorption spectroscopy (TDLAS) tool or other spectroscopic instrument is provided that determines what types of noise (electronic or process flow) are present in the measurement. Based on that determination, the noise is reduced by performing a weighted averaging using weights selected according to the dominant type of noise present, or a general case is applied to determine weights where neither noise type is dominant. The method also involves performing continuous spectroscopy measurements with the tool, with the data and weighted averaging being constantly updated. Weighting coefficients may also be adjusted based on similarity or difference between time-adjacent traces.
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Citations
20 Claims
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1. A spectroscopic instrument comprising:
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at least one detector to collect a series of raw intensity measurement data points; and a processor to; calculate, based on a determination of whether detector noise or fluctuation noise dominates in the series of raw intensity measurement data points, a set of weighting coefficients for the raw intensity measurement data points, wherein greater weight is given to larger intensity raw measurement data points over smaller raw intensity measurement data points when detector noise dominates, and wherein greater weight is given to smaller intensity raw measurement data points over larger intensity raw measurement data points when fluctuation noise dominates; and perform a weighted averaging upon the raw intensity measurement data points using the calculated set of weighting coefficients to output, from the spectroscopic instrument, a set of pre-processed measurement data that is characterized by reduced noise contributions. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A tunable diode laser absorption spectroscopy (TDLAS) instrument comprising:
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a tunable laser diode to perform a series of laser scans through a sample gas; at least one detector to measure a transmission amplitude for each laser scan output as a series of raw intensity measurement data points; and a processor to; model noise in the raw intensity measurement data points to select weighting coefficients for each laser scan, wherein the selected weighting coefficients are given as - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. One or more non-transitory machine-readable media comprising a plurality of instructions stored thereon that, when executed, cause a spectroscopic instrument to:
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collect a series of raw intensity measurement data points; calculate, based on a determination of whether detector noise or fluctuation noise dominates in the series of raw intensity measurement data points, a set of weighting coefficients for the raw intensity measurement data points, wherein greater weight is given to larger intensity raw measurement data points over smaller raw intensity measurement data points when detector noise dominates, and wherein greater weight is given to smaller intensity raw measurement data points over larger intensity raw measurement data points when fluctuation noise dominates; and perform a weighted averaging upon the raw intensity measurement data points using the calculated set of weighting coefficients to output from the spectroscopic instrument a set of pre-processed measurement data that is characterized by reduced noise contributions. - View Dependent Claims (19, 20)
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Specification