SUPPLEMENTAL SENSOR MODES AND SYSTEMS FOR ULTRASONIC TRANSDUCERS

• US 20200030850A1
• Filed: 10/03/2019
• Published: 01/30/2020
• Est. Priority Date: 05/10/2016
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: APTE, Nikhil, BERGER, Renata Melamud, DANEMAN, Michael
• Granted Patent: US 11,471,912 B2
• Time in Patent Office: Days
• CPC Class Codes: B06B 1/0292 Electrostatic transducers, e.g. electret-type
• CPC Class Codes: B06B 1/06 operating with piezoelectric effect or with electrostriction piezoelectric or electrostrictive devices per se H10N30/00
• CPC Class Codes: B06B 1/064 with multiple active layers
• CPC Class Codes: B06B 2201/51 Electrostatic transducer
• CPC Class Codes: B06B 2201/55 Piezoelectric transducer

Abstract

A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane configured to allow movement at ultrasonic frequencies. The membrane comprises a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. For operation in a Capacitive Micromachined Ultrasonic Transducer (CMUT) mode, a third electrode is disposed on the substrate and separated by an air gap in the cavity from the second electrode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/CMUT dual-mode devices, and a PMUT/CMUT dual-mode device.

Claims

1. A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device comprising:

a substrate;

an edge support structure connected to the substrate;

a membrane connected to the edge support structure such that a cavity is defined between the membrane and the substrate, the membrane configured to allow movement at ultrasonic frequencies, the membrane comprising;

a piezoelectric layer;

an electrode coupled to a first side of the piezoelectric layer;

a first pair of interdigitated electrodes coupled to a second side of the piezoelectric layer, the first side and the second side on opposite sides of the piezoelectric layer; and

a second pair of interdigitated electrodes coupled to the second side of the piezoelectric layer; and

wherein the PMUT is configured to operate in a Surface Acoustic Wave (SAW) mode.

2. The PMUT device of claim 1, further comprising an interior support structure disposed within the cavity and connected to the substrate and the membrane.

3. The PMUT device of claim 2, wherein the electrode extends into the cavity and defines an area between the edge support structure and the interior support structure.

4. The PMUT device of claim 2, wherein at least one of the electrode, the first pair of interdigitated electrodes, and the second pair of interdigitated electrodes is electrically coupled through the interior support structure.

5. The PMUT device of claim 1, the membrane further comprising:

a mechanical support layer connected to the first pair of interdigitated electrodes and the second pair of interdigitated electrodes.

6. The PMUT device of claim 1, wherein the piezoelectric layer defines a continuous layer.

7. The PMUT device of claim 1, wherein the piezoelectric layer is a patterned layer.

8. The PMUT device of claim 1, wherein the edge support structure is connected to an electric potential.

9. The PMUT device of claim 1, wherein the substrate comprises a CMOS logic wafer.

10. The PMUT device of claim 1, which is selectively switchable between the SAW mode and an ultrasonic mode.

11. The PMUT device of claim 10, wherein in the SAW mode:

a first interdigitated electrode of the first pair of interdigitated electrodes and a first interdigitated electrode of the second pair of interdigitated electrodes inject an AC voltage to generate a surface acoustic wave on the second side of the piezoelectric layer; and

a second interdigitated electrode of the first pair of interdigitated electrodes and a second interdigitated electrode of the second pair of interdigitated electrodes receive the surface acoustic wave propagated on the second side and generate a voltage output based on the surface acoustic wave; and

wherein in the ultrasonic mode, the first pair of interdigitated electrodes and the second pair of interdigitated electrodes are driven with a first potential and the electrode is driven with a second potential, causing the PMUT device to produce a flexural mode of motion in the membrane.

12. The PMUT device of claim 11, wherein in the SAW mode the electrode is either ground or floating.

13. An integrated MEMS array comprising:

a plurality of MEMS Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) for transmitting ultrasonic beams and receiving ultrasonic signals;

wherein at least a portion of the PMUTs are operable in two modes;

a surface acoustic wave (SAW) mode and an ultrasonic mode.

14. The integrated MEMS array of claim 13, wherein the plurality of MEMS PMUT elements comprise a piezoelectric layer of a same material.

15. The integrated MEMS array of claim 14, wherein the piezoelectric layer comprises aluminum nitride.

16. The integrated MEMS array of claim 15, wherein each of the plurality of MEMS PMUT elements is defined by an active membrane having first shape and a first size, and at least one other element is defined by an active membrane having a second shape and a second size, the first shape and the second shape being different but related by proportionality of the first size and the second size so that the integrated MEMS array is contiguous.

17. The integrated MEMS array of claim 16, wherein the first shape is selected from a circle, an oval, a square, a rectangle, a hexagon, an octagon, or a chevron.

18. The integrated MEMS array of claim 14 wherein each PMUT of the portion of PMUTs operable in two modes comprises a membrane comprising the piezoelectric layer and comprising:

an electrode coupled to a first side of the piezoelectric layer;

a first pair of interdigitated electrodes coupled to a second side of the piezoelectric layer, the first side and the second side on opposite sides of the piezoelectric layer; and

a second pair of interdigitated electrodes coupled to the second side of the piezoelectric layer;

wherein in the SAW mode;

a first interdigitated electrode of the first pair of interdigitated electrodes and a first interdigitated electrode of the second pair of interdigitated electrodes inject an AC voltage to generate a surface acoustic wave on the second side of the piezoelectric layer; and

a second interdigitated electrode of the first pair of interdigitated electrodes and a second interdigitated electrode of the second pair of interdigitated electrodes receive the surface acoustic wave propagated on the second side and generate a voltage output based on the surface acoustic wave; and

wherein in the ultrasonic mode, the first pair of interdigitated electrodes and the second pair of interdigitated electrodes are driven with a first potential and the electrode is driven with a second potential, causing the PMUT device to produce a flexural mode of motion in the membrane.

19. A method for operating an array of Piezoelectric Micromachined Ultrasonic Transducer (PMUT)/surface acoustic wave (SAW) dual-mode devices, each dual-mode device comprising a membrane comprising a piezoelectric layer, an electrode coupled to a first side of the piezoelectric layer, a first pair of interdigitated electrodes coupled to a second side of the piezoelectric layer, the first side and the second side on opposite sides of the piezoelectric layer, and a second pair of interdigitated electrodes coupled to the second side of the piezoelectric layer, the method comprising:

selecting a SAW mode by placing an AC voltage on a first interdigitated electrode of the first pair of interdigitated electrodes and a first interdigitated electrode of the second pair of interdigitated electrodes to generate a surface acoustic wave on the second side of the piezoelectric layer;

or

selecting a PMUT mode by driving the first pair of interdigitated electrodes and the second pair of interdigitated electrodes with a first potential and driving the electrode with a second potential, causing the PMUT device to produce a flexural mode of motion in the membrane; and

selectively switching between the PMUT mode and the SAW mode, wherein sensing can occur in either of the PMUT mode and the SAW mode.

20. The method of claim 19, wherein the array comprises heterogeneous elements in which some elements are configured for performance in the PMUT mode and other elements are configured for performance in the SAW mode.