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Phase-Change Material (PCM) Radio Frequency (RF) Switch with Reduced Parasitic Capacitance

  • US 20200058848A1
  • Filed: 10/16/2018
  • Published: 02/20/2020
  • Est. Priority Date: 08/14/2018
  • Status: Active Grant
First Claim
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1. A reduced parasitic capacitance radio frequency (RF) switch comprising:

  • a phase-change material (PCM) and a heating element underlying an active segment of said PCM and extending outward and transverse to said PCM;

    a PCM contact connecting a PCM routing interconnect with a passive segment of said PCM, said passive segment extending outward and transverse to said heating element;

    a heating element contact connecting a heating element routing interconnect with a terminal segment of said heating element;

    said heating element contact being situated cross-wise to said PCM contact, and wherein said heating element routing interconnect is situated at a different interlayer metal level relative to said PCM routing interconnect so as to achieve said reduced parasitic capacitance for said RF switch.

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