CHEMICAL LIQUID MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING CHEMICAL LIQUID

• US 20200129884A1
• Filed: 10/23/2019
• Published: 04/30/2020
• Est. Priority Date: 10/24/2018
• Status: Active Application

• Current Assignee: Fujifilm Electronic Materials USA Incorporated (Fujifilm Holdings Corporation)
• Original Assignee: Fujifilm Electronic Materials USA Incorporated (Fujifilm Holdings Corporation)
• Inventors: Hinzie, Bryan, Cole-Yocom, Marcia
• Application Number:
  US16/660,815
• Publication Number:
  US 20200129884A1
• Time in Patent Office: Days
• CPC Class Codes: B01D 15/161 Temperature conditioning
• CPC Class Codes: B01D 15/361 Ion-exchange
• CPC Class Codes: B01D 2311/10 Temperature control
• CPC Class Codes: B01D 2325/02832 1-10 nm
• CPC Class Codes: B01D 2325/42 Ion-exchange membranes
• CPC Class Codes: B01D 46/543 using membranes
• CPC Class Codes: B01D 61/146 comprising multiple ultrafiltration steps
• CPC Class Codes: B01D 69/02 characterised by their properties
• CPC Class Codes: B01J 47/12 characterised by the use of ion-exchange material in the form of ribbons, filaments, fibres or sheets, e.g. membranes electrodialysis or electro-osmosis B01D61/42
• CPC Class Codes: H01L 21/67248 Temperature monitoring

Abstract

A chemical liquid manufacturing apparatus is provided. The manufacturing apparatus includes at least one filtration medium selected from an ion exchange medium and an ion medium, and a temperature control unit configured to control the temperature of a material to be processed by the at least one filtration medium. A method of manufacturing a chemical liquid using the apparatus is also provided.

Claims

1. A method of manufacturing a chemical liquid, comprising:

providing a system, the system comprising at least one or plural ion exchange membranes and/or one or plural ion adsorption membranes;

configuring a temperature control unit;

regulating a temperature of a material; and

processing the material with the system at a regulated temperature to produce the chemical liquid.

2. The method of claim 1, wherein the temperature of the material is regulated to about 65°

F. or below.

3. The method of claim 1, wherein the temperature of the material is regulated from rising to 70°

F. or above.

4. The method of claim 1, wherein the temperature control unit is configured at an upstream side of the at least one or plural ion exchange membranes and/or one or plural ion adsorption membranes.

5. The method of claim 1, wherein the system processes the material selected from the group consisting of monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, ethyl lactate, methyl methoxypropionate, cyclopentanone, cyclohexanone, γ

-butyrolactone, diisoamyl ether, 4-methyl-2-pentanol, and a combination thereof.

6. The method of claim 1, wherein the system processes the material containing a metal component having a content about 0.1 to 1000 mass ppt.

7. The method of claim 1, wherein the chemical liquid is produced containing a metal component having a content about 0.1 to 100 mass ppt.

8. A chemical liquid manufacturing apparatus, comprising:

a first system configured to process a material, the first system comprising at least one first filtration medium, selected from a first ion exchange membrane and a first ion adsorption membrane; and

a temperature control unit.

9. The chemical manufacturing apparatus of claim 8, wherein the temperature control unit is configured at an upstream side of the at least on first filtration medium.

10. The chemical manufacturing apparatus of claim 8, wherein the temperature control unit is configured at an upstream side of the first ion exchange membrane and/or the first ion adsorption membrane.

11. The chemical manufacturing apparatus of claim 8, wherein the temperature control unit is configured at a temperature of 65°

F. or below.

12. The chemical manufacturing apparatus of claim 8, wherein the temperature control unit is configured from rising to a temperature of 70°

F. or above.

13. The chemical manufacturing apparatus of claim 8 further comprising a particle removal filter having a pore size of 10 nm or less.

14. The chemical manufacturing apparatus of claim 8 further comprising a particle removal filter having a pore size of 20 nm or higher.

15. The chemical manufacturing apparatus of claim 8, wherein the first system is configured to process an organic solvent.

16. The chemical manufacturing apparatus of claim 15, wherein the organic solvent is selected from the group consisting of monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monomethyl ether acetate, ethyl lactate, methyl methoxypropionate, cyclopentanone, cyclohexanone, γ

-butyrolactone, diisoamyl ether, 4-methyl-2-pentanol, and a combination thereof.

17. The chemical manufacturing apparatus of claim 8 further comprising a second system to process the material, and the second system comprising at least one second filtration medium, selected from a second ion exchange membrane and a second ion adsorption membrane, wherein another temperature control unit is configured at an upstream side of the at least one second filtration medium.

18. The chemical manufacturing apparatus of claim 17, wherein the another temperature control unit is configured at a temperature of 65°

F. or below.

19. The chemical manufacturing apparatus of claim 17, wherein the another temperature control unit is configured from rising to a temperature of 70°

F. or above.

20. The chemical manufacturing apparatus of claim 17, wherein the second system is configured at a downstream side of the first system.