WATERPROOF MICROPHONE AND ASSOCIATED PACKING TECHNIQUES
First Claim
1. A device, comprising:
- a microelectromechanical system (MEMS) device;
a housing enclosing the MEMS device, wherein a chamber is formed between the housing and the MEMS device; and
a liquid-resistant air inlet passive device (LRAPD) attached to the housing, the LRAPD being a separate structure independent from the housing, the LRAPD including a channel fluidically connecting the exterior of the housing and the chamber.
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Accused Products
Abstract
Aspects of the disclosure provide a waterproof packaging technique for fabricating waterproof microphones in mobile devices. A device based on the waterproof packaging technique can include a microelectromechanical system (MEMS) device, a housing enclosing the MEMS device, and a liquid-resistant air inlet passive device (LRAPD) on the housing. The LRAPD can include at least one channel connecting an exterior of the housing with a chamber formed between the housing and the MEMS device. An inside surface of the channel can be coated with a liquid-repellant coating. In some examples, the liquid-repellant coating can be a self-assembled monolayer (SAM) coating.
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Citations
20 Claims
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1. A device, comprising:
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a microelectromechanical system (MEMS) device; a housing enclosing the MEMS device, wherein a chamber is formed between the housing and the MEMS device; and a liquid-resistant air inlet passive device (LRAPD) attached to the housing, the LRAPD being a separate structure independent from the housing, the LRAPD including a channel fluidically connecting the exterior of the housing and the chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of making a liquid-resistant air inlet passive device (LRAPD) comprising:
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forming a first channel path in a first substrate; bonding a second substrate to the first substrate; and forming a second channel path through the second substrate, wherein one end of the second channel path is connected to the first channel path. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification