CHEMICAL LIQUID AND CHEMICAL LIQUID STORAGE BODY

• US 20200131118A1
• Filed: 01/02/2020
• Published: 04/30/2020
• Est. Priority Date: 07/05/2017
• Status: Active Application

• Current Assignee: Fujifilm Corporation (Fujifilm Holdings Corporation)
• Original Assignee: Fujifilm Corporation (Fujifilm Holdings Corporation)
• Inventors: KAMIMURA, Tetsuya
• Application Number:
  US16/732,703
• Publication Number:
  US 20200131118A1
• Time in Patent Office: Days
• CPC Class Codes: B65D 23/02 Linings or internal coatings
• CPC Class Codes: C11D 3/32 Amides; Substituted amides
• CPC Class Codes: C11D 3/43 Solvents
• CPC Class Codes: C11D 7/3263 Amides or imides
• CPC Class Codes: C11D 7/5004 Organic solvents
• CPC Class Codes: G03F 7/0012 Processes making use of the tackiness of the photolithographic materials, e.g. for mounting; Packaging for photolithographic material; Packages obtained by processing photolithographic materials
• CPC Class Codes: G03F 7/16 Coating processes; Apparatus therefor applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74
• CPC Class Codes: G03F 7/162 Coating on a rotating support, e.g. using a whirler or a spinner
• CPC Class Codes: G03F 7/168 Finishing the coated layer, e.g. drying, baking, soaking
• CPC Class Codes: G03F 7/325 Non-aqueous compositions
• CPC Class Codes: G03F 7/40 Treatment after imagewise removal, e.g. baking
• CPC Class Codes: G03F 7/425 containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
• CPC Class Codes: H01L 21/30604 Chemical etching

Abstract

An object of the present invention is to provide a chemical liquid having excellent defect inhibition performance and a chemical liquid storage body. The chemical liquid according to an embodiment of the present invention is a chemical liquid containing an organic solvent that has a conductivity equal to or lower than 10⁻⁵ S/m at 25° C., and a compound represented by General Formula (I), in which a content of the compound represented by General Formula (I) with respect to the total mass of the chemical liquid is 0.10 mass ppt to 100,000 mass ppt.

Claims

1. A chemical liquid comprising:

an organic solvent that has a conductivity equal to or lower than 10<sup>−

5</sup> S/m at 25°

C.; and

a compound represented by General Formula (I),

wherein a content of the compound represented by General Formula (I) with respect to the total mass of the chemical liquid is 0.10 mass ppt to 100,000 mass ppt,

2. The chemical liquid according to claim 1,

wherein a boiling point of the compound represented by General Formula (I) is equal to or higher than 300°

C.

3. The chemical liquid according to claim 1, comprising:

two or more kinds of the compound represented by General Formula (I).

4. The chemical liquid according to claim 1, further comprising:

at least one kind of organic compound selected from the group consisting of compounds represented by General Formula (II) to General Formula (IV),

5. The chemical liquid according to claim 4,

wherein the total content of the organic compound with respect to the total mass of the chemical liquid is 0.1 mass ppt to 100,000 mass ppt.

6. The chemical liquid according to claim 1, further comprising:

metal components,

wherein a content of the metal components with respect to the total mass of the chemical liquid is 0.01 to 500 mass ppt.

7. The chemical liquid according to claim 4, further comprising:

metal components,

wherein a ratio of the total content of the compounds represented by General Formula (I) to General Formula (IV) to a content of the metal components is 0.00001 to 10.

8. The chemical liquid according to claim 1,

wherein the organic solvent is at least one kind of compound selected from the group consisting of butyl acetate, isoamyl acetate, and 4-methyl-2-pentanol.

9. A chemical liquid storage body comprising:

a container; and

the chemical liquid according to claim 1 that is stored in the container.

10. The chemical liquid storage body according to claim 9,

wherein the container contains at least one kind of component selected from the group consisting of polyethylene, polypropylene, and a polymer containing fluorine atoms.

11. The chemical liquid storage body according to claim 9,

wherein the container contains a polymer containing fluorine atoms,

an atom number ratio X₁ of the number of fluorine atoms contained in at least a surface of a portion of the container to the number of carbon atoms contained in the surface is 0.50 to 3.0,

an atom number ratio X₂ of the number of fluorine atoms contained in a position 10 nm below the surface in a thickness direction of the container to the number of carbon atoms contained in the position satisfies X₁>

X₂, and

X₁ and X₂ are measured by time-of-flight secondary ion mass spectrometry.

12. The chemical liquid storage body according to claim 10,

wherein the polymer containing fluorine atoms is at least one kind of compound selected from the group consisting of polytetrafluoroethylene, perfluoroalkoxyalkane, a tetrafluoroethylene*hexafluoropropylene copolymer, an ethylene*tetrafluoroethylene copolymer, an ethylene*chlorotrifluoroethylene copolymer, polychlorotrifluoroethylene, polyvinylidene fluoride, and polyvinyl fluoride.

13. The chemical liquid storage body according to claim 9,

wherein the container satisfies a condition 1 in a test described below,

test:

under a condition that a mass ratio of a mass of the container to a mass of a test solvent containing isopropanol at a proportion equal to or higher than 99.99% by mass becomes 0.1 in a case where a liquid temperature of the test solvent is set to be 25°

C., the container is immersed in the test solvent with a liquid temperature of 25°

C. for 48 hours,

condition 1;

in a case where the test solvent having been used for immersion contains one kind of organic impurities, an increase in a content of the organic impurities in the test solvent before and after the immersion is equal to or smaller than 1,000 mass ppm, and in a case where the test solvent having been used for immersion contains two or more kinds of organic impurities, an increase in the total content of two or more kinds of the organic impurities in the test solvent before and after the immersion is equal to or smaller than 1,000 mass ppm.

14. The chemical liquid storage body according to claim 9,

wherein the container satisfies a condition 2 in a test described below,

test:

under a condition that a mass ratio of a mass of the container to a mass of a test solvent containing isopropanol at a proportion equal to or higher than 99.99% by mass becomes 1.0 in a case where a liquid temperature of the test solvent is set to be 25°

C., the container is immersed in the test solvent with a liquid temperature of 25°

C. for 48 hours,

condition 2;

in a case where the test solvent having been used for immersion contains one kind of metal ions, an increase in a content of the metal ions in the test solvent before and after the immersion is equal to or smaller than 100 mass ppb, and in a case where the test solvent having been used for immersion contains two or more kinds of metal ions, an increase in the total content of two or more kinds of the metal ions in the test solvent before and after the immersion is equal to or smaller than 100 mass ppb.

15. The chemical liquid storage body according to claim 9,

wherein the container satisfies a condition 3 in a test described below,

test:

under a condition that a mass ratio of a mass of the container to a mass of a test solvent containing isopropanol at a proportion equal to or higher than 99.99% by mass becomes 1.0 in a case where a liquid temperature of the test solvent is set to be 25°

C., the container is immersed in the test solvent with a liquid temperature of 25°

C. for 48 hours,

condition 3;

in a case where the test solvent having been used for immersion contains one kind of metal particles, an increase in a content of the metal particles in the test solvent before and after the immersion is equal to or smaller than 100 mass ppb, and in a case where the test solvent having been used for immersion contains two or more kinds of metal particles, an increase in the total content of two or more kinds of the metal particles in the test solvent before and after the immersion is equal to or smaller than 100 mass ppb.

16. The chemical liquid storage body according to claim 9,

wherein the container is formed of a composition that contains a polymer containing fluorine atoms and a nanocarbon material,

provided that an integrated intensity of a peak resulting from C═

C stretching vibration confirmed in a range of 1,500 to 1,800 cm<sup>−

1</sup> is I₁ and an integrated intensity of a peak resulting from C—

H stretching vibration confirmed in a range of 2,800 to 3,500 cm<sup>−

1</sup> is I₂, M₁ represented by Formula (1);

M₁=I₁/(I₁+I₂) is 0.05 to 0.5, and

the peaks are determined by atomic force microscopy infrared spectroscopy in at least a surface of a portion of the container.

17. The chemical liquid storage body according to claim 16,

wherein an atom number ratio X₁ of the number of fluorine atoms contained in at least a surface of a portion of the container to the number of carbon atoms contained in the surface is 0.50 to 3.0,

X₁ is measured by time-of-flight secondary ion mass spectrometry,

provided that an integrated intensity of a peak resulting from C═

C stretching vibration confirmed in a range of 1,500 to 1,800 cm<sup>−

1</sup> is I₃ and an integrated intensity of a peak resulting from C—

H stretching vibration confirmed in a range of 2,800 to 3,500 cm<sup>−

1</sup> is I₄, M₂ represented by Formula (3);

M₂=I₃/(I₃+I₄) satisfies Formula (4);

M₁<

M₂, and the peaks are determined using a scattering-type near field microscope in at least a surface of a portion of the container.

18. The chemical liquid storage body according to claim 16,

wherein a content of the nanocarbon material with respect to the total mass of the composition is 0.001% to 0.5% by mass.

19. The chemical liquid storage body according to claim 16,

wherein the nanocarbon material is carbon nanotubes.

20. The chemical liquid storage body according to claim 19,

wherein a major axis of the carbon nanotubes is 0.01 to 1,000 μ

m.

21. The chemical liquid storage body according to claim 9, further comprising:

a lid put on the container.