TARGET FOR OBTAINING COLOURED GLAZING
First Claim
1. A cathode sputtering target formed from an oxide of at least one element chosen from a group of titanium, silicon and zirconium and of particles of a metal included in a group formed by silver, gold, platinum, copper and nickel or particles of an alloy formed from at least two of the metals, the M/Me atomic ratio in said target being less than 1.5, M representing all of the atoms of the elements of the group of titanium, silicon and zirconium and Me representing all of the atoms of the metals of the group formed by silver, gold, platinum, copper and nickel.
2 Assignments
0 Petitions
Accused Products
Abstract
A cathode sputtering target is formed, on the one hand, from an oxide of at least one element chosen from the group of titanium, silicon and zirconium and, on the other hand, of particles of a metal included in the group formed by silver, gold, platinum, copper and nickel or particles of an alloy formed from at least two of these metals, the atomic ratio M/Me in the target being less than 1.5, M representing all of the atoms of the elements of the group of titanium, silicon and zirconium present in the layer and Me representing all of the atoms of the metals of the group formed by silver, gold, platinum, copper and nickel present in the layer.
-
Citations
20 Claims
- 1. A cathode sputtering target formed from an oxide of at least one element chosen from a group of titanium, silicon and zirconium and of particles of a metal included in a group formed by silver, gold, platinum, copper and nickel or particles of an alloy formed from at least two of the metals, the M/Me atomic ratio in said target being less than 1.5, M representing all of the atoms of the elements of the group of titanium, silicon and zirconium and Me representing all of the atoms of the metals of the group formed by silver, gold, platinum, copper and nickel.
Specification