HEAT TREATMENT APPARATUS FOR A VACUUM CHAMBER, DEPOSITION APPARATUS FOR DEPOSITING MATERIAL ON A FLEXIBLE SUBSTRATE, METHOD OF HEAT TREATMENT OF A FLEXIBLE SUBSTRATE IN A VACUUM CHAMBER, AND METHOD FOR PROCESSING A FLEXIBLE SUBSTRATE

  • US 20200131627A1
  • Filed: 07/21/2017
  • Published: 04/30/2020
  • Est. Priority Date: 07/21/2017
  • Status: Active Application
  • ×

    Create Patent Alert


    *Certain alert events are not available for your current subscription level. Upgrade
  • Save
  • 0Associated
    Cases
  • 0Associated
    Defendants
  • 0Accused
    Products
  • 0Forward
    Citations
  • 0
    Petitions
  • 0
    Assignments
    ×



    ×

    Thank you for your feedback

    ×
    ×