AEROSOL-FREE VESSEL FOR BUBBLING CHEMICAL PRECURSORS IN A DEPOSITION PROCESS

• US 20200131630A1
• Filed: 04/06/2018
• Published: 04/30/2020
• Est. Priority Date: 04/10/2017
• Status: Abandoned Application

• Current Assignee: Versum Materials US, LLC (Merck & Co., Inc.)
• Original Assignee: Versum Materials US, LLC (Merck & Co., Inc.)
• Inventors: Birtcher, Charles Michael, Vivanco, Gildardo, Ivanov, Sergei V., Sheehy, William, Steidl, Thomas Andrew
• Application Number:
  US16/603,757
• Publication Number:
  US 20200131630A1
• Time in Patent Office: Days
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/4486 by producing an aerosol and subsequent evaporation of the droplets or particles
• CPC Class Codes: F17C 2205/0311 Closure means
• CPC Class Codes: F17C 2205/0352 Pipes
• CPC Class Codes: F17C 3/00 Vessels not under pressure

Abstract

Described herein are aerosol-free vessels, delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The clogging of valves and piping as some precursors decompose vapor are minimized. This invention prevents mist from forming and thus preventing clogging or wafer contamination from aerosols.

Claims

1. An aerosol-free vessel, comprising:

flow conduit having a start point, an end point, and directional turns between the start point and the end point; and

a fluid containing aerosols flowing from the start point;

wherein

the directional turns maximize residence time of the aerosols in the aerosol-free vessel for phase change to vapor; and

the flow conduit is gradually elevated from the start point to the end point.

2. The aerosol-free vessel of claim 1, wherein the flow conduit has a cross section with a shape selected from the group consisting of at least partial of a circle, at least of an oval, at least partial of a square, at least partial of a rectangle, and combinations thereof;

wherein cross section area of the flow conduit decreases from the stat point to the end point.

3. The aerosol-free vessel of claim 1, further comprises a cover to cover the flow conduit.

4. The aerosol-free vessel of claim 1, wherein the flow conduit is a pipe having a spiral or a serpentine shape.

5. The aerosol-free vessel of claim 1, further comprises a top surface, wherein the top surface of the vessel has a shape selected from circle, oval, square, rectangle, serpentine shape, and combinations thereof.

6. The aerosol-free vessel of claim 1, wherein the start point of the flow conduit comprises a screen to reduce aerosols entering the aerosol-free vessel.

7. The aerosol-free vessel claim 1, further comprises a heater for enhancing phase change to vapor.

8. The aerosol-free vessel of claim 1, further comprises mounting holes for mounting the aerosol-free vessel to a lid of a container or at least one of another aerosol-free vessel.

9. A container for delivering a chemical precursor to a process tool, comprising:

a sidewall;

a base;

a lid;

at one aerosol-free vessel in claim 1 mounted on the lid;

an inlet tube passing through the lid; and

an outlet passing through the lid;

wherein the outlet is in fluid communication with the exit of the last aerosol-free vessel.

10. A system for storage and delivery of a chemical precursor to a process tool, comprising:

a container for delivering a chemical precursor to a process tool, comprising;

a sidewall;

a base;

a lid;

at one aerosol-free vessel in claim 1 mounted on the lid;

an inlet tube passing through the lid; and

an outlet passing through the lid;

wherein the outlet is in fluid communication with the exit of the last aerosol-free vessel; and

vapor of a chemical precursor from the outlet of the container.

11. A method for storage and delivery of a chemical precursor to a process tool, comprising:

providing the system in claim 10, and

deliver the vapor of the chemical precursor from the outlet of the container to the process tool.