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AEROSOL-FREE VESSEL FOR BUBBLING CHEMICAL PRECURSORS IN A DEPOSITION PROCESS

  • US 20200131630A1
  • Filed: 04/06/2018
  • Published: 04/30/2020
  • Est. Priority Date: 04/10/2017
  • Status: Abandoned Application
First Claim
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1. An aerosol-free vessel, comprising:

  • flow conduit having a start point, an end point, and directional turns between the start point and the end point; and

    a fluid containing aerosols flowing from the start point;

    whereinthe directional turns maximize residence time of the aerosols in the aerosol-free vessel for phase change to vapor; and

    the flow conduit is gradually elevated from the start point to the end point.

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